Abstract: A method includes receiving a carrier, the carrier including a carrier body, a first filter, and a housing securing the first filter to the carrier body. The method further includes uninstalling the housing from the carrier, replacing the first filter with a second filter, reinstalling the housing on the carrier body, and inspecting the second filter. Inspecting the second filter includes using an automatic inspection mechanism to detect surface flatness of the second filter.

Abstract: A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

Abstract: A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

Abstract: A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

Abstract: An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

Abstract: A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

Abstract: A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

Abstract: An optical fingerprint sensing apparatus is provided. A control circuit controls a first selection circuit to output at least one of fingerprint sensing signals on sensing signal lines, and controls a second selection circuit to output at least one of background noise signals on dummy sensing signal lines, so that the first selection circuit and the second selection circuit simultaneously output the fingerprint sensing signal and the background noise signal, respectively. The signal processing circuit cancels background noise of the fingerprint sensing signals according to the background noise signal.

Abstract: The invention provides a fingerprint sensor including a sensing array. The sensing array includes a plurality of sensing units to form a plurality of sensing regions arranged in an array. Each of the plurality of sensing regions includes at least one column of sensing units. A first part of the plurality of sensing regions receives a power signal to perform fingerprint sensing. A second part of the plurality of sensing regions does not receive a power signal. Therefore, the fingerprint sensor of the invention can provide a fast and energy-saving large-area fingerprint sensing effect.

Abstract: A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

Abstract: A touch apparatus and a touch detection integrated circuit (IC) thereof are provided. The touch detection IC includes a driving signal generation circuit and a receiving circuit. The driving signal generation circuit is configured to control a touch panel to perform touch sensing operation and control a fingerprint sensor to perform fingerprint sensing operation. The receiving circuit receives and processes a touch signal of the touch panel during a first period when the driving signal generation circuit transmits the first driving signal for controlling the touch panel to perform touch sensing operation. The receiving circuit receives and processes a fingerprint signal of the fingerprint sensor during a second period when the driving signal generation circuit transmits the second driving signal for controlling the fingerprint sensor to perform fingerprint sensing operation.

Abstract: An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

Abstract: A method includes receiving a carrier with a plurality of wafers inside; supplying a purge gas to an inlet of the carrier; extracting an exhaust gas from an outlet of the carrier; and generating a health indicator of the carrier while performing the supplying of the purge gas and the extracting of the exhaust gas.

Abstract: The invention provides a fingerprint sensor including a sensing array. The sensing array includes a plurality of sensing units to form a plurality of sensing regions arranged in an array. Each of the plurality of sensing regions includes at least one column of sensing units. A first part of the plurality of sensing regions receives a power signal to perform fingerprint sensing. A second part of the plurality of sensing regions does not receive a power signal. Therefore, the fingerprint sensor of the invention can provide a fast and energy-saving large-area fingerprint sensing effect.

Abstract: An optical fingerprint sensing apparatus is provided. A control circuit controls a first selection circuit to output at least one of fingerprint sensing signals on sensing signal lines, and controls a second selection circuit to output at least one of background noise signals on dummy sensing signal lines, so that the first selection circuit and the second selection circuit simultaneously output the fingerprint sensing signal and the background noise signal, respectively. The signal processing circuit cancels background noise of the fingerprint sensing signals according to the background noise signal.

Abstract: A touch apparatus and a touch detection integrated circuit (IC) thereof are provided. The touch detection IC includes a driving signal generation circuit and a receiving circuit. The driving signal generation circuit is configured to control a touch panel to perform touch sensing operation and control a fingerprint sensor to perform fingerprint sensing operation. The receiving circuit receives and processes a touch signal of the touch panel during a first period when the driving signal generation circuit transmits the first driving signal for controlling the touch panel to perform touch sensing operation. The receiving circuit receives and processes a fingerprint signal of the fingerprint sensor during a second period when the driving signal generation circuit transmits the second driving signal for controlling the fingerprint sensor to perform fingerprint sensing operation.

Abstract: A touch apparatus and a touch detection integrated circuit (IC) thereof are provided. The touch detection IC includes a driving signal generation circuit and a receiving circuit. The driving signal generation circuit is configured to transmit at least one first driving signal to a touch panel and a second driving signal to a fingerprint sensor. The receiving circuit receives and processes a touch signal of the touch panel during a first period when the driving signal generation circuit transmits the first driving signal to the touch panel. The receiving circuit receives and processes a fingerprint signal of the fingerprint sensor during a second period when the driving signal generation circuit transmits the second driving signal to the fingerprint sensor.

Abstract: A method includes receiving a carrier with a plurality of wafers inside; supplying a purge gas to an inlet of the carrier; extracting an exhaust gas from an outlet of the carrier; and generating a health indicator of the carrier while performing the supplying of the purge gas and the extracting of the exhaust gas.

Abstract: The finger print detection method includes: accessing a part of an input image to generate a checked image; setting a gray level range, wherein each of a gray level of the gray level rang is larger than a minimum gray level and smaller than a maximum gray level; obtaining a detected pixel number of the checked image corresponding to all of the gray levels within the gray level range; and, checking whether the detected pixel number is larger than a product value of a preset ratio and a total pixel number of the checked image or not to determine whether the checked image is a finger print or not.

Abstract: A touch apparatus and a touch detection integrated circuit (IC) thereof are provided. The touch detection IC includes a driving signal generation circuit and a receiving circuit. The driving signal generation circuit is configured to transmit at least one first driving signal to a touch panel and a second driving signal to a fingerprint sensor. The receiving circuit receives and processes a touch signal of the touch panel during a first period when the driving signal generation circuit transmits the first driving signal to the touch panel. The receiving circuit receives and processes a fingerprint signal of the fingerprint sensor during a second period when the driving signal generation circuit transmits the second driving signal to the fingerprint sensor.