Abstract: A pad structure and passivation scheme which reduces or eliminates IMC cracking in post wire bonded dies during Cu/Low-K BEOL processing. A thick 120 nm barrier layer can be provided between a 1.2 ?m aluminum layer and copper. Another possibility is to effectively split up the barrier layer, where the aluminum layer is disposed between the two barrier layers. The barrier layers may be 60 nm while the aluminum layer which is disposed between the barrier layers may be 0.6 ?m. Another possibility is provide an extra 0.6 ?m aluminum layer on the top barrier layer. Still another possibility is to provide an extra barrier layer on the top-most aluminum layer, such that a top barrier layer of 60 nm is provided on a 0.6 ?m aluminum layer, followed by another barrier layer of 60 nm, another aluminum layer of 0.6 ?m and another barrier layer of 60 nm.

Abstract: A bond pad structure which includes an aluminum bond pad which include one or more dopants that effectively control the growth of IMC to a nominal level in spite of high tensile stresses in the wafer. For example, aluminum can be doped with 1–2 atomic % of Mg. Alternatively, Pd or Si can be used, or elements like Cu or Si can be used as the dopant in order to reduce the overall tensile stresses in the wafer. This can control the abnormal growth of IMC, thus arresting the IMC crack formation. A combination of dopants can be used to both control the tensile stresses and also slightly alter the gold-Aluminum interface thus enabling a uniform and thin IMC formation. This tends to reduce or eliminate any voiding or cracking which would otherwise occur at the wire bond transfer.

Abstract: The present invention relates to methods for forming textured surfaces in a polymeric surfaces. Moreover, the present invention relates to methods for forming textured surfaces in a polymeric surfaces and faithfully replicating the textured surfaces in the surfaces of sol-gel films on the surfaces of very hard materials, e.g., of glass, ceramic, or glass-ceramic substrates.

Abstract: A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.

Abstract: A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprising the sequential steps of providing a substrate/workpiece comprising a topographical pattern formed in a portion of a surface of the substrate/workpiece. The pattern defines a periphery. An alignment mark is formed in another portion of the surface of surrounding the periphery. An opaque protective film is formed overlying the entirety of the surface. A peripheral portion of the protective film is removed to expose the alignment mark. Selected portions of the substrate/workpiece are removed while the alignment mark is utilized for accurate alignment during the removal process. Remaining portions of the protective film are removed prior to use.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate for a magnetic recording medium, the substrate including at least one major surface; forming a layer of a sol-gel on the at least one major surface; forming a pattern, e.g., a servo pattern in an exposed surface of the layer of said sol-gel; and converting the layer of sol-gel to a glass or glass-like layer while preserving the pattern in an exposed surface of said glass or glass-like layer. Embodiments of the invention include magnetic media including a patterned glass or glass-like layer formed from a layer of a hydrophilic sol-gel with the pattern embossed therein by means of a stamper having a hydrophilic surface including a negative image of the pattern.

Abstract: A method of manufacturing a perpendicular magnetic recording medium, comprises steps of: (a) providing a substrate of an amorphous thermoplastic polymer material having softening and glass transition temperatures as low as about 95° C.; and (b) forming at least one stack of thin film layers atop at least one surface of the substrate, the at least one layer stack including at least one granular magnetic recording layer of perpendicular type, wherein oxides and/or nitrides provide physical de-coupling of adjacent magnetic grains; and wherein each of the thin film layers is formed by depositing at a substrate temperature not greater than about 70° C., and the coercivity (Hc) of the resultant perpendicular magnetic recording medium is at least about 4,000 Oe.

Abstract: A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of: (a) providing a non-magnetic substrate including at least one major surface; (b) providing a stamper having a surface with a plurality of recesses forming a negative image of a servo pattern; (c) forming a layer of a partially dried sol-gel material having a first surface in conformal contact with the recess-patterned surface of the stamper and an exposed second surface opposite the first surface; (d) urging the major surface of the substrate into contact with the exposed second surface of the sol-gel layer; (e) removing the stamper from contact with the layer of sol-gel material to expose the recess-patterned surface thereof; (f) converting the partially dried sol-gel layer to a glass-like layer while preserving the recess pattern in the surface thereof; and (f) forming on the recess-patterned surface a laminate of layers constituting a servo-patterned magnetic recording medium.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate having at least one surface; forming a layer of a sol-gel on the surface, partially drying the sol-gel layer at room temperature to remove a portion of the solvent therein to form a partially dried sol-gel layer of hardness less than that of the substrate; mechanically texturing the surface of the partially dried sol-gel layer; and depositing a layer stack including at least one magnetic layer thereover. Embodiments of the invention include embossing a servo pattern in the as-deposited sol-gel layer prior to partial drying and mechanically texturing, followed by sintering at an elevated temperature to form a substantially fully dried layer having a density and hardness similar to that of glass, and formation of a thin film magnetic media layer stack thereon.

