Patents by Inventor Holger Frank
Holger Frank has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12203910Abstract: A gas measuring apparatus including at least one measuring channel including at least one sensor unit; and a core body including a first part and a second part, wherein the first part is joined at the second part at a flat or planar interface, and wherein the at least one measuring channel is configured in the flat or planar interface.Type: GrantFiled: October 7, 2022Date of Patent: January 21, 2025Assignee: Opus Inspection, Inc.Inventor: Holger Frank
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Patent number: 12117730Abstract: A method for reducing M3D effects on imaging is described. The method includes identifying points within a source plane of the photolithography system that are associated with pattern shifts resulting from diffraction of light off a photomask under an angle of incidence between an imaging beam of radiation and the mask normal, determining pattern shifts associated with the identified source plane points, and modifying the source to reduce the determined pattern shifts.Type: GrantFiled: April 7, 2020Date of Patent: October 15, 2024Assignee: ASML NETHERLANDS B.V.Inventors: Joern-Holger Franke, Eric Henri Jan Hendrickx, Guido Constant Simon Schiffelers
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Publication number: 20230133140Abstract: A gas measuring apparatus including at least one measuring channel including at least one sensor unit; and a core body including a first part and a second part, wherein the first part is joined at the second part at a flat or planar interface, and wherein the at least one measuring channel is configured in the fiat or planar interface.Type: ApplicationFiled: October 7, 2022Publication date: May 4, 2023Inventor: Holger Frank
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Patent number: 11360380Abstract: The present disclosure relates to an extreme ultraviolet lithography, EUVL, device comprising: a reticle comprising a lithographic pattern to be imaged on a target wafer; a light-transmissive pellicle membrane mounted in front of, and parallel to, the reticle, wherein the pellicle membrane scatters transmitted light along a scattering axis; and an extreme ultraviolet, EUV, illumination system configured to illuminate the reticle through the pellicle membrane, wherein an illumination distribution provided by the EUV illumination system is asymmetric as seen in a source-pupil plane of the EUV illumination system; wherein light reflected by the reticle and then transmitted through the pellicle membrane comprises a non-scattered fraction and a scattered fraction formed by light scattered by the pellicle membrane; the EUVL device further comprising: an imaging system having an acceptance cone configured to capture a portion of the light reflected by the reticle and then transmitted through the pellicle membrane.Type: GrantFiled: July 10, 2020Date of Patent: June 14, 2022Assignee: IMEC VZWInventors: Joern-Holger Franke, Emily Gallagher
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Patent number: 11221258Abstract: A measuring device for ascertaining the temperature of a roller surface of a roller body is insertable into a recess of the roller body and includes at least first and second temperature sensors, a mounting rod on which the sensors are situated in the axial direction of the mounting rod spaced apart from each another, and, on each side of each respective one of the temperature sensor in the axial direction a respective supporting element arranged on the mounting rod. Between the supporting elements, the mounting rod is flexible such that each of the temperature sensors is able to be pressed onto an inner wall of the recess with a defined contact force.Type: GrantFiled: August 10, 2017Date of Patent: January 11, 2022Assignee: Robert Bosch GmbHInventors: Ahmed Garamoun, Hannes Rose, Holger Frank, Peter Kunert, Ronny Ludwig
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Patent number: 11181818Abstract: The present disclosure relates to a lithography scanner including: a light source configured to emit extreme ultra-violet (EUV) light; a pellicle including an EUV transmissive membrane that is configured to scatter the EUV light into an elliptical scattering pattern having a first major axis; a reticle configured to reflect the scattered EUV light through the pellicle; and an imaging system configured to project a portion of the reflected light that enters an acceptance cone of the imaging system onto a target wafer, wherein a cross section of the acceptance cone has a second major axis, and wherein the pellicle is arranged such that the first major axis is oriented at an angle relative to the second major axis.Type: GrantFiled: July 31, 2019Date of Patent: November 23, 2021Assignees: IMEC VZW, KATHOLIEKE UNIVERSITEIT LEUVEN, KU LEUVEN R&DInventors: Emily Gallagher, Joern-Holger Franke, Ivan Pollentier, Marina Timmermans, Marina Mariano Juste
