Abstract: A method of fabricating a semiconductor device, the method comprising: forming a photoresist layer on an upper surface of a wafer; exposing a portion of the photoresist layer to light to form an exposed region of the photoresist layer and an unexposed region of the photoresist layer; etching a first portion of the exposed region by using a first developer having a first temperature; lowering a temperature of the photoresist layer by using cooling gas; and etching a second portion of the exposed region by using a second developer having a second temperature that is lower than the first temperature.

Abstract: A micro LED chip transfer method includes: determining the transfer object size for a transfer, by using a block-by-block LED chip map in which the use state information of an LED chip is stored for each block of the wafer; determining a mask size that can minimize a scrap block of the wafer that is not used for transfer, by using the transfer object size; determining a starting point position of the wafer transfer object region for transfer; and positioning a mask having the mask size at the starting point position of the wafer transfer object region and irradiating a laser, such that the LED chip formed in the wafer transfer object region is transferred.

Abstract: A substrate processing apparatus includes a process chamber having a space in which a substrate is disposed and processed in the process chamber, a supporter disposed in the process chamber and configured to support and rotate the substrate, a heater disposed in the process chamber and configured to heat a first surface of the substrate, where the heater includes one or more irradiation modules for generating light pulses and directing the light pulses to the first surface of the substrate, a controller configured to control an intensity of the light pulse generated by each of the one or more irradiation modules of the heater, and a fluid supplier configured to supply fluid to the first surface of the substrate.

Abstract: Provided is a culture material and a cultivation method of Ganoderma amboinense, which are used to increase the concentration of Ganoderiol F in the Ganoderma amboinense extract. First, the culture material is prepared, 38˜42 parts by weight of corn cobs, 6.65˜7.35 parts by weight of wheat bran, 6.65˜7.35 parts by weight of rice bran, 19˜21 parts by weight of seaweed powder, 23.75˜26.25 parts by weight of sawdust, and 0.95˜1.05 parts by weight of sucrose are mixed evenly to obtain a fungi bag. Next, sterilization is performed, followed by inoculation of the fungi of Ganoderma amboinense into the fungi bag and subsequent cultivation. Finally, Ganoderma amboinense is harvested when the fruiting body of the Ganoderma amboinense grows to a stipe length of 20-25 cm, and spore powder has not been released.

Abstract: In one aspect, optical elements and luminaires employing optical elements are described herein. In some embodiments, an optical element comprises a planar light transmissive body comprising a light input surface and a light output surface opposite the input surface, and light redirection features arranged over the light input surface and the light output surface, the light redirection features comprising refractive facets, reflective facets, facets supporting total internal reflection within the planar light transmissive body, or combinations thereof.

Abstract: A motion sensing device adapts a field of view around a primary sensing axis of the motion sensing device by electrically controlling a detection sensitivity of a passive infrared sensor of the motion sensing device. Responsive to adapting the field of view, the motion sensing device monitors for motion within the field of view using the passive infrared sensor.

Abstract: Proposed are an organic-inorganic composite thermoelectric material and a preparation method thereof. The organic-inorganic composite thermoelectric material includes an organic matrix and an inorganic thermoelectric portion dispersed in the organic matrix and including a nanomaterial. The organic matrix includes an organic conductor, and the nanomaterial includes at least one selected from the group consisting of a chalcogen element and a chalcogenide. The organic-inorganic composite thermoelectric material of the present invention has advantages of low cost and excellent thermoelectric properties through complexation of an aligned inorganic thermoelectric material and an organic thermoelectric material.

Abstract: Lighting devices having optical waveguides for controlled light distribution are provided. A lighting device includes a housing, a light emitter disposed in the housing, and a waveguide at least partially disposed in an opening of the housing. The waveguide includes a light input surface defining coupling features, wherein the light emitter is disposed adjacent the light input surface and emits light into the coupling features. The waveguide further includes a light transmission portion disposed between the light input surface and a light extraction portion, wherein light from the light emitter received at the light input surface propagates through the light transmission portion toward the light extraction portion. The waveguide further includes the light extraction portion, which comprises at least one light redirection feature and at least one light extraction feature that cooperate to generate a controlled light pattern exiting the lighting device.

Abstract: A computer-implemented method, according to one approach, includes collecting historical event log data from host devices and training a first model to convert textual log events of the historical event log data into event embedding vectors. The method further includes training a second model to classify whether at least some of the event embedding vectors represent abnormal or potentially malicious behavior. The second model is a hierarchical temporal event transformer model. The method further includes deploying the trained first model and the trained second model to predict a likelihood of a malicious cybersecurity event occurring within a first predetermined period of time from a current time. A computer program product, according to another approach, includes a computer readable storage medium having program instructions embodied therewith. The program instructions are readable and/or executable by a computer to cause the computer to perform the foregoing method.

Abstract: In one example in accordance with the present disclosure, a printhead cap system is described. The printhead cap system includes a cap having an elastomer seal to surround a printhead die on a print cartridge. The printhead cap system also includes a variable force capping station to retain the cap. The variable force capping station is to move the cap to 1) a first position wherein the cap exerts a first force on a substrate on which the printhead die is disposed and 2) a second position wherein the cap exerts a second force on the substrate. In an example, the second force is greater than the first force. The printhead cap system also includes a control system to raise the cap from an uncapped position through the first position and the second position.

