Patents by Inventor Hitohsi Kawai

Hitohsi Kawai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5748315
    Abstract: The present invention relates to an optical interference measuring apparatus and method for measuring displacement of an object. The apparatus and method reduces the displacement-measurement error caused by changes of the refractive index of the atmosphere or the like, in a measurement optical path and a reference optical path, by suppressing crosstalk caused by unfavorable mixing of reference light and measurement light with each other, thereby improving accuracy in the measurement. The apparatus produces interference between a measurement light beam and a reference light beam. The measurement light is propagated through a measurement optical path including a measurement reflector, which is at least movable along the measurement optical path. The reference light is propagated through a reference optical path including a reference reflector. The interference occurs in a predetermined interference system, whereby the displacement of the measurement reflector can be measured.
    Type: Grant
    Filed: March 25, 1996
    Date of Patent: May 5, 1998
    Assignee: Nikon Corporation
    Inventors: Hitohsi Kawai, Jun Kawakami, Kouichi Tsukihara