Abstract: A manually-operated diaphragm valve in which the open/close range of a valve disk can be set while compactness is maintained with a simple structure, and a sufficient flow rate at the time of full open is ensured. A valve main body (1) includes a valve disk (12) attached inside a body (10) and a spindle (13) screw-fastened to the body so as to be able to ascend and descend to cause the valve disk to make contact with and go away from a valve seat (14). A handle for manually performing rotating operation of the spindle is mounted above the valve main body. A full-open position adjustment mechanism (20) which limits rotation of the handle on a valve-opening operation side at full open and sets an upper limit of a flow rate when the valve disk is fully open is provided near an upper portion of the valve main body.

Abstract: By preventing a twist of the diaphragm when assembled, various adverse effects arising from such a twist of the diaphragm are completely eliminated. Provided is a set of jigs for assembling a valve including a pair of above and below fixing jigs, a rotation-stop jig, and a fixing means: the rotation-stop jig is inserted and fixed to the above fixing jig in a non-rotational state; the fixing means fixes non-rotatably and attachably the rotation-stop jig and a bonnet of the valve to each other; a body of the valve is inserted and fixed to the below fixing jig in a non-rotational state; the bonnet and the body are fixed independently from each other in a non-rotational state, thereby preventing an outer periphery of a diaphragm from twisting in which a lower surface of an outer periphery of the bonnet and an outer seal part of the body are tightly attached to and hold the outer periphery of the diaphragm.

Abstract: By preventing a twist of the diaphragm when assembled, various adverse effects arising from such a twist of the diaphragm are completely eliminated. Provided is a set of jigs for assembling a valve including a pair of above and below fixing jigs, a rotation-stop jig, and a fixing means: the rotation-stop jig is inserted and fixed to the above fixing jig in a non-rotational state; the fixing means fixes non-rotatably and attachably the rotation-stop jig and a bonnet of the valve to each other; a body of the valve is inserted and fixed to the below fixing jig in a non-rotational state; the bonnet and the body are fixed independently from each other in a non-rotational state, thereby preventing an outer periphery of a diaphragm from twisting in which a lower surface of an outer periphery of the bonnet and an outer seal part of the body are tightly attached to and hold the outer periphery of the diaphragm.

Abstract: A metal diaphragm valve includes a body with a valve seat provided to a valve chamber communicating a primary flow path and a secondary flow path, a metal diaphragm having a center portion disposed above the valve chamber, the center portion vertically moving to make contact with the valve seat, and a stem provided above the metal diaphragm so as to be able to freely ascend and descend to cause the center portion of the metal diaphragm to move downward. A flow-path restriction part is provided to a part of the secondary flow path. The metal diaphragm valve is quite suitable as a valve for ALD process, the valve favorably reduces fluctuations of a Cv value due to deformation of a resin-made valve seat with time even after the valve is opened and closed at a level of ten million times while a fluid at high temperatures is flowing.

Abstract: A diaphragm valve assembling method including steps through which a twist of the diaphragm when assembled is prevented: a step of inserting a bonnet which pressurizes an outer periphery of a diaphragm into a body having a valve seat provided to a valve chamber and the diaphragm arranged thereabove; a step of screwing a fastening nut to an opening and inserting the fastening nut to an outer periphery of the bonnet; a step of fixing a rotation-stop jig inserted through a through hole of the fastening nut and the bonnet via fixing means; and a step of fixing the body and the rotation-stop jig via a fixing jig and fastening the fastening nut, with the bonnet being in a non-rotational state, to tightly attach the bonnet to an outer seal part of the diaphragm.

Abstract: An attachment structure for an actuator-specific solenoid valve and an actuator-quipped valve. The attachment structure can be easily applied to or released from any actuator and a solenoid valve, and the solenoid valve can be easily attached to and removed from any position in a side-surface circumferential direction without impairing compactability of the actuator. The attachment structure for an actuator-specific solenoid valve includes a base body provided on a lower part of a cylindrical actuator and an attachment member removably attachable externally from a main body of the actuator, the attachment member having a fixing part formed as being extended at a position close to a side surface of the main body of the actuator and a solenoid valve for fluid control attached to the fixing part, and the attachment member fixing the solenoid valve being provided rotatably about a side surface of the main body of the actuator.

Abstract: A diaphragm valve assembling method including steps through which a twist of the diaphragm when assembled is prevented: a step of inserting a bonnet which pressurizes an outer periphery of a diaphragm into a body having a valve seat provided to a valve chamber and the diaphragm arranged thereabove; a step of screwing a fastening nut to an opening and inserting the fastening nut to an outer periphery of the bonnet; a step of fixing a rotation-stop jig inserted through a through hole of the fastening nut and the bonnet via fixing means; and a step of fixing the body and the rotation-stop jig via a fixing jig and fastening the fastening nut, with the bonnet being in a non-rotational state, to tightly attach the bonnet to an outer seal part of the diaphragm.

Abstract: An attachment structure for an actuator-specific solenoid valve and an actuator-quipped valve. The attachment structure can be easily applied to or released from any actuator and a solenoid valve, and the solenoid valve can be easily attached to and removed from any position in a side-surface circumferential direction without impairing compactability of the actuator. The attachment structure for an actuator-specific solenoid valve includes a base body provided on a lower part of a cylindrical actuator and an attachment member removably attachable externally from a main body of the actuator, the attachment member having a fixing part formed as being extended at a position close to a side surface of the main body of the actuator and a solenoid valve for fluid control attached to the fixing part, and the attachment member fixing the solenoid valve being provided rotatably about a side surface of the main body of the actuator.

Abstract: A metal diaphragm valve includes a body with a valve seat provided to a valve chamber communicating a primary flow path and a secondary flow path, a metal diaphragm having a center portion disposed above the valve chamber, the center portion vertically moving to make contact with the valve seat, and a stem provided above the metal diaphragm so as to be able to freely ascend and descend to cause the center portion of the metal diaphragm to move downward. A flow-path restriction part is provided to a part of the secondary flow path. The metal diaphragm valve is quite suitable as a valve for ALD process, the valve favorably reduces fluctuations of a Cv value due to deformation of a resin-made valve seat with time even after the valve is opened and closed at a level of ten million times while a fluid at high temperatures is flowing.

Abstract: A valve with a locking mechanism and an integrated valve are provided. The valve includes a handle body having a knob, the handle body being disposed rotatably on top of a valve body housing a valve shaft for opening and closing a valve piece. A cutout stepped face is formed on a part of the outer periphery of the valve body located under the handle body. A locking plate having a locking hole is placed rotatably in the cutout stepped face via a pivotally attaching portion, and when the locking plate is rotated to either a position at which the valve body is in a full-close state or a position at which the valve body is in a full-open state, the locking hole is faced the upper surface area of the valve body to allow locking.

Abstract: A valve with a locking mechanism and an integrated valve are provided. The valve includes a handle body having a knob, the handle body being disposed rotatably on top of a valve body housing a valve shaft for opening and closing a valve piece. A cutout stepped face is formed on a part of the outer periphery of the valve body located under the handle body. A locking plate having a locking hole is placed rotatably in the cutout stepped face via a pivotally attaching portion, and when the locking plate is rotated to either a position at which the valve body is in a full-close state or a position at which the valve body is in a full-open state, the locking hole is faced the upper surface area of the valve body to allow locking.