Abstract: A method and an apparatus are provided for measuring the rate of permeation using a mass spectrometer as detector. The gas container containing the test sample is filled with a gas or vapor inside a filling chamber. A pressure-compensating device attached to the gas container alleviates the effect of pressure decrease inside the gas container due to permeation. After transferring the test sample to the investigation chamber the partial pressure of the gas or vapor is detected after permeation through the test sample. After calibration the measured partial pressure is converted into the rate of permeation. The rate of permeation can be studied position-resolved at different locations on the sample. The method can be used to measure permeation through film samples, edges or complete devices.

Abstract: A method and an apparatus are provided for measuring the rate of permeation of a gas or vapour through a test sample with the gas container detachable from the sensor. The gas container consists of an upstream and a downstream chamber in communication with a test sample. The upstream chamber of the gas container containing the test sample is filled with a gas or vapour. The pressure increase in the downstream chamber is monitored and recorded at successive increments of time. To estimate the rate of permeation one or more experimental pressure values can be used as input for a mathematical approximation procedure. Using the starting pressure and one or more pressure values taken at different times allows the gas container with the test sample to be detached from the sensor and hence an increased sample throughput is realised.

Abstract: A method and an apparatus are provided for measuring the rate of permeation of a gas or vapour through a test sample with the gas container detachable from the sensor. The gas container consists of an upstream and a downstream chamber in communication with a test sample. The upstream chamber of the gas container containing the test sample is filled with a gas or vapour. The pressure increase in the downstream chamber is monitored and recorded at successive increments of time. To estimate the rate of permeation one or more experimental pressure values can be used as input for a mathematical approximation procedure. Using the starting pressure and one or more pressure values taken at different times allows the gas container with the test sample to be detached from the sensor and hence an increased sample throughput is realised.

Abstract: A method and an apparatus are provided for measuring the rate of permeation of a gas or vapour through a test sample using a mass spectrometer as detector.