Abstract: A method of operating ozone production facilities comprises supplying a starting gas from oxygen production facilities alone to an ozonizer when the consumption of oxygen is within the production capacity of the oxygen production facilities; or mixing pure oxygen gas from liquid oxygen facilities with the gas from the oxygen production facilities, and supplying the resulting mixed gas as the starting gas to the ozonizer, when the consumption of oxygen exceeds the production capacity of the oxygen production facilities. Thus, the ozone production facilities, even if small in scale, can always supply an ozone-containing gas having an arbitrary ozone concentration, ranging from the maximum to a lower concentration.

Abstract: An ozone generator is formed of at least one ozone-generating pipe, a feed gas chamber connected to one side of the ozone-generating pipe, and an ozonized gas chamber connected to the other side of the ozone-generating pipe. When an oxygen-containing feed gas is supplied to the ozone-generating pipe through the feed gas chamber, the feed gas is subjected to silent discharge in a gap between a ground electrode and a high-voltage electrode in the ozone-generating pipe to thereby allow the feed gas to change to an ozonized gas, which is then fed to the ozonized gas chamber. Gas-permeable flame-propagation-preventing members are arranged to sandwich the discharge gap therebetween to prevent outward propagation of ozonized gas decomposition flame in case the frame is induced to the ozonized gas by spark discharge in the ozone-generating pipe. The ozone generator can be used safely.

Abstract: Ozone production facilities comprising oxygen production facilities as a starting gas supply source, an ozonizer, and an ozone analyzer, and adapted to supply the starting gas by the oxygen production facilities, ozonize the starting gas by the ozonizer to produce an ozone-containing gas; the ozone production facilities further including liquid oxygen facilities as another starting gas supply source, and an oxygen flowmeter for monitoring the flow rate of oxygen supplied by the liquid oxygen facilities.

Abstract: An ozone generator includes a vessel provided at one end with a feed gas chamber for receiving a feed gas through an inlet and at the other end with an ozonized gas chamber, communicating with an outlet, for receiving an ozonized gas, a cylindrical tube ground electrode having a dielectric on an inner peripheral surface for communicating the feed gas chamber with ozonized gas chamber, a hollow cylindrical high voltage electrode having a predetermined discharge gap with respect to the dielectric and disposed concentrically with the cylindrical tube ground electrode, and a high frequency power source for applying a voltage between the ground electrode and the high voltage electrode. Cooling water is supplied to a water jacket surrounding the ground electrode and formed within the vessel and to the hollow cylindrical high voltage electrode to cool both electrodes.