Patents by Inventor Ho-Jeong KWAK

Ho-Jeong KWAK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film
    Patent number: 9417055
    Abstract: An apparatus and a system for measuring the thickness of a thin film are provided. The apparatus includes a signal detector, a Fast Fourier Transform (FFT) generator, an Inverse Fast Fourier Transform (IFFT) generator, and a thickness analyzer. The signal detector detects an electric field signal with respect to a reflected light that is reflected from a thin film. The FFT generator performs FFT with respect to the electric field signal to separate a DC component from an AC component of the electric field signal. The IFFT generator receives the separated AC component of the electric field signal, performs IFFT with respect to the AC component, and extracts a phase value of the AC component. The thickness analyzer measures the thickness of the thin film using the extracted phase value.
    Type: Grant
    Filed: July 14, 2015
    Date of Patent: August 16, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sung-Yoon Ryu, Sang-Kil Lee, Chung-Sam Jun, Woo-Seok Ko, Ho-Jeong Kwak, Souk Kim, Kwan-Woo Ryu, Yu-Sin Yang
  • APPARATUS FOR MEASURING THICKNESS OF THIN FILM, SYSTEM INCLUDING THE APPARATUS, AND METHOD FOR MEASURING THICKNESS OF THIN FILM
    Publication number: 20160061583
    Abstract: An apparatus and a system for measuring the thickness of a thin film are provided. The apparatus includes a signal detector, a Fast Fourier Transform (FFT) generator, an Inverse Fast Fourier Transform (IFFT) generator, and a thickness analyzer. The signal detector detects an electric field signal with respect to a reflected light that is reflected from a thin film. The FFT generator performs FFT with respect to the electric field signal to separate a DC component from an AC component of the electric field signal. The IFFT generator receives the separated AC component of the electric field signal, performs IFFT with respect to the AC component, and extracts a phase value of the AC component. The thickness analyzer measures the thickness of the thin film using the extracted phase value.
    Type: Application
    Filed: July 14, 2015
    Publication date: March 3, 2016
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sung-Yoon RYU, Sang-Kil LEE, Chung-Sam JUN, Woo-Seok KO, Ho-Jeong KWAK, Souk KIM, Kwan-Woo RYU, Yu-Sin YANG