Abstract: A valve is equipped with a displacement amount regulating mechanism (for example, flow rate control device). An abutment member of the displacement amount regulating mechanism protrudes inside a pilot chamber and faces an upper end surface of a valve main body portion of a valve element. When the valve element (the valve main body portion) is separated from a valve seat to bring the valve into an open state, the abutment member is brought into abutment on the upper end surface of the valve main body portion. This abutment regulates the displacement of the valve element.

Abstract: A valve includes a valve mechanism capable of switching a communication state between a first port and a second port of a body. A diaphragm is held between a valve plug and a holder member, at a central portion of the valve mechanism. An outer marginal portion of the diaphragm is held between the body and the bonnet. A pilot channel through which a communication chamber in the body and a pilot chamber in the bonnet communicate with each other is formed in the valve plug. A first hole communicating with the pilot channel is formed at a central portion of the diaphragm. Pressurized fluid in the communication chamber flows into the pilot chamber through the pilot channel and the first hole to thereby bias the valve plug toward a valve seat, by the pressure of the pressurized fluid in combination with an elastic force of a spring.

Abstract: A valve is equipped with a displacement amount regulating mechanism (for example, flow rate control device). An abutment member of the displacement amount regulating mechanism protrudes inside a pilot chamber and faces an upper end surface of a valve main body portion of a valve element. When the valve element (the valve main body portion) is separated from a valve seat to bring the valve into an open state, the abutment member is brought into abutment on the upper end surface of the valve main body portion. This abutment regulates the displacement of the valve element.

Abstract: A valve includes a valve mechanism capable of switching a communication state between a first port and a second port of a body. A diaphragm is held between a valve plug and a holder member, at a central portion of the valve mechanism. An outer marginal portion of the diaphragm is held between the body and the bonnet. A pilot channel through which a communication chamber in the body and a pilot chamber in the bonnet communicate with each other is formed in the valve plug. A first hole communicating with the pilot channel is formed at a central portion of the diaphragm. Pressurized fluid in the communication chamber flows into the pilot chamber through the pilot channel and the first hole to thereby bias the valve plug toward a valve seat, by the pressure of the pressurized fluid in combination with an elastic force of a spring.