Patents by Inventor Holger Bald

Holger Bald has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Determination and correction for laser induced CCD camera degradation
    Patent number: 7253905
    Abstract: A process for the determination and correction of laser induced damages of the optical and electronic components within the beam path of a monitor module of a 193 nm excimer lasers is provided herein. Especially state of the art detectors like CCD cameras degrade under UV radiation. With a special correction of the sensitivity of each camera pixel this problem can be solved.
    Type: Grant
    Filed: November 20, 2003
    Date of Patent: August 7, 2007
    Inventors: Dirk L. Basting, Kai Schmidt, Holger Bald, Christian Schramm
  • Determination and correction for laser induced CCD camera degradation
    Publication number: 20040233306
    Abstract: A process for the determination and correction of laser induced damages of the optical and electronic components within the beam path of a monitor module of a 193 nm excimer lasers is provided herein. Especially state of the art detectors like CCD cameras degrade under UV radiation. With a special correction of the sensitivity of each camera pixel this problem can be solved.
    Type: Application
    Filed: November 20, 2003
    Publication date: November 25, 2004
    Inventors: Dirk L. Basting, Kai Schmidt, Holger Bald, Christian Schramm
  • Monitoring of spectral purity and advanced spectral characteristics of a narrow bandwidth excimer laser
    Publication number: 20040141182
    Abstract: An on-board diagnostic tool can be used to monitor the spectral purity of a lithography laser, such as an excimer or molecular fluorine laser, instead of simply measuring the FWHM bandwidth of the laser. One such on-board tool utilizes a Fabry-Perot Interferometer etalon with a high-finesse and a small free spectral range, which provides the precision necessary to determine spectral purity, while providing the small footprint and light weight necessary to use the tool on-board. A high signal-to-noise detector can be used to improve the accuracy of the measurements.
    Type: Application
    Filed: December 10, 2003
    Publication date: July 22, 2004
    Inventors: Thomas Schroder, Holger Bald, Hans-Stephan Albrecht, Thomas Schmidt, Christian Schramm