Patents by Inventor Hong Zhi Lee

Hong Zhi Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for monitoring an ion implanter
    Patent number: 7192789
    Abstract: A method for monitoring an ion implanter is disclosed. In one embodiment, the method comprises providing a wafer, forming a barrier layer on the surface of the wafer wherein the barrier layer has a substantial blocking effect on ion implantation, performing an ion implantation process to the wafer, performing a thermal treatment process, removing the barrier layer, and measuring a physical property of the wafer. The measured physical property of the wafer can be used to ascertain the status of the ion implanter. For instance, the measured physical property can be used to determine whether the ion implanter has problems when the energy or concentration of the implanted ions is changed.
    Type: Grant
    Filed: September 15, 2004
    Date of Patent: March 20, 2007
    Assignee: Mosel Vitelic, Inc.
    Inventors: Chun Te Lin, Chih Sheng Yang, Hong Zhi Lee, Ta-Te Chen
  • Method for monitoring an ion implanter
    Publication number: 20050142672
    Abstract: A method for monitoring an ion implanter is disclosed. In one embodiment, the method comprises providing a wafer, forming a barrier layer on the surface of the wafer wherein the barrier layer has a substantial blocking effect on ion implantation, performing an ion implantation process to the wafer, performing a thermal treatment process, removing the barrier layer, and measuring a physical property of the wafer. The measured physical property of the wafer can be used to ascertain the status of the ion implanter. For instance, the measured physical property can be used to determine whether the ion implanter has problems when the energy or concentration of the implanted ions is changed.
    Type: Application
    Filed: September 15, 2004
    Publication date: June 30, 2005
    Applicant: Mosel Vitelic, Inc.
    Inventors: Chun Te Lin, Chih Sheng Yang, Hong Zhi Lee, Ta-Te Chen