Abstract: The temperature measurement device includes a thermography 20 for measuring a temperature distribution of a predetermined range in a non-contact manner; a calibrator 21 including at least one heater 30 able to generate heat to a preset temperature; thermistors 32a to 32d provided on installation points on the calibrator 21, and measuring temperatures at the installation points, the installation points having different temperatures; and a controller 22 for calibrating a first temperature measurement result obtained from a temperature distribution of a range covering an object (an eye E of a calf C) measured by the thermography 20, based on temperature differences between a second temperature measurement result obtained from a temperature distribution of a range covering the calibrator 21 measured by the thermography 20 and a third temperature measurement result obtained from a temperature distribution of the calibrator 21 measured by the thermistors 32a to 32d.

Abstract: The invention provides an illuminance measuring system, which comprises an illuminance measuring instrument which comprises a first communication unit and is moved by a moving vehicle, a position measuring means which comprises a second communication unit and measures a three-dimensional position of the illuminance measuring instrument and a data collector which comprises a third communication unit and a storage unit for storing positional information data of a predetermined measuring point, wherein the data collector moves the moving vehicle to the measuring point based on a position of the illuminance measuring instrument and the positional information data, an illuminance is measured and a position of the illuminance measuring instrument is measured, and wherein the data collector obtains an illuminance measurement result from the illuminance measuring instrument, obtains a measuring position from the position measuring means, and collects the illuminance measurement result and the measuring position in as

Abstract: The invention provides a management system for an illumination facility, which comprises an illuminance measuring instrument, a position detector for detecting a position of the traveling vehicle, and an arithmetic device, which are mounted on a traveling vehicle, wherein the arithmetic device is configured to save a map information, positional data of an illumination lamp, initial data including illuminance data, and the illuminance data as acquired by the illuminance measuring instrument while driving the traveling vehicle, and wherein the arithmetic device is configured to calculate daily management data of the illumination facility based on the positional data of the traveling vehicle as detected by the position detector, the map information, and the illuminance data, and further wherein the arithmetic device is configured to calculate a change of the illumination facility including the illumination lamp based on the initial data and the daily management data.

Abstract: The temperature measurement device includes a thermography 20 for measuring a temperature distribution of a predetermined range in a non-contact manner; a calibrator 21 including at least one heater 30 able to generate heat to a preset temperature; thermistors 32a to 32d provided on installation points on the calibrator 21, and measuring temperatures at the installation points, the installation points having different temperatures; and a controller 22 for calibrating a first temperature measurement result obtained from a temperature distribution of a range covering an object (an eye E of a calf C) measured by the thermography 20, based on temperature differences between a second temperature measurement result obtained from a temperature distribution of a range covering the calibrator 21 measured by the thermography 20 and a third temperature measurement result obtained from a temperature distribution of the calibrator 21 measured by the thermistors 32a to 32d.

Abstract: The invention provides an illuminance measuring system, which comprises an illuminance measuring instrument which comprises a first communication unit and is moved by a moving vehicle, a position measuring means which comprises a second communication unit and is capable of measuring a three-dimensional position of the illuminance measuring instrument and a data collector which comprises a third communication unit and a storage unit for storing positional information data of a predetermined measuring point, wherein the data collector moves the moving vehicle to the measuring point based on a position of the illuminance measuring instrument as measured by the position measuring means and the positional information data, an illuminance is measured by the illuminance measuring instrument and a position of the illuminance measuring instrument at the time of illuminance measurement is measured by the position measuring means, and wherein the data collector obtains an illuminance measurement result from the illumina

Abstract: The invention provides an illuminance measuring system, which comprises an illuminance measuring instrument which comprises a first communication unit and is moved by a moving vehicle, a position measuring means which comprises a second communication unit and is capable of measuring a three-dimensional position of the illuminance measuring instrument and a data collector which comprises a third communication unit and a storage unit for storing positional information data of a predetermined measuring point, wherein the data collector moves the moving vehicle to the measuring point based on a position of the illuminance measuring instrument as measured by the position measuring means and the positional information data, an illuminance is measured by the illuminance measuring instrument and a position of the illuminance measuring instrument at the time of illuminance measurement is measured by the position measuring means, and wherein the data collector obtains an illuminance measurement result from the illumina

