Abstract: An interference image acquisition apparatus includes a light source, a beam splitter, a second reflection mirror, an imager, and a first reflection mirror. A cell is placed on one side of a transparent material, and the first reflection mirror is placed on the other side of the transparent material. In a two-beam interferometer, an optical path difference between an optical path length of a first light beam reflected by the first reflection mirror and an optical path length of a second light beam reflected by the second reflection mirror is set to a coherence length of light output from the light source or less. The imager acquires an interference image in a state in which the cell is placed at a position conjugate to an imaging plane in a first optical system between the imaging plane and the first reflection mirror.

Abstract: An interference image acquisition apparatus includes a light source, a beam splitter, a second reflection mirror, an imager, and a first reflection mirror. A cell is placed on one side of a transparent material, and the first reflection mirror is placed on the other side of the transparent material. In a two-beam interferometer, an optical path difference between an optical path length of a first light beam reflected by the first reflection mirror and an optical path length of a second light beam reflected by the second reflection mirror is set to a coherence length of light output from the light source or less. The imager acquires an interference image in a state in which the cell is placed at a position conjugate to an imaging plane in a first optical system between the imaging plane and the first reflection mirror.

Abstract: A measurement apparatus includes an interference image acquisition unit, a fluorescence image acquisition unit, an operation unit, and a timing control circuit. The operation unit generates an optical thickness image based on an interference image acquired by the interference image acquisition unit, generates a mask image showing a region in which pixel values in a fluorescence image acquired by the fluorescence image acquisition unit are larger than a threshold value, and determines an integrated value of an optical thickness in the region shown by the mask image in the optical thickness image.

Abstract: A measurement apparatus includes an interference image acquisition unit, a fluorescence image acquisition unit, an operation unit, and a timing control circuit. The operation unit generates an optical thickness image based on an interference image acquired by the interference image acquisition unit, generates a mask image showing a region in which pixel values in a fluorescence image acquired by the fluorescence image acquisition unit are larger than a threshold value, and determines an integrated value of an optical thickness in the region shown by the mask image in the optical thickness image.