Abstract: Low-power, all-p-channel enhancement-type metal-oxide semiconductor field-effect transistor (PMOSFET) SRAM cells are disclosed. A PMOSFET SRAM cell is disclosed. The SRAM cell can include a latch having first and second PMOSFETs for storing data. Further, a gate of the first PMOSFET is connected to a drain of the second PMOSFET at a first memory node. A gate of the second PMOSFET is connected to a drain of the first PMOSFET at a second memory node. The SRAM cell can also include third and fourth PMOSFETs forming a pull-down circuit. A source of the third PMOSFET is connected to the first memory node. Further, a source of the fourth PMOSFET is connected to the second memory node. The SRAM cell can include access circuitry for accessing data at the first and second memory nodes for read or write operations.

Abstract: An ellipsometer measures/monitors the change in polarization of light upon reflection from a wafer sample. The temperature of the wafer substrate surface and the film thickness are then simultaneously determined in situ using ellipsometry where the true wafer temperature is determined in real-time by the computer from a calculation based on the known temperature dependence of the refractive index of the wafer. The power output to the lamps is then adjusted accordingly to raise or lower the wafer temperature within the apparatus. This process continues automatically to maintain the desired temperature and film growth rate until the desired film thickness is achieved.