Abstract: A recovery route returns, to a retaining tank, mixed solution supplied to a substrate processing unit. A discarding route discards the supplied mixed solution to a place other than the retaining tank. A switching controller causes the supplied mixed solution to flow into the discarding route during a time interval until a first time interval has elapsed from a time point when the substrate processing unit starts to supply the mixed solution; causes the supplied mixed solution to flow into the recovery route during a time interval until a second time interval, which is decided based on a predetermined recovery rate, has elapsed after the first time interval elapses; and causes the supplied mixed solution to flow into the discarding route during a time interval until supply of the mixed solution has been ended from a time point when the second time interval elapses.

Abstract: A recovery route returns, to a retaining tank, mixed solution supplied to a substrate processing unit. A discarding route discards the supplied mixed solution to a place other than the retaining tank. A switching controller causes the supplied mixed solution to flow into the discarding route during a time interval until a first time interval has elapsed from a time point when the substrate processing unit starts to supply the mixed solution; causes the supplied mixed solution to flow into the recovery route during a time interval until a second time interval, which is decided based on a predetermined recovery rate, has elapsed after the first time interval elapses; and causes the supplied mixed solution to flow into the discarding route during a time interval until supply of the mixed solution has been ended from a time point when the second time interval elapses.

Abstract: A rack and pinion gear mechanism includes a rack forming member having a rack; a pinion gear which engages releasably with the rack of rack forming member; and an elastic member which contacts with one portion of the rack forming member and deformed by an elastic deformation corresponding to a displacement of the rack forming member by a confliction of tooth points, the one portion is located opposite side to a tooth of the rack that contacts firstly with a tooth of the pinion gear and the gear mechanism further includes a positioning means to fix the elastic member in a cantilever manner to define a positioning of a free end of the elastic member in height.

Abstract: A disk device for reproducing information includes a clamper that is used to clamp exchangeable disks. The disk device has a movement regulating member which is engaged with a sliding hole made on a base. A clamper base is engaged with a cam hole made on the movement regulating member to swing around a swinging axis on the base as a center. A clamper arm is supported on the clamper base to hold the clamper which clamps the disk. A positioning member is arranged on the base to abut with the clamper base when the clamper base swings. An energizing member urges the movement regulating member along a direction substantially perpendicular to the sliding direction of the movement regulating member.

Abstract: A disk device including a movable portion which supports pivotally and enably to swing a feed screw axis, a thread motor to drive a small gear and the like which engage with a gear interlocked in an end portion of the feed screw axis thereby to rotate the feed screw axis, and a control screw to perform a height control of the movable portion.

Abstract: A disk device in which a precut portion of sub cam plate and a protruding portion of locking plate are made in a slanted shape and at the same time the sub cam plate is rotated by a pressure when the protruding portion is inserted into the precut portion.

Abstract: By a disk device including: a reproducing base which is supported pivotally and enably to swing on a base, and on which a turntable is set; a supporting member which is supported pivotally and enably to swing on the base and which supports the reproducing base in a predetermined position; a clamper which is supported pivotally and enably to swing on the base and which opposes to the turntable to pinch and hold a disk; and a movement regulating member which regulates swing movements of the supporting member and the clamper, supporting by the supporting member in relation to the reproducing base is made sure to prevent deformation of the reproducing base by a clamping force of the clamper.

Abstract: A rack and pinion gear mechanism includes a rack forming member having a rack; a pinion gear which engages releasably with the rack of rack forming member; and an elastic member which contacts with one portion of the rack forming member and deformed by an elastic deformation corresponding to a displacement of the rack forming member by a confliction of tooth points, the one portion is located opposite side to a tooth of the rack that contacts firstly with a tooth of the pinion gear. The elastic member contacts with the one portion of rack forming member at just before and just after beginning of the engagement between the rack and the pinion gear, and the elastic member is apart from the rack forming member when the engagement is achieved. The rack and pinion gear mechanism further includes a positioning means to fix the elastic member in a cantilever manner to define a positioning of a free end of the elastic member in height.

Abstract: A disk device including a movable portion which supports pivotally and enably to swing a feed screw axis, a thread motor to drive a small gear and the like which engage with a gear interlocked in an end portion of the feed screw axis thereby to rotate the feed screw axis, and a control screw to perform a height control of the movable portion.

Abstract: A disk device in which an energizing spring is arranged to energize a movement regulating member in a direction substantially perpendicular to a sliding direction of the movement regulating member.

Abstract: A disc drive comprising a movement control member (12) for controlling the rotational motion of a supporting member (7) and a clamper (5).

Abstract: A disk device constituted that a disk attitude stabilizing mechanism to rotate a disk when a front arm or a rear arm fails to grip the disk 11 and to retry a griping operation of the disk, is included.

Abstract: A disk device in which a precut portion of sub cam plate and a protruding portion of locking plate are made in a slanted shape and at the same time the sub cam plate is rotated by a pressure when the protruding portion is inserted into the precut portion.