Abstract: Optical lenses and associated luminaire are described herein. In one aspect, a lens comprises a light receiving side comprising grooves for receiving light emitting diodes, the grooves defined by a central refractive region and walls comprising total internal reflection faces; and a light extraction side opposite the light receiving side, the light extraction side comprising refractive extraction surfaces, total internal reflection extraction surfaces, or combinations thereof. In some embodiments, luminaire comprises an array of light emitting diodes; and the lens positioned over the array of light emitting diodes.

Abstract: Lighting devices having optical waveguides for controlled light distribution are provided. A lighting device includes a housing, a light emitter disposed in the housing, and a waveguide at least partially disposed in an opening of the housing. The waveguide includes a light input surface defining coupling features, wherein the light emitter is disposed adjacent the light input surface and emits light into the coupling features. The waveguide further includes a light transmission portion disposed between the light input surface and a light extraction portion, wherein light from the light emitter received at the light input surface propagates through the light transmission portion toward the light extraction portion. The waveguide further includes the light extraction portion, which comprises at least one light redirection feature and at least one light extraction feature that cooperate to generate a controlled light pattern exiting the lighting device.

Abstract: A lighting fixture with reduced glare is provided. Lighting fixtures described herein use a lens assembly to redirect light away from a housing in order to reduce a unified glaring ratio (UGR) (e.g., when viewed crosswise or endwise). The lens assembly may further provide diffusive properties which result in a more pleasing and soft light over traditional lighting fixtures. In aspects described herein, the UGR of troffer-style lighting fixtures can be improved (e.g., reduced) through lens assemblies having one or more light redirection features configured to particularly redirect light emitted at high v-angles (e.g., light emitted sideways relative to the housing at v-angles greater than 70 degrees). For example, the lens assembly may include an inner prismatic surface of a lens, an inner lens, a louver assembly (e.g., over or under a lens), or a reflector to achieve this light redirection.

Abstract: A lighting fixture with reduced glare is provided. Lighting fixtures described herein use a lens assembly to redirect light away from a housing in order to reduce a unified glaring ratio (UGR) (e.g., when viewed crosswise or endwise). The lens assembly may further provide diffusive properties which result in a more pleasing and soft light over traditional lighting fixtures. In aspects described herein, the UGR of troffer-style lighting fixtures can be improved (e.g., reduced) through lens assemblies having one or more light redirection features configured to particularly redirect light emitted at high v-angles (e.g., light emitted sideways relative to the housing at v-angles greater than 70 degrees). For example, the lens assembly may include an inner prismatic surface of a lens, an inner lens, a louver assembly (e.g., over or under a lens), or a reflector to achieve this light redirection.

Abstract: A micro LED chip transfer method includes: determining the transfer object size for a transfer, by using a block-by-block LED chip map in which the use state information of an LED chip is stored for each block of the wafer; determining a mask size that can minimize a scrap block of the wafer that is not used for transfer, by using the transfer object size; determining a starting point position of the wafer transfer object region for transfer; and positioning a mask having the mask size at the starting point position of the wafer transfer object region and irradiating a laser, such that the LED chip formed in the wafer transfer object region is transferred.

Abstract: Embodiments of the present disclosure generally relate to light fixtures and luminaires configured to emit light. According to one aspect, an optical waveguide includes a first waveguide portion and a second waveguide portion adjacent to and separate from the first waveguide portion. The waveguide portions include light coupling portions that are at least partially aligned and adapted to receive light developed by a light source. The first waveguide portion further has a first major surface with light direction features and a second major surface opposite the first major surface. The second waveguide portion further has a third major surface proximate the second major surface with an air gap disposed therebetween and a fourth major surface opposite the third major surface wherein the fourth major surface includes a cavity extending therein.

Abstract: Substrate processing apparatuses and methods of manufacturing a semiconductor device using the same may be provided. A substrate processing apparatus includes a heater in a support plate and comprising a first unit configured to heat a first portion of a substrate and a second unit configured to heat a second portion of a substrate, and processing circuitry configured to heat the heater in a transient section such that the first unit heats the first portion of the substrate to a first heating temperature, and the second unit heats the second portion of the substrate to a second heating temperature different from the first heating temperature, the transient section being a section before a temperature of the substrate reaches a steady state, a steady section being a section after the temperature of the substrate reaches the steady state.

Abstract: Lighting devices having optical waveguides for controlled light distribution are provided. A lighting device includes a housing, a light emitter disposed in the housing, and a waveguide at least partially disposed in an opening of the housing. The waveguide includes a light input surface defining coupling features, wherein the light emitter is disposed adjacent the light input surface and emits light into the coupling features. The waveguide further includes a light transmission portion disposed between the light input surface and a light extraction portion, wherein light from the light emitter received at the light input surface propagates through the light transmission portion toward the light extraction portion. The waveguide further includes the light extraction portion, which comprises at least one light redirection feature and at least one light extraction feature that cooperate to generate a controlled light pattern exiting the lighting device.