Patents by Inventor Ho-Jun Kang

Ho-Jun Kang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Emission control for perfluorocompound gases by microwave plasma torch
    Patent number: 6620394
    Abstract: The surface cleaning of various components of high-tech devices, including computers and/or semiconductors, is performed during manufacturing. This surface cleaning is performed within a reduced pressure chamber by making use of perifluorocompound industrial gases, which eventually contaminate the atmosphere. These contaminant gases are emitted with nitrogen gas, which is used in operation of a dry pump. Under certain conditions, microwave radiation generates an atmospheric plasma torch. This plasma-torch device is attached to the vacuum pump, which emits the nitrogen gas with contaminants. The oxidation mechanism in the torch flames eliminates these contaminants. Additional reaction gases are mixed with the waste gas to improve efficiency of the contaminant elimination.
    Type: Grant
    Filed: June 15, 2001
    Date of Patent: September 16, 2003
    Inventors: Han Sup Uhm, Yong C. Hong, Ho-Jun Kang
  • Emission control for perfluorocompound gases by microwave plasma torch
    Publication number: 20030000823
    Abstract: The surface cleaning of various components of high-tech devices, including computers and/or semiconductors, is performed during manufacturing. This surface cleaning is performed within a reduced pressure chamber by making use of perifluorocompound industrial gases, which eventually contaminate the atmosphere. These contaminant gases are emitted with nitrogen gas, which is used in operation of a dry pump. Under certain conditions, microwave radiation generates an atmospheric plasma torch. This plasma-torch device is attached to the vacuum pump, which emits the nitrogen gas with contaminants. The oxidation mechanism in the torch flames eliminates these contaminants. Additional reaction gases are mixed with the waste gas to improve efficiency of the contaminant elimination.
    Type: Application
    Filed: June 15, 2001
    Publication date: January 2, 2003
    Inventors: Han Sup Uhm, Yong C. Hong, Ho-Jun Kang