Abstract: A spatial light measuring system is disclosed, which is configured to store illuminance data acquired by measurement in a new state as initial data, to make the traveling vehicle run after acquiring the initial data, to save illuminance data acquired by the illuminance measuring instrument as daily management data, and to specify an illuminance measuring position and an image acquiring position based on the speed of the traveling vehicle and to use a correction coefficient due to a distance from the ground to an illuminance measuring instrument mounting position and a correction coefficient due to the speed of the traveling vehicle and is configured to correct daily management data into illuminance data on the ground based on both the correction coefficients and to judge the soundness of the illumination facility based on a comparison between the illuminance data as corrected, the initial data and based on the images as acquired.

Abstract: The invention provides a management system for an illumination facility, which comprises an illuminance measuring instrument, a position detector for detecting a position of the traveling vehicle, and an arithmetic device, which are mounted on a traveling vehicle, wherein the arithmetic device is configured to save a map information, positional data of an illumination lamp, initial data including illuminance data, and the illuminance data as acquired by the illuminance measuring instrument while driving the traveling vehicle, and wherein the arithmetic device is configured to calculate daily management data of the illumination facility based on the positional data of the traveling vehicle as detected by the position detector, the map information, and the illuminance data, and further wherein the arithmetic device is configured to calculate a change of the illumination facility including the illumination lamp based on the initial data and the daily management data.

Abstract: The invention provides an illuminance measuring system, which comprises an illuminance measuring instrument which comprises a first communication unit and is moved by a moving vehicle, a position measuring means which comprises a second communication unit and is capable of measuring a three-dimensional position of the illuminance measuring instrument and a data collector which comprises a third communication unit and a storage unit for storing positional information data of a predetermined measuring point, wherein the data collector moves the moving vehicle to the measuring point based on a position of the illuminance measuring instrument as measured by the position measuring means and the positional information data, an illuminance is measured by the illuminance measuring instrument and a position of the illuminance measuring instrument at the time of illuminance measurement is measured by the position measuring means, and wherein the data collector obtains an illuminance measurement result from the illumina

Abstract: The invention provides a spatial light measuring system, which comprises an illuminance measuring instrument for measuring an illuminance on the ground in a state where an illumination facility is new in a running direction of a traveling vehicle at predetermined intervals, the illuminance measuring instrument and an image pickup device which are mounted on the traveling vehicle for continuously acquiring images including an illumination facility at the predetermined time intervals, a speedmeter for detecting a speed of the traveling vehicle and an arithmetic device, wherein the arithmetic device is configured to store illuminance data acquired by the measurement in a new state as initial data, to make the traveling vehicle to run after acquiring the initial data, to save illuminance data acquired.

Abstract: The present invention provides an electron microscope device, comprising a scanning electron microscope 2 provided with scanning means 10 for scanning an electron beam and an electron detector 12 for detecting an electron 11 issued from a specimen 8 where the electron beam is projected for scanning, wherein a scanning electron image is acquired based on a detection result from the electron detector, wherein the electron detector comprises a fluorescent substance layer for performing photoelectric conversion, a wavelength filter giving restriction so that all or almost all of wavelength ranges of fluorescent lights from the fluorescent substance layer can be transmitted, and a wavelength detecting element for receiving the fluorescent light transmitted through the wavelength filter and for performing photoelectric conversion.

Abstract: The present invention provides an electron microscope device, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electron 11 issued from a specimen 8 scanned over by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, the optical microscope has a light emitting source 13 for illuminating an illumination light, and the optical microscope illuminates the illumination light to the specimen, and acquires an optical image by receiving a reflection light from the specimen, and wherein the electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter for restricting so that all or almost all of wavelength ranges of the fluorescent light from the fluorescent substance layer passes through, and a wavelength detecting element for r

Abstract: A complex type microscopic device includes a slider unit moving a stage, an optical microscope, a scanning electron microscope with an electron axis intersecting with an optical axis of the optical microscope, an optical measurement/observation unit having a magnification between those of the scanning electron microscope and the optical microscope and co-using an objective lens with the optical microscope, and a control unit controlling the entire device, and a display unit having a display screen. During display of a low-magnification optical microscopic image, the control unit controls the display unit to display, on the image, a representation to designate an area to be observed at a magnification of the optical measurement/observation unit, and to display, on the image, another representation to designate an area to be observed at a magnification of the scanning electron microscope during display of a high-magnification optical microscopic image.

