Abstract: A plating apparatus includes a plating tank for storing a plating liquid, and applies a magnetic alloy plating to a shaft-shaped member immersed in the plating liquid by using the shaft-shaped member as a cathode. The plating apparatus further includes a rotable member configured to rotate the shaft-shaped member as a rotary shaft; annular shielding tools mounted on the outer peripheral surface of the shaft-shaped member; a plating liquid discharge nozzle including plating liquid discharge ports which are provided to face the shaft-shaped member so as to avoid the shielding tools; and an anode provided around the shaft-shaped member and the plating liquid discharge nozzle.

Abstract: This magnetostrictive torque sensor 10 includes a rotating shaft 11 used to rotate according to an input torque and provided with magnetostrictive films 14A and 14B, an excitation coil 12 configured to apply an alternating magnetic field 31 to the magnetostrictive film, and detection coils 13A and 13B each of which detects a change in the magnetic characteristic of an associated one of the magnetostrictive films.

Abstract: A magnetostrictive torque sensor of the present invention is provided with: a magnetostrictive film; a detection coil; a current direction switching device; and an inversion device, wherein: when the current flows in a direction from one side to another side of the detection coil by the current direction switching device, the torque reacted to the shaft is detected based on the input signal of the inversion device; and when the current flows in a inverse direction from another side to one side of the detection coil by the current direction switching device, the torque reacted to the shaft is detected based on the output signal of the inversion device.

Abstract: A plating apparatus includes a plating tank for storing a plating liquid, and applies a magnetic alloy plating to a shaft-shaped member immersed in the plating liquid by using the shaft-shaped member as a cathode. The plating apparatus further includes a routable member configured to rotate the shaft-shaped member as a rotary shaft; annular shielding tools mounted on the outer peripheral surface of the shaft-shaped member; a plating liquid discharge nozzle including plating liquid discharge ports which are provided to face the shaft-shaped member so as to avoid the shielding tools; and an anode provided around the shaft-shaped member and the plating liquid discharge nozzle.

Abstract: A method for manufacturing a magnetostrictive torque sensor having low nonuniformity of sensitivity characteristics. The residual austenite content in the rotating shaft of the torque sensor is measured first. A magnetic film is subsequently subjected to a heat treatment under heat treatment conditions that are different for each of the measured residual austenite contents, and magnetic anisotropy is imparted.

Abstract: A magnetostrictive torque sensor includes a rotating shaft that is rotated by an applied torque, magnetostrictive films formed around the entire circumferential periphery of a surface of the rotating shaft in at least one location, sensor coils for sensing a change in impedance of the magnetostrictive films, and a torque calculation unit for calculating the torque applied to the rotating shaft on the basis of a signal relating to the change in impedance outputted from the sensor coils. In this magnetostrictive torque sensor, a width of the magnetostrictive films in the axial direction of the rotating shaft and a width of the sensor coils in the axial direction of the rotating shaft are set so as to fulfill the relationship 1<(W1/W2)<1.35.

Abstract: A magnetostrictive torque sensor comprising a first magnetostrictive film, a second magnetostrictive film, and a third magnetostrictive film formed over the entire circumferential periphery of a surface of a rotating shaft. A first sensor coil, a second sensor coil, and a third sensor coil for sensing changes in impedance are provided for the first, second, and third magnetostrictive films, respectively. Signals according to the changes in impedance outputted from the first through third sensor coils are inputted to a torque calculating unit. The torque calculating unit calculates the torque applied to the rotating shaft on the basis of the output signal from the first sensor coil and the output signal from the second sensor coil. Furthermore, the output signals from the first through third sensor coils are compared, and failures in the first magnetostrictive film or the second magnetostrictive film are detected by a failure detector.

Abstract: A magnetostrictive torque sensor of the present invention is provided with: a magnetostrictive film; a detection coil; a current direction switching device; and an inversion device, wherein: when the current flows in a direction from one side to another side of the detection coil by the current direction switching device, the torque reacted to the shaft is detected based on the input signal of the inversion device; and when the current flows in a inverse direction from another side to one side of the detection coil by the current direction switching device, the torque reacted to the shaft is detected based on the output signal of the inversion device.

Abstract: This magnetostrictive torque sensor 10 includes a rotating shaft 11 used to rotate according to an input torque and provided with magnetostrictive films 14A and 14B, an excitation coil 12 configured to apply an alternating magnetic field 31 to the magnetostrictive film, and detection coils 13A and 13B each of which detects a change in the magnetic characteristic of an associated one of the magnetostrictive films.

Abstract: A method for manufacturing a magnetostrictive torque sensor compriseis the steps of forming magnetostrictive films on a rotating shaft of a magneto-strictive torque sensor, creating magnetic anisotropy in the magnetostrictive films formed in the magnetostrictive film formation step, and demagnetizing the rotating shaft. The demagnetization step is provided in any of the stages after the magnetostrictive film formation step, and comprises initializing the remanent magnetism created in the rotating shaft.

Abstract: A method for manufacturing a magnetostrictive torque sensor having low nonuniformity of sensitivity characteristics. The residual austenite content in the rotating shaft of the torque sensor is measured first. A magnetic film is subsequently subjected to a heat treatment under heat treatment conditions that are different for each of the measured residual austenite contents, and magnetic anisotropy is imparted.

Abstract: A magnetostrictive torque sensor includes a rotating shaft that is rotated by an applied torque, magnetostrictive films formed around the entire circumferential periphery of a surface of the rotating shaft in at least one location, sensor coils for sensing a change in impedance of the magnetostrictive films, and a torque calculation unit for calculating the torque applied to the rotating shaft on the basis of a signal relating to the change in impedance outputted from the sensor coils. In this magnetostrictive torque sensor, a width of the magnetostrictive films in the axial direction of the rotating shaft and a width of the sensor coils in the axial direction of the rotating shaft are set so as to fulfill the relationship 1<(W1/W2)<1.35.

