Patents by Inventor Hitoshi Urashima

Hitoshi Urashima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for etching ferroelectric film
    Patent number: 5776356
    Abstract: A method for etching a ferroelectric film made of a compound containing lead of the present invention, includes the steps of: forming an insulating film, metal films, and a ferroelectric film on a substrate in this order; forming an etching resistant film on the ferroelectric film, followed by patterning; and etching the ferroelectric film with a mixed gas containing an inert gas and a halogen gas or a halogenated gas as an etching gas, using the patterned etching resistant film as an etching mask.
    Type: Grant
    Filed: February 15, 1995
    Date of Patent: July 7, 1998
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Seiichi Yokoyama, Yasuyuki Itoh, Shigeo Onishi, Jun Kudo, Keizo Sakiyama, Hitoshi Urashima