Abstract: Disclosed is a mass-spectrometry leak detector including a multi-stage turbomolecular pump, a mass spectrometer connected to the suction side of the turbomolecular pump, a preliminary vacuum pump connected to the pressure side of the turbomolecular pump, and a booster pump stage. The suction side of the booster pump stage has a connection for a test object and the pressure side is connected to the pressure side of the turbomolecular pump and to the suction side of the preliminary vacuum pump by means of a gas line path. The stages of the turbomolecular pump and the booster pump stage are arranged on a common shaft and have a common drive and the gas line path is interrupted, by means of a separation, between the pressure side of the booster pump stage and the suction side of the pump stage of the turbomolecular pump connected to the mass spectrometer.

Abstract: A device for evacuating a film chamber using a pump system that comprises at least two vacuum pumps, designed to evacuate the film chamber alternately. A suction capacity of the first vacuum pump is greater than that of the second vacuum pump and the final pressure achievable by the first vacuum pump is less than that of the second vacuum pump.

Abstract: A method for leak detection of a test specimen includes providing an evacuable film test chamber which is operatively coupled to a pressure measuring device, and at least one processor operatively coupled to the pressure measuring device; measuring a pressure within the evacuable film test chamber by the pressure measuring device at predetermined times during a measurement period of time; calculating by the processor, a first or higher order derivative of a pressure change with respect to time at a first predetermined time, and a first or higher order derivative of a pressure change with respect to time at least at a second predetermined time during the measurement period of time, to provide at least a pair of derivative values; and categorizing by the processor a leaky or tight state of the specimen under test by a pattern recognition process based on the pair of derivative values.

Abstract: The invention relates to a gas leakage search device including a test gas spray device for spraying a test object with a test gas, a vacuum assembly for evacuating the test object, wherein the vacuum assembly has a vacuum pump and a gas detector downstream of the test object for measuring the test gas proportion, and an analysis unit which evaluates the measurement signal of the gas detector. The invention is characterized in that a data communication connection is established between the spray device and the analysis unit; the spray device is designed to detect at least one point in time of the spraying process and to transmit same to the analysis unit, and the analysis unit is designed to output the corresponding measured test gas proportion at the transmitted point in time of the spraying process.

Abstract: A device for measuring the pressure at the test gas inlet of a mass-spectrometric leak detector, wherein a mass spectrometer is connected to the inlet of a high vacuum pump, having its outlet connected to the inlet of a pre-vacuum pump, wherein the inlet of the pre-vacuum pump is connected to the test gas inlet, and wherein the inlet of the pre-vacuum pump and at least one intermediate inlet of the high vacuum pump are connected to each other by a connection line comprising a flow throttle.

Abstract: Disclosed is a mass-spectrometry leak detector including a multi-stage turbomolecular pump, a mass spectrometer connected to the suction side of the turbomolecular pump, a preliminary vacuum pump connected to the pressure side of the turbomolecular pump, and a booster pump stage. The suction side of the booster pump stage has a connection for a test object and the pressure side is connected to the pressure side of the turbomolecular pump and to the suction side of the preliminary vacuum pump by means of a gas line path. The stages of the turbomolecular pump and the booster pump stage are arranged on a common shaft and have a common drive and the gas line path is interrupted, by means of a separation, between the pressure side of the booster pump stage and the suction side of the pump stage of the turbomolecular pump connected to the mass spectrometer.

Abstract: A method for leak detection of a test specimen includes providing an evacuable film test chamber which is operatively coupled to a pressure measuring device, and at least one processor operatively coupled to the pressure measuring device; measuring a pressure within the evacuable film test chamber by the pressure measuring device at predetermined times during a measurement period of time; calculating by the processor, a first or higher order derivative of a pressure change with respect to time at a first predetermined time, and a first or higher order derivative of a pressure change with respect to time at least at a second predetermined time during the measurement period of time, to provide at least a pair of derivative values; and categorizing by the processor a leaky or tight state of the specimen under test by a pattern recognition process based on the pair of derivative values.

