Patents by Inventor Hisayoshi Komai

Hisayoshi Komai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VACUUM PUMPING SYSTEM, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING METHOD OF ELECTRONIC DEVICE, AND OPERATING METHOD OF VACUUM PUMPING SYSTEM
    Publication number: 20110162959
    Abstract: A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas.
    Type: Application
    Filed: March 15, 2011
    Publication date: July 7, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventors: Takahiro Okada, Kazutoshi Aoki, Hisayoshi Komai
  • VACUUM PUMPING SYSTEM, OPERATING METHOD OF VACUUM PUMPING SYSTEM, REFRIGERATOR, VACUUM PUMP, OPERATING METHOD OF REFRIGERATOR, OPERATION CONTROL METHOD OF TWO-STAGE TYPE REFRIGERATOR, OPERATION CONTROL METHOD OF CRYOPUMP, TWO-STAGE TYPE REFRIGERATOR, CRYOPUMP, SUBSTRATE PROCESSING APPARATUS, AND MANUFACTURING METHOD OF ELECTRONIC DEVICE
    Publication number: 20110147198
    Abstract: A plurality of vacuum pumps each having a refrigerator are connected to a common compressor. At least one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in a low-pressure state is adiabatically compressed when the interior of a cylinder shifts from the low-pressure state to a high-pressure state as a result of a valve operation of the refrigerator, and a process in which a displacer passes through the adiabatically compressed gas. At least another one of the plurality of vacuum pumps performs an operation for repeating an operation including a process in which a gas in the high-pressure state is adiabatically expanded when the interior of the cylinder shifts from the high-pressure state to the low-pressure state as a result of the valve operation of the refrigerator, and a process in which the displacer passes through the adiabatically expanded gas.
    Type: Application
    Filed: March 1, 2011
    Publication date: June 23, 2011
    Applicant: CANON ANELVA CORPORATION
    Inventors: Takahiro Okada, Kazutoshi Aoki, Hisayoshi Komai
  • CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP
    Publication number: 20100011783
    Abstract: A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body 6 and the exhaust panel. The mechanism which performs thermal connection/disconnection has a movable unit which has a good heat conductivity and can come into contact with and separate from the exhaust panel and the cooling storage body.
    Type: Application
    Filed: May 13, 2008
    Publication date: January 21, 2010
    Applicant: CANON ANELVA TECHNIX CORPORATION
    Inventors: Kazutoshi Aoki, Takahiro Okada, Hisayoshi Komai, Isao Mochizuki, Tokumitsu Arai