Patents by Inventor Hisao Ohzeki

Hisao Ohzeki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Stage construction incorporating magnetically levitated movable stage
    Patent number: 6184596
    Abstract: The stage construction of the present invention includes a fixed stage and a magnetically levitated movable stage which is driven in mutually perpendicular X, Y, and Z axis directions with respect to the fixed stage by magnetic action between itself and the fixed stage. The fixed stage includes a magnet and a closed plenum in which the magnet is sealed. The movable stage includes a magnetic material which is opposed to the magnet and which experiences an attractive or repulsive magnetic force with respect to the magnet.
    Type: Grant
    Filed: December 23, 1997
    Date of Patent: February 6, 2001
    Assignee: Nikon Corporation
    Inventor: Hisao Ohzeki
  • Stage construction incorporating magnetically levitated movable stage
    Patent number: 5925956
    Abstract: The stage construction of the present invention includes a fixed stage and a magnetically levitated movable stage which is driven in mutually perpendicular X, Y, and Z axis directions with respect to the fixed stage by magnetic action between itself and the fixed stage. The fixed stage includes a magnet and a closed plenum in which the magnet is sealed. The movable stage includes a magnetic material which is opposed to the magnet and which experiences an attractive or repulsive magnetic force with respect to the magnet.
    Type: Grant
    Filed: June 28, 1996
    Date of Patent: July 20, 1999
    Assignee: Nikon Corporation
    Inventor: Hisao Ohzeki