Abstract: A substrate treating apparatus and a substrate treating method are provided. The substrate treating apparatus includes a first process chamber to apply an organic solvent to a substrate applied with a developer and introduced, and a second process chamber to treat the substrate applied with the organic solvent and introduced, through a supercritical fluid.

Abstract: A heat exchanger includes first and second heat exchanging units arranged between first and second header units, and a plurality of refrigerant circuits each defining a refrigerant path, through which refrigerant introduced into the first header unit is discharged out of the first header unit after exchanging heat in the first and second heat exchanging units.

Abstract: An outdoor heat exchanger has a total length of refrigerant flow passage in which a refrigerant flows along a refrigerant tube, and exchanges heat with outdoor air, the outdoor heat exchanger including a plurality of refrigerant tubes spaced apart from one another, a first and second header respectively coupled to both end portions of each of the refrigerant tubes, and a plurality of heat exchanging fins coupled to outer surfaces of the refrigerant tubes to widen a surface making contact with an outside, wherein a total length of a refrigerant flow passage in which a refrigerant flows along the refrigerant tube and exchanges heat with outdoor air is equal to or greater than about 1500 mm and equal to or less than about 6000 mm, in which range, the outdoor heat exchange achieves the optimum performance.

Abstract: A heat exchanger includes first and second heat exchanging units arranged between first and second header units, and a plurality of refrigerant circuits each defining a refrigerant path, through which refrigerant introduced into the first header unit is discharged out of the first header unit after exchanging heat in the first and second heat exchanging units.

Abstract: A header unit includes a body and a cover coupled to the body. The body supports outer and inner sides of the cover in a simultaneous manner. In accordance with this structure, refrigerant can flow in a heat exchanger for cooling/heating purposes requiring high operating pressure of refrigerant.

Abstract: An evaporator utilizes micro-channel tubes, and more particularly, has a structure of a heat exchanger using micro-channel tubes, which is applied to an evaporator of a household air conditioner. The evaporator, using micro-channel tubes, includes a first heat exchanging unit including a pair of upper and lower headers, and a plurality of the micro-channel tubes erected vertically between the headers so that condensed water flows downward, and a second heat exchanging unit, installed adjacent to the first heat exchanging unit, includes a pair of upper and lower headers, and a plurality of the micro-channel tubes erected vertically between the headers so that condensed water flows downward. A plurality of return pipes connect upper headers of neighboring heat exchanging units to transmit refrigerant between the neighboring heat exchanging units.