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Publication number: 20210302241Abstract: A measuring device for ascertaining the temperature of a roller surface of a roller body is insertable into a recess of the roller body and includes at least first and second temperature sensors, a mounting rod on which the sensors are situated in the axial direction of the mounting rod spaced apart from each another, and, on each side of each respective one of the temperature sensor in the axial direction a respective supporting element arranged on the mounting rod. Between the supporting elements, the mounting rod is flexible such that each of the temperature sensors is able to be pressed onto an inner wall of the recess with a defined contact force.Type: ApplicationFiled: August 10, 2017Publication date: September 30, 2021Inventors: Ahmed Garamoun, Hannes Rose, Holger Frank, Peter Kunert, Ronny Ludwig
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Publication number: 20210011370Abstract: The present disclosure relates to an extreme ultraviolet lithography, EUVL, device comprising: a reticle comprising a lithographic pattern to be imaged on a target wafer; a light-transmissive pellicle membrane mounted in front of, and parallel to, the reticle, wherein the pellicle membrane scatters transmitted light along a scattering axis; and an extreme ultraviolet, EUV, illumination system configured to illuminate the reticle through the pellicle membrane, wherein an illumination distribution provided by the EUV illumination system is asymmetric as seen in a source-pupil plane of the EUV illumination system; wherein light reflected by the reticle and then transmitted through the pellicle membrane comprises a non-scattered fraction and a scattered fraction formed by light scattered by the pellicle membrane; the EUVL device further comprising: an imaging system having an acceptance cone configured to capture a portion of the light reflected by the reticle and then transmitted through the pellicle membrane.Type: ApplicationFiled: July 10, 2020Publication date: January 14, 2021Inventors: Joern-Holger Franke, Emily Gallagher
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Publication number: 20200209737Abstract: The present disclosure relates to a lithography scanner including: a light source configured to emit extreme ultra-violet (EUV) light; a pellicle including an EUV transmissive membrane that is configured to scatter the EUV light into an elliptical scattering pattern having a first major axis; a reticle configured to reflect the scattered EUV light through the pellicle; and an imaging system configured to project a portion of the reflected light that enters an acceptance cone of the imaging system onto a target wafer, wherein a cross section of the acceptance cone has a second major axis, and wherein the pellicle is arranged such that the first major axis is oriented at an angle relative to the second major axis.Type: ApplicationFiled: July 31, 2019Publication date: July 2, 2020Inventors: Emily Gallagher, Joern-Holger Franke, Ivan Pollentier, Marina Timmermans, Marina Mariano Juste
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Patent number: 10690642Abstract: A method for generating a log of a value of a property of a fluid in an earth formation versus depth includes: obtaining a plurality of samples of drilling fluid that are entrained with a formation gas and correlating each sample to a depth in a borehole from which the formation gas was entrained in the drilling fluid; extracting the formation gas from each sample to provide a plurality of gas samples; analyzing each formation gas sample to provide a chemical composition of each formation gas sample in the plurality of formation gas samples; and determining a property value of the fluid in the earth formation versus depth using the chemical composition of each formation gas sample in the plurality of formation gas samples to provide the log.Type: GrantFiled: September 27, 2016Date of Patent: June 23, 2020Assignee: BAKER HUGHES, A GE COMPANY, LLCInventors: Nicklas Ritzmann, Oliver Mohnke, Holger Frank Thern
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Patent number: 10429536Abstract: A method for processing nuclear magnetic resonance (NMR) measurement data includes receiving, with a processor, NMR measurement data obtained from an NMR tool, the NMR measurement data having an echo train affected by a motion artifact, wherein the motion artifact is related to a magnetic field magnitude that varies in a volume of interest due to a motion of the NMR tool. The method further includes reducing, with the processor, an effect on the NMR measurement data of the motion artifact by using a correcting inversion method that models the motion artifact to provide a corrected transverse relaxation time constant (T2) distribution, the correcting inversion method having a multiplicative term having a term that includes at least one local maximum and an optional decay term.Type: GrantFiled: April 4, 2016Date of Patent: October 1, 2019Assignee: BAKER HUGHES, A GE COMPANY, LLCInventors: Tobias Kischkat, Radu Coman, Holger Frank Thern
