Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: A perpendicular bottom-free-layer STT-MRAM cell includes a bottom-free-layer magnetic tunnel junction (BMTJ). The BMTJ includes a composite metal oxide seed layer, and a free layer comprising boron (B) on the composite metal oxide seed layer. The composite metal oxide seed layer includes a first metal layer; a metal oxide layer on the first metal layer; and a second metal layer on the metal oxide layer. The second metal layer has been oxygen treated.

Abstract: A perpendicular bottom-free-layer STT-MRAM cell includes a bottom-free-layer magnetic tunnel junction (BMTJ). The BMTJ includes a composite metal oxide seed layer, and a free layer comprising boron (B) on the composite metal oxide seed layer. The composite metal oxide seed layer includes a first metal layer; a metal oxide layer on the first metal layer; and a second metal layer on the metal oxide layer. The second metal layer has been oxygen treated.

Abstract: A magnetic apparatus, a memory using the magnetic apparatus and method for providing the magnetic apparatus are described. The magnetic apparatus includes a magnetic junction and a hybrid capping layer adjacent to the magnetic junction. The hybrid capping layer includes an insulating layer, a discontinuous oxide layer, and a noble metal layer. The discontinuous oxide layer is between the insulating layer and the noble metal layer. The insulating layer is between the magnetic junction and the noble metal layer. In one aspect, the magnetic junction includes a reference layer, a nonmagnetic spacer layer that may be a tunneling barrier layer and a free layer.

Abstract: A magnetic apparatus, a memory using the magnetic apparatus and method for providing the magnetic apparatus are described. The magnetic apparatus includes a magnetic junction and a hybrid capping layer adjacent to the magnetic junction. The hybrid capping layer includes an insulating layer, a discontinuous oxide layer, and a noble metal layer. The discontinuous oxide layer is between the insulating layer and the noble metal layer. The insulating layer is between the magnetic junction and the noble metal layer. In one aspect, the magnetic junction includes a reference layer, a nonmagnetic spacer layer that may be a tunneling barrier layer and a free layer.

Abstract: A magnetic memory including a plurality of magnetic junctions and at least one spin-orbit interaction (SO) active layer is described. Each of the magnetic junctions includes a pinned layer, a free layer and a nonmagnetic spacer layer between reference and free layers. The free layer has at least one of a tilted easy axis and a high damping constant. The tilted easy axis is at a nonzero acute angle from a direction perpendicular-to-plane. The high damping constant is at least 0.02. The at least one SO active layer is adjacent to the free layer and carries a current in-plane. The at least one SO active layer exerts a SO torque on the free layer due to the current. The free layer is switchable using the SO torque.

Abstract: A magnetic memory including a plurality of magnetic junctions and at least one spin-orbit interaction (SO) active layer is described. Each of the magnetic junctions includes a pinned layer, a free layer and a nonmagnetic spacer layer between reference and free layers. The free layer has at least one of a tilted easy axis and a high damping constant. The tilted easy axis is at a nonzero acute angle from a direction perpendicular-to-plane. The high damping constant is at least 0.02. The at least one SO active layer is adjacent to the free layer and carries a current in-plane. The at least one SO active layer exerts a SO torque on the free layer due to the current. The free layer is switchable using the SO torque.

Abstract: A perpendicular magnetic recording disk having a single domain exchange-coupled laminated soft magnetic underlayer (SUL) is disclosed. The SUL is a combination synthetic anti-parallel coupled SUL structure, which has the product (Mst) of saturation magnetization and film thickness of the middle ferromagnetic layer less than the sum of the Mst of the bottom and top ferromagnetic layers. Subjected to a post radial field reset process, this SUL provides single domain state. Moreover, both robustness of stray fields and low permeability are obtained while keeping excellent corrosion resistance and cost effective manufacturability.

Abstract: A perpendicular magnetic recording (PMR) media including a non-magnetic or superparamagnetic grain isolation magnetic anisotropy layer (GIMAL) to provide a template for initially well-isolated small grain microstructure as well as improvement of Ku in core grains of a magnetic recording layer. The GIMAL composition may be adjusted to have lattice parameters similar to a bottom magnetic recording layer and to provide a buffer for reducing interface strains caused by lattice mismatch between the bottom magnetic recording layer and an underlying layer.

Abstract: Method of incorporating atomic oxygen into a magnetic recording layer by sputtering a target containing an oxide of cobalt. The oxide of cobalt may be sputtered to provide a readily dissociable source of oxygen which may increase the concentration of free cobalt atoms (Co) in the magnetic recording layer and also increase oxide content in the magnetic recording layer.

