Patents by Inventor Hitoshi Shidahara

Hitoshi Shidahara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Equipment for heating and cooling substrates for coating photo resist thereto
    Patent number: 4863547
    Abstract: Equipment for cooling semi-conductor substrates and printed circuit boards after coating photo resist thereon including heating the substrate for treatment. A heating block furnished with a heating plate is provided in a holding frame device on which the substrate is placed and is so mounted that the heating block can be elevated and lowered vertically therein. The heating block further includes a cooling block having a cooling plate which can be reciprocated from one open side of the holding frame device to the interior thereof, the cooling plate being vertically elevated and lowered in the holding frame equipment when the cooling block is in the holding frame device.
    Type: Grant
    Filed: May 24, 1988
    Date of Patent: September 5, 1989
    Assignee: Tazmo Co., Ltd.
    Inventors: Hitoshi Shidahara, Syozi Yamamoto