Patents by Inventor Holly E. Petersen

Holly E. Petersen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication of precision high quality facets on molecular beam epitaxy material
    Patent number: 6204189
    Abstract: Fabricating mirrored vertical surfaces on semiconductor layered material grown by molecular beam epitaxy (MBE). Low energy chemically assisted ion beam etching (CAIBE) is employed to prepare mirrored vertical surfaces on MBE-grown III-V materials under unusually low concentrations of oxygen in evacuated etching atmospheres of chlorine and xenon ion beams. UV-stabilized smooth-surfaced photoresist materials contribute to highly vertical, high quality mirrored surfaces during the etching.
    Type: Grant
    Filed: January 29, 1999
    Date of Patent: March 20, 2001
    Assignee: The Regents of the University of California
    Inventors: Holly E. Petersen, William D. Goward, Sol P. Dijaili