Abstract: An extreme ultraviolet light sensor unit according to one aspect of the present disclosure includes a mirror configured to reflect extreme ultraviolet light, a filter configured to transmit the extreme ultraviolet light reflected by the mirror, an optical sensor configured to detect the extreme ultraviolet light having passed through the filter, a purge gas supply unit disposed to supply purge gas to a space between the mirror and the filter, and a pipe part configured to allow plasma light including the extreme ultraviolet light entering from an opening to pass therethrough toward the mirror and allow the purge gas flowing to the space between the mirror and the filter to flow out of the opening.

Abstract: An extreme ultraviolet light sensor unit according to one aspect of the present disclosure includes a mirror configured to reflect extreme ultraviolet light, a filter configured to transmit the extreme ultraviolet light reflected by the mirror, an optical sensor configured to detect the extreme ultraviolet light having passed through the filter, a purge gas supply unit disposed to supply purge gas to a space between the mirror and the filter, and a pipe part configured to allow plasma light including the extreme ultraviolet light entering from an opening to pass therethrough toward the mirror and allow the purge gas flowing to the space between the mirror and the filter to flow out of the opening.

Abstract: An excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has low power consumption. Each electromagnet (stator) (7-1) of a magnetic bearing (7) for supporting a rotary shaft (4) of a circulation fan 3 includes excitation coils. Each of the coils is arranged as one unit by embedding a coil body in a ceramic or glass type hardened material which is non-magnetic and has corrosion resistance against a laser gas. The excitation coils are attached to magnetic poles. Alternatively, coil wires (108b) of a radial magnetic bearing (108) can be isolated from a corrosive atmosphere by means of a separation wall (124) while projecting portions of cores (108b) extend through the separation wall (124) and are exposed toward a magnetic bearing rotor (108f).

Abstract: The invention provides a method of adjusting a rotational balance of a once through fan for a gas laser apparatus. In a gas laser apparatus having a laser chamber for charging a laser gas and a once through fan for circulating and driving the laser gas, a mounting hole for mounting a balance weight for adjusting a rotational balance of the once through fan is provided on a peripheral edge surface of a blade supporting plate for supporting a blade portion of the once through fan.

Abstract: There is provided an excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has a low power consumption. Each electromagnet (stator) 7-1 of a magnetic bearing 7 for supporting a rotary shaft 4 of a circulation fan 3 includes excitation coils, each of which is arranged as one unit by embedding a coil body in a ceramic or glass type hardened material which is nonmagnetic and has corrosion resistance against a laser gas. The excitation coils are attached to magnetic poles comprising magnetic bodies. Alternatively, an arrangement may be made, such that coil wires 108b of a radial magnetic bearing 108 are isolated from a corrosive atmosphere by means of a separation wall 124 while projecting portions of cores 108b extend through the separation wall 124 and are exposed toward a magnetic bearing rotor 108f.

Abstract: An excimer laser device capable of suppressing vibration of a cross flow fan, and preventing breakage of magnetic bearings when the vibration increases is provided. For this purpose, the device has a configuration that in the excimer laser device including magnetic bearings (12) each having an inner ring section (10, 30) and an outer ring section (11, 31), and a cross flow fan (1) for circulating a laser gas in a chamber (2), touch-down bearings (15) are provided on the outer peripheral side of a rotating shaft (9), and the inner peripheral face of an inner peripheral portion (15B) of the touch-down bearing (15) and the outer peripheral face of the rotating shaft (9) are disposed opposite each other with a predetermined clearance smaller than a gap (4) between the outer peripheral face of the inner ring section (10, 30) and the inner peripheral face of the outer ring section (11, 31).

Abstract: An excimer laser device which neither corrodes due to a laser gas nor contaminates the laser gas is provided. For this purpose, in an excimer laser device including a cross flow fan (1) disposed in a chamber (2) for circulating a laser gas, magnetic bearings (12, 12) having outer ring magnet coils (11, 11) and inner ring magnetic substances (10, 10) for rotatably supporting a rotating shaft (9) by magnetic force, and a motor (49) having a stator (47) and a rotor (48) for directly and rotationally driving the cross flow fan (1), the outer ring magnet coils (11, 11), the inner ring magnetic substances (10, 10), the rotor (48), and the stator (47) are respectively housed in shielded spaces shielded from the laser gas.

Abstract: The invention provides an once through fan for an excimer laser apparatus having a reduced vibration and being capable of increasing a rotational speed. In order to obtain this, in an once through fan (1) for an excimer laser apparatus provided with a blade portion (6) having a plurality of blades, a rotary shaft (4) for rotating the blade portion and a magnetic bearing (7) rotatably supporting the rotary shaft in a non-contact manner so as to circulate a laser gas sealed within a chamber (2) in accordance with a rotation of the blade portion, a rotor (21) of a motor (23) installed within the chamber (2) and rotating the rotary shaft (4) is mounted on an outer peripheral portion of the rotary shaft, and at least one magnetic bearing (7, 7) for supporting the rotary shaft is arranged in each of both sides in an axial direction of the rotor.