Abstract: A load sensor device includes a load sensor that has a pressure receiver, a housing that accommodates the load sensor, an elastic member that receives a load and presses against the load sensor, and a pressing member that is provided between the elastic member and the load sensor. The pressing member has a rigid presser capable of coming into contact with the pressure receiver, and an elastic supporter that supports the rigid presser on the housing. A gap is provided between the rigid presser and the pressure receiver in a state where the load is not applied to the elastic member. The elastic supporter elastically deforms to reduce the gap between the rigid presser and the pressure receiver when the load is applied to the elastic member. The load sensor device further includes a shock absorber capable of alleviating elastic deformation of the elastic supporter.

Abstract: A load sensing apparatus according to an aspect of the present invention includes a load sensing element including a pressure sensing portion, a housing that houses the load sensing element, and a pressing member supported by the housing, wherein the pressing member includes an elastic member that receives a load, a stiff pressing portion that is to come into contact with the pressure sensing portion, and an elastic supporting portion that supports the stiff pressing portion in the housing. When no load is applied to the pressing member, a gap is formed between the stiff pressing portion and the pressure sensing portion.

Abstract: A force sensor includes a pressure-receiving member; a sensor substrate including a displaceable portion to be displaced under a load received by the pressure-receiving member, and piezoelectric resistors configured to electrically detect an amount of displacement of the displaceable portion; a base substrate having a sensor-mounting surface, and including electrical wiring portions electrically connected to the piezoelectric resistors; and a package substrate having a substrate-mounting surface and a pad surface provided with pad electrodes. The pressure-receiving member, the sensor substrate, and the base substrate are stacked in a normal direction to the substrate-mounting surface. When seen in the normal direction, an entirety of the displaceable portion is located within the pressure-receiving member. The pad surface is provided with, when seen in the normal direction, a fixing terminal at least a part of which overlaps at least a part of a first area that coincides with the pressure-receiving member.

Abstract: A pressure sensor includes a pressure detecting element; a base material on which the pressure detecting element is mounted; a pad electrode provided on the base material and electrically connected to the pressure detecting element; a ground electrode provided on the base material and spaced from the pad electrode; and a cap having a tubular shape, the cap surrounding a periphery of the pressure detecting element on the base material and being attached to the ground electrode with a conductive adhesive. An inner receiving section is provided between an inner peripheral surface of the cap and a ground-electrode-side end surface of the cap, the inner receiving section thereby preventing excessive spreading of the conductive adhesive. The cap can be attached to the base material with the conductive adhesive without causing excessive spreading of the conductive adhesive.

Abstract: A pressure sensor includes a pressure detection element; a substrate on which the pressure detection element is mounted; and a cap in a tubular shape, the cap being attached to the attachment surface of the substrate with an adhesive, the attachment surface enclosing the periphery of the pressure detection element. An attracting concave part is in the end face of the cap, the end face facing the attachment surface, so as to have an inclined surface the distance of which from the attachment surface is increased in a direction from the outer circumferential surface of the cap toward its inner circumferential surface. Part of the adhesive is embedded in the interior of the attracting concave part.

Abstract: A pressure sensor includes a diaphragm on a silicon substrate and a plurality of piezoelectric element areas that change in resistance according the distortion of the diaphragm. The plurality of piezoelectric element areas of the pressure sensor include a first piezoelectric element area, a second piezoelectric element area, a third piezoelectric element area, and a fourth piezoelectric element area. The diaphragm has a maximum deflection area whose stress becomes 80% or more of a maximum stress when distorted by a predetermined pressure. The first piezoelectric element area, the second piezoelectric element area, the third piezoelectric element area, and the fourth piezoelectric element area are disposed in the maximum deflection area.

Abstract: A load sensor unit according to an aspect of the present invention includes an operating part movable forward and backward in a first direction; a load sensor that has a pressure receiving part and outputs a signal according to a load received in the first direction by the pressure receiving part; a linking part that has one end part linked to the operating part and an other end part that causes the pressure receiving part to operate and is movable forward and backward in the first direction in synchronization with the operating part; and an elastic member that gives biasing force to the other end part of the linking part and gives an initial load to the pressure receiving part through the other end part. This can prevent a load sensor from being broken by an overload with a simple configuration and fully demonstrate detection accuracy of the load sensor.

Abstract: A pressure sensor includes a pressure detection element; a substrate on which the pressure detection element is mounted; and a cap in a tubular shape, the cap being attached to the attachment surface of the substrate with an adhesive, the attachment surface enclosing the periphery of the pressure detection element. An attracting concave part is in the end face of the cap, the end face facing the attachment surface, so as to have an inclined surface the distance of which from the attachment surface is increased in a direction from the outer circumferential surface of the cap toward its inner circumferential surface. Part of the adhesive is embedded in the interior of the attracting concave part.

Abstract: A pressure sensor includes a pressure detecting element; a base material on which the pressure detecting element is mounted; a pad electrode provided on the base material and electrically connected to the pressure detecting element; a ground electrode provided on the base material and spaced from the pad electrode; and a cap having a tubular shape, the cap surrounding a periphery of the pressure detecting element on the base material and being attached to the ground electrode with a conductive adhesive. An inner receiving section is provided between an inner peripheral surface of the cap and a ground-electrode-side end surface of the cap, the inner receiving section thereby preventing excessive spreading of the conductive adhesive. The cap can be attached to the base material with the conductive adhesive without causing excessive spreading of the conductive adhesive.

