Patents by Inventor Hong-Miao Chen

Hong-Miao Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contaminant particle removal by optical tweezers
    Patent number: 6943062
    Abstract: The invention describes how contaminant particles may be removed from a surface without in any way damaging that surface. First, the positional co-ordinates of all particles on the surface are recorded. Optionally, only particles that can be expected to cause current or future damage to the surface are included. Then, using optical tweezers, each particle is individually removed and then disposed of. Six different ways to remove and dispose of particles are described.
    Type: Grant
    Filed: October 20, 2003
    Date of Patent: September 13, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hong-Miao Chen, Yu-Chang Jong, Huan-Chi Tseng
  • Contaminant particle removal by optical tweezers
    Publication number: 20050081824
    Abstract: The invention describes how contaminant particles may be removed from a surface without in any way damaging that surface. First, the positional co-ordinates of all particles on the surface are recorded. Optionally, only particles that can be expected to cause current or future damage to the surface are included. Then, using optical tweezers, each particle is individually removed and then disposed of. Six different ways to remove and dispose of particles are described.
    Type: Application
    Filed: October 20, 2003
    Publication date: April 21, 2005
    Inventors: Hong-Miao Chen, Yu-Chang Jong, Huan-Chi Tseng