Patents by Inventor Hong Eun KIM

Hong Eun KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240318309
    Abstract: Disclosed are a raw material supply method including vaporizing a raw material in a canister, discharging the vaporized raw material, measuring an inner temperature of the canister, calculating a calculated temperature by using the inner temperature, and compensating a variation of the inner temperature by heating a heating unit disposed on the canister at the calculated temperature and a raw material supply apparatus applied to the method for supplying the raw material. The raw material supply method and apparatus may stably supply the vaporized raw material to a process space.
    Type: Application
    Filed: June 28, 2022
    Publication date: September 26, 2024
    Inventors: Byung Gwan LIM, Sang Kyo KWON, Yong Hyun KIM, Jin Hyun KIM, Hong Eun KIM, Il Houng PARK, Chang Kyun PARK, In Woo BACK, Won Ju OH, Dong Hwan LEE, Yong Hyun LEE, Jun Seok LEE, Seung Hyun CHO, Jeong HEO