Abstract: Disclosed is an alternating electric field based plane 2D time-grating displacement sensor which includes two parts: the base of fixed ruler and the base of moving ruler, and the two parts are installed in parallel. The base of fixed ruler is arranged with square excitation electrodes that are respectively staggered coded along axis X and Y, and the base of moving ruler is arranged with induction electrodes arranged adjacently along X-axis and Y-axis, and the four induction groups respectively output four traveling wave signals through electric field coupling, and summation of adjacent output signals with an adder can simultaneously decouple two traveling wave signals with opposite phases and only containing X-axis displacement and two traveling wave signals with opposite phases and only containing Y-axis displacement; two traveling wave signals in either direction are differenced by a subtractor to eliminate common mode interference.

Abstract: Disclosed is an alternating electric field based plane 2D time-grating displacement sensor which includes two parts: the base of fixed ruler and the base of moving ruler, and the two parts are installed in parallel. The base of fixed ruler is arranged with square excitation electrodes that are respectively staggered coded along axis X and Y, and the base of moving ruler is arranged with induction electrodes arranged adjacently along X-axis and Y-axis, and the four induction groups respectively output four traveling wave signals through electric field coupling, and summation of adjacent output signals with an adder can simultaneously decouple two traveling wave signals with opposite phases and only containing X-axis displacement and two traveling wave signals with opposite phases and only containing Y-axis displacement; two traveling wave signals in either direction are differenced by a subtractor to eliminate common mode interference.