Patents by Inventor Holger Sontag

Holger Sontag has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ACTUATOR-SENSOR DEVICE AND LITHOGRAPHY APPARATUS
    Publication number: 20240027914
    Abstract: An actuator-sensor device for an optics module of a lithography apparatus comprises: an actuator-sensor unit having an actuator and a sensor; a control unit electrically connected to the actuator-sensor unit; and a support element which on a first supporting side of same supports the actuator-sensor unit and which on a second supporting side of same supports the control unit, with the second supporting side being opposite to the first supporting side.
    Type: Application
    Filed: October 3, 2023
    Publication date: January 25, 2024
    Inventors: Holger Sontag, Stefan Seitz, Mario Muetzel, Philipp Torres Da Silva, Stefan Krone, Petra Linzmayer, Waldemar Lange, Kai Kunze