Patents by Inventor Hong-Jui Chang

Hong-Jui Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TEOS deposition method
    Patent number: 7470584
    Abstract: A TEOS deposition method. A mixture of gases is introduced into a process chamber, in which the mixture of gases comprises tetra-ethyl-ortho-silicate (TEOS) and N2. Compressive stress of a TEOS oxide film is increased by activating the mixture of gases.
    Type: Grant
    Filed: January 21, 2005
    Date of Patent: December 30, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yi-Lung Cheng, Hong-Jui Chang, Ying-Lang Wang
  • TEOS deposition method
    Publication number: 20060166514
    Abstract: A TEOS deposition method. A mixture of gases is introduced into a process chamber, in which the mixture of gases comprises tetra-ethyl-ortho-silicate (TEOS) and N2. Compressive stress of a TEOS oxide film is increased by activating the mixture of gases.
    Type: Application
    Filed: January 21, 2005
    Publication date: July 27, 2006
    Inventors: Yi-Lung Cheng, Hong-Jui Chang, Ying-Lang Wang