Abstract: A load sensor unit according to an aspect of the present invention includes an operating part movable forward and backward in a first direction; a load sensor that has a pressure receiving part and outputs a signal according to a load received in the first direction by the pressure receiving part; a linking part that has one end part linked to the operating part and an other end part that causes the pressure receiving part to operate and is movable forward and backward in the first direction in synchronization with the operating part; and an elastic member that gives biasing force to the other end part of the linking part and gives an initial load to the pressure receiving part through the other end part. This can prevent a load sensor from being broken by an overload with a simple configuration and fully demonstrate detection accuracy of the load sensor.

Abstract: A pressure sensor according to the present invention includes a first detection unit that is disposed in a first region and that detects an absolute value of a pressure of a first medium, a second detection unit that is disposed in a second region separated from the first region and that detects an absolute value of a pressure of a second medium that differs from the first medium, and a calculation unit that performs a calculation to obtain a difference between a first pressure detected by the first detection unit and a second pressure detected by the second detection unit.

Abstract: A waterproof pressure sensor includes a pressure detection element, a cavity package configured to be provided with a recess in which the pressure detection element is mounted and an edge provided around the recess, a frame configured to be attached to the edge of the cavity package and has a surface more smoothed than the edge and an opening, a contact prevention member configured to be attached to the frame, and a pressure introducing hole having a diameter smaller than a diameter of the opening at a position overlapping the opening, and a gel agent configured to be provided in the recess and the opening, in which the gel agent is provided to be separated from an edge of the pressure introducing hole on the frame side.

Abstract: A sensor package includes a pressure sensor, a computation unit that performs specified computation in accordance with a result of detection performed by the pressure sensor, a lead frame through which a result of computation performed by the computation unit is output to an outside, a main housing that is formed of resin and that holds the lead frame, and a sensor housing that is formed of ceramic and that has an inner space in which the pressure sensor is disposed. The pressure sensor is disposed in the main housing using the sensor housing.

Abstract: A sensor device includes: a sensor portion having a movable thin film and a detection element configured to output a signal corresponding to displacement of the movable thin film; a frame portion disposed to surround an outside of the sensor portion; a spring portion provided between the frame portion and the sensor portion; and a circuit board including a circuit configured to process the signal output from the detection element, in which the frame portion is laminated on the circuit board, and the sensor portion is cantilevered from the frame portion by the spring portion such that a gap is formed between the sensor portion and the circuit board.

Abstract: In a pressure detection device which is provided in an intake pressure measurement apparatus, a detection space surrounded by an outer wall portion is formed in a housing, and an inner wall portion is formed integrally in the detection space such that both end portions are connected to the outer wall portion. The inner wall portion has a cylindrical shape, and a sensor storage portion is formed between the inner wall portion and the outer wall portion. In the sensor storage portion, a pressure sensor is disposed in a region with the least influence of thermal stress at a position closer to the inner wall portion than the outer wall portion.

Abstract: A sensor device includes: a sensor portion having a movable thin film and a detection element configured to output a signal corresponding to displacement of the movable thin film; a frame portion disposed to surround an outside of the sensor portion; a spring portion provided between the frame portion and the sensor portion; and a circuit board including a circuit configured to process the signal output from the detection element, in which the frame portion is laminated on the circuit board, and the sensor portion is cantilevered from the frame portion by the spring portion such that a gap is formed between the sensor portion and the circuit board.

Abstract: A waterproof pressure sensor includes a pressure detection element, a cavity package configured to be provided with a recess in which the pressure detection element is mounted and an edge provided around the recess, a cover member attached to the edge of the cavity package and to be provided with a pressure introducing hole having a diameter smaller than a diameter of an opening of the recess in a plan view at a position overlapping the recess, and a gel agent configured to be provided in the recess, in which an exhaust portion is provided at the cover member at least on the recess side, the exhaust portion being capable of discharging air in the recess to the outside when the gel agent is injected from the pressure introducing hole into the recess, and the exhaust portion is filled with the gel agent.

Abstract: A waterproof pressure sensor includes a pressure detection element, a cavity package configured to be provided with a recess in which the pressure detection element is mounted and an edge provided around the recess, a frame configured to be attached to the edge of the cavity package and has a surface more smoothed than the edge and an opening, a contact prevention member configured to be attached to the frame, and a pressure introducing hole having a diameter smaller than a diameter of the opening at a position overlapping the opening, and a gel agent configured to be provided in the recess and the opening, in which the gel agent is provided to be separated from an edge of the pressure introducing hole on the frame side.

Abstract: A humidity sensing portion is mounted in a gap between a first opposite member and a second opposite member. Metal joints and dummy joints are provided in the gap between the first opposite member and the second opposite member, and the two opposite members are fixed to each other through the metal joints and the dummy joints. Since only the metal joints and the dummy joints are present in the gap between the two opposite members, gas to be measured is easily introduced into the humidity sensing portion, and the sensing response to the humidity change is improved.

Abstract: A sensor package includes a pressure sensor, a computation unit that performs specified computation in accordance with a result of detection performed by the pressure sensor, a lead frame through which a result of computation performed by the computation unit is output to an outside, a main housing that is formed of resin and that holds the lead frame, and a sensor housing that is formed of ceramic and that has an inner space in which the pressure sensor is disposed. The pressure sensor is disposed in the main housing using the sensor housing.