Patents by Inventor Hitoshi SEKIHARA

Hitoshi SEKIHARA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and recording medium for changing atmosphere of transfer chamber
    Patent number: 11521880
    Abstract: There is provided a configuration that includes: an intake damper and an intake fan configured to communicate with an intake port that sucks air to a transfer chamber connected to a process chamber; a valve of an inert gas introduction pipe configured to supply an inert gas to the transfer chamber; an exhaust fan and a first exhaust valve installed in the transfer chamber; a switch configured to select one of an atmospheric mode in which an atmosphere of the transfer chamber is an air atmosphere and a purge mode in which the atmosphere of the transfer chamber is an inert gas atmosphere; and a controller configured to control each of the intake damper, the intake fan, the valve of the inert gas introduction pipe, the exhaust fan, and the first exhaust valve to execute one of the atmospheric mode and the purge mode.
    Type: Grant
    Filed: July 25, 2019
    Date of Patent: December 6, 2022
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventors: Satoru Takahata, Ichiro Nunomura, Tsukasa Iida, Hitoshi Sekihara, Kazunori Tsutsuguchi, Jin Shibata
  • SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
    Publication number: 20200035533
    Abstract: There is provided a configuration that includes: an intake damper and an intake fan configured to communicate with an intake port that sucks air to a transfer chamber connected to a process chamber; a valve of an inert gas introduction pipe configured to supply an inert gas to the transfer chamber; an exhaust fan and a first exhaust valve installed in the transfer chamber; a switch configured to select one of an atmospheric mode in which an atmosphere of the transfer chamber is an air atmosphere and a purge mode in which the atmosphere of the transfer chamber is an inert gas atmosphere; and a controller configured to control each of the intake damper, the intake fan, the valve of the inert gas introduction pipe, the exhaust fan, and the first exhaust valve to execute one of the atmospheric mode and the purge mode.
    Type: Application
    Filed: July 25, 2019
    Publication date: January 30, 2020
    Applicant: KOKUSAI ELECTRIC CORPORATION
    Inventors: Satoru TAKAHATA, Ichiro NUNOMURA, Tsukasa IIDA, Hitoshi SEKIHARA, Kazunori TSUTSUGUCHI, Jin SHIBATA