Abstract: A magnetic guide apparatus includes a guide member that has a guide plane provided along a first direction, and a moving body that has a facing plane facing the guide plane to be spaced apart from the guide plane. Magnetic attractive force is permitted to operate between the guide plane and the facing plane, such that the moving body is moved along the first direction while movement to a second direction, which is orthogonal to the first direction and parallel to the guide plane, is controlled. A first groove section is formed along the first direction on the guide plane and a second groove section is formed along the first direction so as to face the first groove section on the facing plane.

Abstract: Sheet coils and linear motors including same are disclosed. Also disclosed are stage units, exposure devices, and microelectronic-device manufacturing methods employing the linear motors. The linear motors exhibit reduced viscous resistance. The sheet coil includes at least one coil formed as a conductive wiring trace on an insulative film substrate. The coil includes at least one slit extending in the coil-winding direction. The slit usually separates the coil into multiple partial coils that are connected to AC current having the same phase.