Patents by Inventor Hisashi Nanba

Hisashi Nanba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Exposure apparatus, cooling method, and device manufacturing method
    Patent number: 7295282
    Abstract: Disclosed herein are an exposure apparatus and a cooling method usable therein, being effective to improve a mirror temperature-control precision and to suppress temperature changes in a certain allowable range, particularly in an EUV exposure apparatus. The exposure apparatus includes a chamber having an inside space filled with a vacuum ambience, a subject member disposed in the inside space, the subject member being a member to be temperature-adjusted, a radiation member for temperature-adjusting the subject member without contact thereto, and a temperature adjusting mechanism for temperature-adjusting the subject member, wherein the temperature adjusting mechanism changes the temperature of the radiation member before a heat quantity applied or to be applied to the subject member changes.
    Type: Grant
    Filed: February 13, 2004
    Date of Patent: November 13, 2007
    Assignee: Canon Kabushiki Kaisha
    Inventor: Hisashi Nanba
  • Esposure apparatus, cooling method, and device manufacturing method
    Publication number: 20060007413
    Abstract: Disclosed herein are an exposure apparatus and a cooling method usable therein, being effective to improve a mirror temperature-control precision and to suppress temperature changes in a certain allowable range, particularly in an EUV exposure apparatus. The exposure apparatus includes a chamber having an inside space filled with a vacuum ambience, a subject member disposed in the inside space, the subject member being a member to be temperature-adjusted, a radiation member for temperature-adjusting the subject member without contact thereto, and a temperature adjusting mechanism for temperature-adjusting the subject member, wherein the temperature adjusting mechanism changes the temperature of the radiation member before a heat quantity applied or to be applied to the subject member changes.
    Type: Application
    Filed: February 13, 2004
    Publication date: January 12, 2006
    Inventor: Hisashi Nanba