Patents by Inventor Hoan Hguyen

Hoan Hguyen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low sloped edge ring for plasma processing chamber
    Patent number: 8287650
    Abstract: Embodiments of a cover ring for use in a plasma processing chamber are provided. In one embodiment, a cover ring for use in a plasma processing chamber includes a ring-shaped body fabricated from a yttrium (Y) containing material. The body includes a bottom surface having an inner locating ring and an outer locating ring. The inner locating ring extends further from the body than the outer locating ring. The body includes an inner diameter wall having a main wall and a secondary wall separated by a substantially horizontal land. The body also includes a top surface having an outer sloped top surface meeting an inner sloped surface at an apex. The inner sloped surface defines an angle with a line perpendicular to a centerline of the body less than about 70 degrees.
    Type: Grant
    Filed: September 10, 2008
    Date of Patent: October 16, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Changhun Lee, Michael D. Willwerth, Hoan Hguyen
  • LOW SLOPED EDGE RING FOR PLASMA PROCESSING CHAMBER
    Publication number: 20100059181
    Abstract: Embodiments of a cover ring for use in a plasma processing chamber are provided. In one embodiment, a cover ring for use in a plasma processing chamber includes a ring-shaped body fabricated from a yttrium (Y) containing material. The body includes a bottom surface having an inner locating ring and an outer locating ring. The inner locating ring extends further from the body than the outer locating ring. The body includes an inner diameter wall having a main wall and a secondary wall separated by a substantially horizontal land. The body also includes a top surface having an outer sloped top surface meeting an inner sloped surface at an apex. The inner sloped surface defines an angle with a line perpendicular to a centerline of the body less than about 70 degrees.
    Type: Application
    Filed: September 10, 2008
    Publication date: March 11, 2010
    Inventors: Changhun Lee, Michael D. Willwerth, Hoan Hguyen