Patents by Inventor Holger Sigel

Holger Sigel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for chemical wet treatment
    Patent number: 5902402
    Abstract: A device for chemical wet treatment of substrates has a tank containing a treatment fluid for treating the substrates. At least one substrate carrier for supporting the substrates within the tank is provided. At least one substrate lifting device for lifting the substrates off the substrate carrier is provided. A lifting apparatus for lifting and lowering the substrate carrier is positioned in the tank. The lifting apparatus has a first transport carriage connected to the substrate lifting device and a second transport carriage connected to a holder of the substrate carrier. The first and second transport carriages are connected to one another by a jointed connection.
    Type: Grant
    Filed: July 3, 1997
    Date of Patent: May 11, 1999
    Assignee: Steag Microtech GmbH
    Inventors: Johann Durst, Holger Sigel, Werner Schulz