Abstract: A radial magnetic field reset apparatus including a housing having a cavity with a soft magnet rod disposed at its center and a permanent magnet disposed around the cavity. The cavity and thickness of the soft magnet rod are sized to permit a cassette of disks to be inserted into the housing with the soft magnet rod disposed within the inner diameter holes of the disks contained in the cassette. The soft magnet rod at the center of the housing attracts the magnetic field generated by the permanent magnet, which results in a substantially uniform, radial magnetic field inside the housing.

Abstract: A perpendicular magnetic recording medium comprising a substrate, a soft underlayer, a seed layer, a non-magnetic FCC NiW alloy underlayer, a non-magnetic HCP underlayer, and a magnetic layer. We have discovered that the combination of a seed layer comprising Ta and a NiW alloy underlayer uniquely improves media recording performance and thermal stability by achieving excellent coercivity of the thin bottom magnetic recording layer and narrow C axis orientation distribution.

Abstract: A radial magnetic field reset apparatus including a housing having a cavity with a soft magnet rod disposed at its center and a permanent magnet disposed around the cavity. The cavity and thickness of the soft magnet rod are sized to permit a cassette of disks to be inserted into the housing with the soft magnet rod disposed within the inner diameter holes of the disks contained in the cassette. The soft magnet rod at the center of the housing attracts the magnetic field generated by the permanent magnet, which results in a substantially uniform, radial magnetic field inside the housing.

Abstract: A perpendicular magnetic recording disk with a magnetically resetable single domain soft magnetic underlayer. The perpendicular magnetic recording disk may include a hard magnetic pinning layer disposed above a substrate, a spacer layer disposed above the hard magnetic pinning layer, a soft ferromagnetic film disposed above the spacer layer, and a magnetic recording layer disposed above the soft ferromagnetic film.

Abstract: Substantially spherical magneto-plumbite ferrite (barium or strontium ferrite) particles are formed from well-dispersed ultra-fine substantially spherical iron-based oxide and/or hydroxide particles as precursor particles. The precursor particles are mixed with a colloidal barium or strontium carbonate (BaCO3 or SrCO3), and with small amounts of a byproduct, such as sodium or potassium chloride (NaCl or KCl) or hydroxide (NaOH or KOH) or nitrate (NaNO3 or KNO3), functioning as a flux to lower the calcination temperature. The particles are filtered out of the mixture, dried, and calcined for a time sufficiently long and/or at a temperature sufficiently high to form magneto-plumbite ferrite from the precursor particles, and for a time sufficiently short and/or a temperature sufficiently low to maintain the general spherical shape of the precursor particles.

Abstract: Substantially spherical magneto-plumbite ferrite (barium or strontium ferrite) particles are formed from well-dispersed ultra-fine substantially spherical iron-based oxide and/or hydroxide particles as precursor particles. The precursor particles are mixed with a colloidal barium or strontium carbonate (BaCO3 or SrCO3), and with small amounts of a byproduct, such as sodium or potassium chloride (NaCl or KCl) or hydroxide (NaOH or KOH) or nitrate (NaNO3 or KNO3), functioning as a flux to lower the calcination temperature. The particles are filtered out of the mixture, dried, and calcined for a time sufficiently long and/or at a temperature sufficiently high to form magneto-plumbite ferrite from the precursor particles, and for a time sufficiently short and/or a temperature sufficiently low to maintain the general spherical shape of the precursor particles.

Abstract: Substantially spherical magneto-plumbite ferrite (barium or strontium ferrite) particles are formed from well-dispersed ultra-fine substantially spherical iron-based oxide and/or hydroxide particles as precursor particles. The precursor particles are mixed with a colloidal barium or strontium carbonate (BaCO3 or SrCO3), and with small amounts of a byproduct, such as sodium or potassium chloride (NaCl or KCl) or hydroxide (NaOH or KOH) or nitrate (NaNO3 or KNO3), functioning as a flux to lower the calcination temperature. The particles are filtered out of the mixture, dried, and calcined for a time sufficiently long and/or at a temperature sufficiently high to form magneto-plumbite ferrite from the precursor particles, and for a time sufficiently short and/or a temperature sufficiently low to maintain the general spherical shape of the precursor particles.

Abstract: Substantially spherical magneto-plumbite ferrite (barium or strontium ferrite) particles are formed from well-dispersed ultra-fine substantially spherical iron-based oxide and/or hydroxide particles as precursor particles. The precursor particles are mixed with a colloidal barium or strontium carbonate (BaCO3 or SrCO3), and with small amounts of a byproduct, such as sodium or potassium chloride (NaCl or KCl) or hydroxide (NaOH or KOH) or nitrate (NaNO3 or KNO3), functioning as a flux to lower the calcination temperature. The particles are filtered out of the mixture, dried, and calcined for a time sufficiently long and/or at a temperature sufficiently high to form magneto-plumbite ferrite from the precursor particles, and for a time sufficiently short and/or a temperature sufficiently low to maintain the general spherical shape of the precursor particles.