Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: A power supply device is provided. The power supply device includes an AC/DC converter configured to convert an input AC power into a first DC power having a predetermined size, and to output the first DC power, a DC/DC converter configured to convert the first DC power into a second DC power according to an enable signal, and a switch including a soft switch connected to the first DC power at one end, and configured to, in response to the soft switch being turned on, voltage-distribute the first DC power, and to provide the voltage-distributed first DC power to the DC/DC converter as an enable signal.

Abstract: A power supply device is provided. The power supply device includes an AC/DC converter configured to convert an input AC power into a first DC power having a predetermined size, and to output the first DC power, a DC/DC converter configured to convert the first DC power into a second DC power according to an enable signal, and a switch including a soft switch connected to the first DC power at one end, and configured to, in response to the soft switch being turned on, voltage-distribute the first DC power, and to provide the voltage-distributed first DC power to the DC/DC converter as an enable signal.

Abstract: A phase detector includes an alternating current input unit to which input power is applied; a zero cross generator that outputs a zero cross signal at a zero cross point of the input power by using a photo coupler; and a zero cross detector that converts the zero cross signal to a pulse signal and detects the phase of the input power based on the pulse signal. A compensation capacitor is connected in parallel at a first side of the photo coupler.

Abstract: A switching mode power supply (SMPS) usable with an image forming apparatus receives an alternating current (AC) power from an external electric power supply source and outputs a direct current (DC) power. When a supply state of an electric power to the image forming apparatus is turned off, electric charges charged in a capacitor of the SMPS are discharged.

Abstract: A phase detector includes an alternating current input unit to which input power is applied; a zero cross generator that outputs a zero cross signal at a zero cross point of the input power by using a photo coupler; and a zero cross detector that converts the zero cross signal to a pulse signal and detects the phase of the input power based on the pulse signal. A compensation capacitor is connected in parallel at a first side of the photo coupler.

Abstract: Disclosed herein are a multi-thermocouple in-core instrument assembly and a system and method for monitoring the internal state of a nuclear reactor after a severe accident using the in-core instrument assembly. In accordance with an embodiment of the present invention, a multi-thermocouple in-core instrument assembly includes a signal compensation detector, thermocouples, and a plurality of neutron detectors disposed between a center pipe having a circular section and an external protection pipe, and the thermocouples have temperature-measuring points at different heights.

Abstract: A switching mode power supply (SMPS) usable with an image forming apparatus receives an alternating current (AC) power from an external electric power supply source and outputs a direct current (DC) power. When a supply state of an electric power to the image forming apparatus is turned off, electric charges charged in a capacitor of the SMPS are discharged.