Abstract: The invention relates to a gas leakage search device including a test gas spray device for spraying a test object with a test gas, a vacuum assembly for evacuating the test object, wherein the vacuum assembly has a vacuum pump and a gas detector downstream of the test object for measuring the test gas proportion, and an analysis unit which evaluates the measurement signal of the gas detector. The invention is characterized in that a data communication connection is established between the spray device and the analysis unit; the spray device is designed to detect at least one point in time of the spraying process and to transmit same to the analysis unit, and the analysis unit is designed to output the corresponding measured test gas proportion at the transmitted point in time of the spraying process.

Abstract: A device for measuring the pressure at the test gas inlet of a mass-spectrometric leak detector, wherein a mass spectrometer is connected to the inlet of a high vacuum pump having its outlet connected to the inlet of a pre-vacuum pump, wherein the inlet of the pre-vacuum pump is connected to the test gas inlet and wherein the inlet of the pre-vacuum pump and at least one intermediate inlet of the high vacuum pump are connected to each other by a connection line comprising a flow throttle.

Abstract: A sniffer leak detector includes a mass spectrometer for analyzing hydrogen or helium, a turbomolecular pump which is connected with said mass spectrometer and whose outlet is connected with a prevacuum pump, and a sniffer probe which includes a plurality of intake lines and is connected with said inlet of said turbomolecular pump, wherein a vacuum pump includes at least three stages whose inlet stage defines said prevacuum pump and is connected with said outlet of said turbomolecular pump via a blocked throttle, wherein, between adjacent stages of said vacuum pump, an intermediate inlet each is provided, wherein each intermediate inlet is connected with a different intake line of said sniffer probe and at least one of the intake lines as a suction line is connected with said inlet of said turbomolecular pump for obtaining different gas flows.

Abstract: A device for evacuating a film chamber using a pump system that comprises at least two vacuum pumps, designed to evacuate the film chamber alternately. A suction capacity of the first vacuum pump is greater than that of the second vacuum pump and the final pressure achievable by the first vacuum pump is less than that of the second vacuum pump.

Abstract: A sniffer leak detector includes a mass spectrometer for analyzing hydrogen or helium, a turbomolecular pump which is connected with said mass spectrometer and whose outlet is connected with a prevacuum pump, and a sniffer probe which includes a plurality of intake lines and is connected with said inlet of said turbomolecular pump, wherein a vacuum pump includes at least three stages whose inlet stage defines said prevacuum pump and is connected with said outlet of said turbomolecular pump via a blocked throttle, wherein, between adjacent stages of said vacuum pump, an intermediate inlet each is provided, wherein each intermediate inlet is connected with a different intake line of said sniffer probe and at least one of the intake lines as a suction line is connected with said inlet of said turbomolecular pump for obtaining different gas flows.

Abstract: The invention relates to a device for leak detection on a test specimen, having an evacuable test chamber for the test specimen. The test chamber is provided with at least one wall area made of a flexible, in particular elastic material. For more precise leakage detection, the progression of the total pressure increase inside the test chamber is measured.

Abstract: An ion deflector, for deflecting a beam of charged particles along an arc in a deflection plane, includes a pair of non-spherical deflection electrodes adapted for being charged with different voltages. The pair of deflection electrodes are configured to control, in both the deflection plane and in a direction perpendicular to the deflection plane, a cross sectional spread of charged particles in a deflected beam that exits the ion deflector. In some embodiments, a first electrode has a first height perpendicular to the deflection plane and a second electrode has a different second height.

Abstract: An ion deflector, for deflecting a beam of charged particles along an arc in a deflection plane, includes a pair of non-spherical deflection electrodes adapted for being charged with different voltages. The pair of deflection electrodes are configured to control, in both the deflection plane and in a direction perpendicular to the deflection plane, a cross sectional spread of charged particles in a deflected beam that exits the ion deflector. In some embodiments, a first electrode has a first height perpendicular to the deflection plane and a second electrode has a different second height.