Patents by Inventor Hitoshi Inuzuka

Hitoshi Inuzuka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FILM FORMING METHOD AND FILM FORMING DEVICE
    Publication number: 20130323421
    Abstract: This is to provide a film forming method, etc., which can form a film containing a high concentration of an impurity under atmospheric pressure efficiently without using a harmful and poisonous gas. The film forming method is constituted by heating a solid source such as boron and phosphorus pentaoxide, etc., and evaporating to generate a gas, and the obtained gas is jetted to the surface(s) of a preheated substrate to form a film.
    Type: Application
    Filed: February 14, 2012
    Publication date: December 5, 2013
    Applicant: SANKEI ENGINEERING CO., LTD
    Inventors: Koji Honma, Hitoshi Inuzuka