Abstract: An electrode for use in a ferroelectric device includes a bottom electrode; a ferroelectric layer; and a top electrode formed on the ferroelectric layer and formed of a combination of metals, including a first metal take from the group of metals consisting of platinum and iridium, and a second metal taken from the group of metals consisting of aluminum and titanium; wherein the top electrode acts as a passivation layer and wherein the top electrode remains conductive following high temperature annealing in a hydrogen atmosphere.

Abstract: Low resistance interconnect lines and methods for fabricating them are described herein. IC fabrication processes are used to create interconnect lines of Al and Cu layers. The Cu layer is thinner than in the known art, but in combination with the Al layer, the aggregate Cu/Al resistance is lowered to a point where it is comparable to that of a very thick Cu layer, without the additional cost and yield problems caused by using a thicker Cu deposition. Fuses for memory repair can also be fabricated using the methods taught by the present invention with only small variations in the process.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate having at least one surface; forming a layer of a sol-gel on the surface, partially drying the sol-gel layer at room temperature to remove a portion of the solvent therein to form a partially dried sol-gel layer of hardness less than that of the substrate; mechanically texturing the surface of the partially dried sol-gel layer; and depositing a layer stack including at least one magnetic layer thereover. Embodiments of the invention include embossing a servo pattern in the as-deposited sol-gel layer prior to partial drying and mechanically texturing, followed by sintering at an elevated temperature to form a substantially fully dried layer having a density and hardness similar to that of glass, and formation of a thin film magnetic media layer stack thereon.

Abstract: A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of:

Abstract: A substract for use in a data storage system is disclosed. The substrate includes at least one core layer comprising at least one plastic or plastic composite material exhibiting a modulus of about 350 kpsi or greater, and damping agents, reinforcing agents, or combinations thereof. The damping agents, reinforcing agents, or combinations thereof, are substantially uniformly distributed within the plastic or plastic composite material. Optionally, one or more skin layers are disposed adjacent the at least one core layer.

Abstract: A passivation layer comprises a titanium-doped aluminum oxide layer for passivation of ferroelectric materials such as Pt/SBt/Ir—Ta—O devices. The titanium-doped aluminum oxide layer for passivation of ferroelectric materials has reduced stress and improved passivation properties, and is easy to deposit and be oxidized. The passivation layer in the MFM Structure resists breakdown and peeling during annealing of the device in a forming gas ambient.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate having at least one surface; forming a layer of a sol-gel on the surface, partially drying the sol-gel layer at room temperature to remove a portion of the solvent therein to form a partially dried sol-gel layer of hardness less than that of the substrate; mechanically texturing the surface of the partially dried sol-gel layer; and depositing a layer stack including at least one magnetic layer thereover. Embodiments of the invention include embossing a servo pattern in the as-deposited sol-gel layer prior to partial drying and mechanically texturing, followed by sintering at an elevated temperature to form a substantially fully dried layer having a density and hardness similar to that of glass, and formation of a thin film magnetic media layer stack thereon.

Abstract: A method of manufacturing a magnetic recording medium including a servo pattern, comprising steps of: (a) providing a non-magnetic substrate including at least one major surface; (b) providing a stamper having a surface with a plurality of recesses forming a negative image of a servo pattern; (c) forming a layer of a partially dried sol-gel material having a first surface in conformal contact with the recess-patterned surface of the stamper and an exposed second surface opposite the first surface; (d) urging the major surface of the substrate into contact with the exposed second surface of the sol-gel layer; (e) removing the stamper from contact with the layer of sol-gel material to expose the recess-patterned surface thereof; (f) converting the partially dried sol-gel layer to a glass-like layer while preserving the recess pattern in the surface thereof; and (f) forming on the recess-patterned surface a laminate of layers constituting a servo-patterned magnetic recording medium.

Abstract: A MFMOS one transistor memory structure for ferroelectric non-volatile memory devices includes a high dielectric constant material such as ZrO2, HfO2, Y2O3, or La2O3, or the like, or mixtures thereof, to reduce the operation voltage and to increase the memory window and reliability of the device.

Abstract: A passivation layer comprises a titanium-doped aluminum oxide layer for passivation of ferroelectric materials such as Pt/SBt/Ir—Ta—O devices. The titanium-doped aluminum oxide layer for passivation of ferroelectric materials has reduced stress and improved passivation properties, and is easy to deposit and be oxidized. The passivation layer in the MFM Structure resists breakdown and peeling during annealing of the device in a forming gas ambient.

Abstract: A method of manufacturing a magnetic recording medium comprises steps of providing a non-magnetic substrate for a magnetic recording medium, the substrate including at least one major surface; forming a layer of a sol-gel on the at least one major surface; forming a pattern, e.g., a servo pattern in an exposed surface of the layer of said sol-gel; and converting the layer of sol-gel to a glass or glass-like layer while preserving the pattern in an exposed surface of said glass or glass-like layer. Embodiments of the invention include magnetic media including a patterned glass or glass-like layer formed from a layer of a hydrophilic sol-gel with the pattern embossed therein by means of a stamper having a hydrophilic surface including a negative image of the pattern.