Abstract: A magnetostrictive torque sensor comprising a first magnetostrictive film, a second magnetostrictive film, and a third magnetostrictive film formed over the entire circumferential periphery of a surface of a rotating shaft. A first sensor coil, a second sensor coil, and a third sensor coil for sensing changes in impedance are provided for the first, second, and third magnetostrictive films, respectively. Signals according to the changes in impedance outputted from the first through third sensor coils are inputted to a torque calculating unit. The torque calculating unit calculates the torque applied to the rotating shaft on the basis of the output signal from the first sensor coil and the output signal from the second sensor coil. Furthermore, the output signals from the first through third sensor coils are compared, and failures in the first magnetostrictive film or the second magnetostrictive film are detected by a failure detector.

Abstract: A magneto resistive sensor having a GMR magnetic laminated film is disclosed. The GMR magnetic laminated film comprises a plurality of magnetic thin layers having a NiCoFeB composition alternately laminated with a nonmagnetic thin layer, such as copper layer. Since the magnetic thin layer contains B in its composition, the GMR magnetic laminated film can stand in magneto resistance ratio (&Dgr;R/R %) under a high temperature of up to 250 degrees centigrade. By the reason, electric wiring can be connected by a lead-free solder to assemble a magnetic resistive sensor for a magnetic rotary encoder. The thermal resistance variation and the magneto resistance ratio are further improved when a NiFeCr underlayer is used under the GMR magnetic laminated film.

Abstract: To provide a bearing sensor having a thin plane coil for applying a biasing magnetic field and at least one magneto resistive element pair (a first magneto resistive thin plate and a second magneto resistive thin plate) crossing opposed conductor sides of the coil. The plane coil has at least one pair of opposed conductor sides (a first side and a second side). The first magneto resistive thin plate and the first side cross one another at an angle more than 30 degrees and less than 90 degrees. The second magneto resistive thin plate and the second side cross one another at an angle more than 30 degrees and less than 90 degrees. While biasing magnetic fields in opposite directions are applied to the magneto resistive thin plates, respectively, intermediate potentials of the magneto resistive element pair are measured to determine bearings based on the difference between the intermediate potentials.

Abstract: A method of processing specimens, an apparatus therefor, and a method of manufacture of a magnetic head are provided wherein a complicated conventional post processing step for removing corrosion products is eliminated by a corrosion prevention processing for removing only a residual chlorine compound produced in the gas plasma etching. More specifically, the method is comprised of the steps of: forming a lamination film including a seed layer made of NiFe alloy, an upper magnetic pole made of NiFe alloy connected to the seed layer, a gap layer made of oxide film in close contact with the seed layer, and a shield layer made of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer with a gas which contains chlorine using the upper magnetic pole as a mask; and after that removing the residual chlorine compound by a plasma post treatment with a gas plasma which contains H2O or methanol.

Abstract: A method of processing specimens, an apparatus therefor, and a method of manufacture of a magnetic head are provided wherein a complicated conventional post processing step for removing corrosion products is eliminated by a corrosion prevention processing for removing only a residual chlorine compound produced in the gas plasma etching. More specifically, the method is comprised of the steps of: forming a lamination film including a seed layer made of NiFe alloy, an upper magnetic pole made of NiFe alloy connected to the seed layer, a gap layer made of oxide film in close contact with the seed layer, and a shield layer made of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer with a gas which contains chlorine using the upper magnetic pole as a mask; and after that removing the residual chlorine compound by a plasma post treatment with a gas plasma which contains H2O or methanol.

Abstract: A method of processing specimens, an apparatus therefor, and a method of manufacture of a magnetic head are provided wherein a complicated conventional post processing step for removing corrosion products is eliminated by a corrosion prevention processing of the invention for removing only a residual chlorine compound produced in the gas plasma etching. More specifically, the method of the invention is comprised of the steps of: forming a lamination film including a seed layer made of NiFe alloy, an upper magnetic pole made of NiFe alloy connected to the seed layer, a gap layer made of oxide film in close contact with the seed layer, and a shield layer made of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer with a gas which contains chlorine using the upper magnetic pole as a mask; and after that removing the residual chlorine compound by a plasma post treatment with a gas plasma which contains H2O or methanol.

Abstract: A magneto resistive sensor having a GMR magnetic laminated film is disclosed. The GMR magnetic laminated film comprises a plurality of magnetic thin layers having a NiCoFeB composition alternately laminated with a nonmagnetic thin layer, such as copper layer. Since the magnetic thin layer contains B in its composition, the GMR magnetic laminated film can stand in magneto resistance ratio (&Dgr;R/R %) under a high temperature of up to 250 degrees centigrade. By the reason, electric wiring can be connected by a lead-free solder to assemble a magnetic resistive sensor for a magnetic rotary encoder. The thermal resistance variation and the magneto resistance ratio are further improved when a NiFeCr underlayer is used under the GMR magnetic laminated film.

Abstract: A method of processing a specimen, an apparatus therefor and a method of manufacture of a magnetic head using the same are provided, featuring a high etching rate at a low specimen temperature, and a simple corrosion prevention treatment for removing a residual chlorine component by liquid rinsing, and thereby eliminating provision of a post treatment step to remove a corrosion product. The method comprises the steps of: forming a lamination layer comprising a seed layer of NiFe alloy, an upper magnetic pole of NiFe alloy connected to the seed layer, a gas layer of an oxide film in close contact with the seed layer, and a shield layer of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer using a gas which contains chlorine with the upper magnetic pole used as its mask; and removing a residual chlorine component by liquid rinsing, following by a drying process.