Abstract: Disclosed is a method of producing lithium sulfide (Li2S) without using hydrogen sulfide (H2S) gas. Particularly, the method of producing lithium sulfide (Li2S) includes preparing a starting material including a metal oxide by subjecting a mixed powder including an inorganic compound containing lithium and oxygen, a metal reducing agent, and sulfur (S) to synthesis reaction using mechanical force, preparing a mixed solution by mixing the starting material and a solvent, and obtaining a lithium sulfide (Li2S) powder by removing the metal oxide from the mixed solution and then performing drying.

Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: Disclosed are a solid electrolyte and method of manufacturing the same. The solid electrolyte may include a core including a first electrolyte represented by Chemical Formula 1, and a shell including a second electrolyte represented by Chemical Formula 2, and disposed on a surface of the core. LiaPSbX1c??[Chemical Formula 1] Here, a satisfies an equation 4?a?7, b satisfies an equation 3?b?7, c satisfies an equation 0?c?2, and X1 includes Br or I. LidPSeX2f??[Chemical Formula 2] Here, d satisfies an equation 4?d?7, e satisfies an equation 3?e?7, f satisfies an equation 0?f?2, X2 includes Cl or Br, and an ionic radius of X1 is greater than an ionic radius of X2.

Abstract: An apparatus and a method for driving a voice coil motor (VCM) may include an instruction signal generating unit generating an instruction signal according to a digital signal generated from an input signal, and a driving unit driving the VCM by selecting a path for a driving current applied to the VCM according to the digital signal and controlling a duty of the driving current according to the instruction signal.

Abstract: There are provided an apparatus and a method for driving a voice coil motor (VCM), the apparatus including an instruction signal generating unit generating an instruction signal according to a digital signal generated from an input signal, and a driving unit driving the voice coil motor (VCM) by selecting a path for a driving current applied to the voice coil motor (VCM) according to the digital signal and controlling a duty of the driving current according to the instruction signal.