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Patent number: 10061053Abstract: A method for estimating a property of a subsurface material includes conveying a carrier through a borehole penetrating the subsurface material and performing an NMR measurement in a volume of interest in the subsurface material using an NMR tool having an antenna disposed at the carrier. The method further includes receiving with the antenna a short build-up signal due to a short magnetization build-up time of the NMR measurement, an echo-train signal with short polarization time due to the NMR measurement, and an echo-train signal with long polarization time due to the NMR measurement. The method further includes inverting, simultaneously, the short build-up signal, the short-polarization-time echo-train signal, and the long-polarization-time echo-train signal using a processor to estimate the property; and transmitting a signal comprising the property to a signal receiving device.Type: GrantFiled: April 30, 2015Date of Patent: August 28, 2018Assignee: BAKER HUGHES, A GE COMPANY, LLCInventors: Martin Blanz, Holger Frank Thern, Holger Tietjen, Mouin Hamdan, Radu Coman
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Publication number: 20180088096Abstract: A method for generating a log of a value of a property of a fluid in an earth formation versus depth includes: obtaining a plurality of samples of drilling fluid that are entrained with a formation gas and correlating each sample to a depth in a borehole from which the formation gas was entrained in the drilling fluid; extracting the formation gas from each sample to provide a plurality of gas samples; analyzing each formation gas sample to provide a chemical composition of each formation gas sample in the plurality of formation gas samples; and determining a property value of the fluid in the earth formation versus depth using the chemical composition of each formation gas sample in the plurality of formation gas samples to provide the log.Type: ApplicationFiled: September 27, 2016Publication date: March 29, 2018Applicant: Baker Hughes IncorporatedInventors: Nicklas Ritzmann, Oliver Mohnke, Holger Frank Thern
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Publication number: 20170285214Abstract: A method for processing nuclear magnetic resonance (NMR) measurement data includes receiving, with a processor, NMR measurement data obtained from an NMR tool, the NMR measurement data having an echo train affected by a motion artifact, wherein the motion artifact is related to a magnetic field magnitude that varies in a volume of interest due to a motion of the NMR tool. The method further includes reducing, with the processor, an effect on the NMR measurement data of the motion artifact by using a correcting inversion method that models the motion artifact to provide a corrected transverse relaxation time constant (T2) distribution, the correcting inversion method having a multiplicative term having a term that includes at least one local maximum and an optional decay term.Type: ApplicationFiled: April 4, 2016Publication date: October 5, 2017Applicant: Baker Hughes IncorporatedInventors: Tobias Kischkat, Radu Coman, Holger Frank Thern
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Patent number: 9671483Abstract: A method for processing nuclear magnetic resonance (NMR) measurement data includes: receiving, with a processor, NMR measurement data obtained from an NMR tool, the NMR measurement data being affected by a motion artifact and having a first echo train obtained with a long polarization time TWET and a second echo train obtained with a short polarization time TWTL that is shorter than TWET; and at least one of (i) reducing, with a processor, an effect on the NMR measurement data of the motion artifact using the first echo train and the second echo train and (ii) identifying, with a processor, the motion artifact using the first echo train and the second echo train; wherein the motion artifact is related to a magnetic field magnitude that varies in a volume of interest due to a motion of the NMR tool.Type: GrantFiled: February 26, 2014Date of Patent: June 6, 2017Assignee: BAKER HUGHES INCORPORATEDInventors: Martin Blanz, Holger Frank Thern, Radu Coman