Abstract: A measuring apparatus measuring a surface shape of a target includes a projection optical system to radiate a line beam on the target, an imaging device to acquire a reflected line beam reflected from the target, an optical imaging system to cause the reflected line beam to form an image on a receiving surface of the imaging device to acquire a shape of the line beam on the target, and a splitting mechanism to split the reflected line beam so as to acquire the shape of the line beam on the target at different positions in an extending direction of the line beam and guide the split reflected line beams to the imaging device. A plurality of segments are set on the receiving surface while each segment in which at least one region is set as a reception region is partitioned into a plurality of regions, and the optical imaging system causes the split reflected line beams to form images on the reception regions in the different segments, respectively.

Abstract: In an interference microscope and a measuring device for observing and inspecting the surface and inside of a specimen such as a wafer by applying laser light to the specimen and using an interferometer, a reference optical path for conducting light is provided between a beam splitter and a reference mirror, and a measurement optical path for conducting light is provided between the beam splitter and the specimen, thereby providing an optical path difference between the reference optical path and the measurement optical path. Further, the reference mirror is tilted slightly, thereby forming interference fringes on detection means. It is possible to measure the surface shape of the specimen (measurement object) such as a wafer only by slightly tilting the reference mirror with a simple configuration and locate the accurate coordinate positions of foreign particles and pole pieces.

Abstract: The present invention provides an electron microscope device 1, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electrons issued from a specimen 8 scanned by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, wherein the optical microscope projects an illumination light to the specimen, receives a reflection light from the specimen and acquires an optical image, and wherein an optical axis 7 of the scanning electron microscope crosses an optical axis 6 of the optical microscope at a point of observation of the specimen, wherein the scanning means projects the electron beam for scanning with a scanning width wider than a width of a scanning area, the optical microscope projects an illumination light and acquires an optical image in an overrunning portion wher

Abstract: The present invention provides an electron microscope device, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electron 11 issued from a specimen 8 scanned over by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, the optical microscope has a light emitting source 13 for illuminating an illumination light, and the optical microscope illuminates the illumination light to the specimen, and acquires an optical image by receiving a reflection light from the specimen, and wherein the electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter for restricting so that all or almost all of wavelength ranges of the fluorescent light from the fluorescent substance layer passes through, and a wavelength detecting element for r

Abstract: A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured.

Abstract: A measuring apparatus measuring a surface shape of a target includes a projection optical system to radiate a line beam on the target, an imaging device to acquire a reflected line beam reflected from the target, an optical imaging system to cause the reflected line beam to form an image on a receiving surface of the imaging device to acquire a shape of the line beam on the target, and a splitting mechanism to split the reflected line beam so as to acquire the shape of the line beam on the target at different positions in an extending direction of the line beam and guide the split reflected line beams to the imaging device. A plurality of segments are set on the receiving surface while each segment in which at least one region is set as a reception region is partitioned into a plurality of regions, and the optical imaging system causes the split reflected line beams to form images on the reception regions in the different segments, respectively.

Abstract: A measuring apparatus for measuring a surface shape of a target, includes a projection system to radiate a line beam on the target, an imaging device to acquire a reflected line beam reflected from the target, a plurality of imaging systems each configured to cause the reflected line beam to form an image on a receiving surface of the imaging device so that a shape of the line beam on the target is acquired and a splitting mechanism to split the reflected line beam and guide the split reflected line beam to the imaging device. The imaging systems have different optical settings for the object in the target, a plurality of segments are set on the receiving surface while each of the segments in each of which at least one region is set as a reception region is partitioned into a plurality of regions, and the imaging system causes the reflected line beams split by the splitting mechanism to form images on the reception regions in the different segments, respectively.