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Publication number: 20170023386Abstract: A probe holder having an access element which can be fitted to an opening in a wall of a pipe is provided. The access element has at least a portion of a continuous access opening, which is constructed for inserting a rod-like measuring instrument into the opening, and having a retention element which is constructed to secure the probe holder to the wall of the pipe. An arresting element is arranged to be movable relative to the access element in an insertion direction of the access opening between a first position and a second position, wherein the arresting element cooperates with the retention element in such a manner that in the first position a state which fixes the securing is defined and in the second position a state which releases the securing is defined.Type: ApplicationFiled: April 11, 2016Publication date: January 26, 2017Applicant: Testo AGInventors: Jorg Binder, Holger Frank
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Publication number: 20160320519Abstract: A method for estimating a property of a subsurface material includes conveying a carrier through a borehole penetrating the subsurface material and performing an NMR measurement in a volume of interest in the subsurface material using an NMR tool having an antenna disposed at the carrier. The method further includes receiving with the antenna a short build-up signal due to a short magnetization build-up time of the NMR measurement, an echo-train signal with short polarization time due to the NMR measurement, and an echo-train signal with long polarization time due to the NMR measurement. The method further includes inverting, simultaneously, the short build-up signal, the short-polarization-time echo-train signal, and the long-polarization-time echo-train signal using a processor to estimate the property; and transmitting a signal comprising the property to a signal receiving device.Type: ApplicationFiled: April 30, 2015Publication date: November 3, 2016Applicant: BAKER HUGHES INCORPORATEDInventors: Martin Blanz, Holger Frank Thern, Holger Tietjen, Mouin Hamdan, Radu Coman
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Patent number: 9404413Abstract: The invention relates to an internal combustion machine (10), comprising a combustion engine (1) having an exhaust gas side (AGS) and a charging fluid side (LLS), and having a supercharger system (14) comprising an exhaust gas turbo charger (40) for charging the combustion engine (1), having a condenser array (41) on the charging fluid side (LLS) and a turbine arrangement (42) on the exhaust gas side (AGS), a compressor (3), the primary side (I) of which is connected to the charging fluid side (LLS), and the secondary side (II) of which is connected to the exhaust gas side (AGS). An electric machine (4) configured as a motor/generator is coupled to the combustion engine (1), wherein the electric machine (4) as a generator can be powered by the combustion engine (1), or can power the combustion engine (1) as a motor, wherein the compressor (3) can be powered directly by the electric machine (4) via a mechanical drive coupling (13).Type: GrantFiled: July 10, 2012Date of Patent: August 2, 2016Assignee: MTU FRIEDRICHSHAFEN GMBHInventors: Claus-Oliver Schmalzing, Holger Frank, Philippe Gorse, Peter Riegger
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Publication number: 20150241541Abstract: A method for processing nuclear magnetic resonance (NMR) measurement data includes: receiving, with a processor, NMR measurement data obtained from an NMR tool, the NMR measurement data being affected by a motion artifact and having a first echo train obtained with a long polarization time TWET and a second echo train obtained with a short polarization time TWTL that is shorter than TWET; and at least one of (i) reducing, with a processor, an effect on the NMR measurement data of the motion artifact using the first echo train and the second echo train and (ii) identifying, with a processor, the motion artifact using the first echo train and the second echo train; wherein the motion artifact is related to a magnetic field magnitude that varies in a volume of interest due to a motion of the NMR tool.Type: ApplicationFiled: February 26, 2014Publication date: August 27, 2015Applicant: BAKER HUGHES INCORPORATEDInventors: Martin Blanz, Holger Frank Thern, Radu Coman
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Patent number: 9024633Abstract: Method and apparatus for estimating a parameter of interest of an earth formation using a model based on NMR data, imaging data, and NMR tool response characteristics. The method may include constructing a model of the earth formation. The method may also include constructing a predictive model for estimating the parameter of interest. The apparatus may include an NMR tool and at least one processor configured to estimate the parameter of interest. The apparatus may also include an imaging tool configured to acquire the imaging data.Type: GrantFiled: February 6, 2012Date of Patent: May 5, 2015Assignee: Baker Hughes IncorporatedInventors: Thomas Kruspe, Holger Frank Thern, Gerhard Kurz