Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: Provided is a dishwasher. The dishwasher includes a sump case forming a space to store wash liquid, and a drain pump provided at one side of the sump case. The drain pump includes a drain impeller that induces a flow of wash liquid, and a plurality of mutually separable cases covering the drain impeller.

Abstract: There is provided a dishwasher and a method of controlling the dishwasher. The dishwasher includes a temperature detecting unit for detecting a temperature of washing water supplied, a rinse dispensing unit for dispensing rinse when washing water is heated up to a rinse dispensing temperature, and a control unit for varying the rinse dispensing temperature in accordance with the temperature of the washing water supplied.

Abstract: There is provided a dishwasher and a method of controlling the dishwasher. The dishwasher includes a temperature detecting unit for detecting a temperature of washing water supplied, a rinse dispensing unit for dispensing rinse when washing water is healed up to a rinse dispensing temperature, and a control unit for varying the rinse dispensing temperature in accordance with the temperature of the washing water supplied.

Abstract: Provided is a dishwasher. The dishwasher includes a sump case forming a space to store wash liquid, and a drain pump provided at one side of the sump case. The drain pump includes a drain impeller that induces a flow of wash liquid, and a plurality of mutually separable cases covering the drain impeller.

Abstract: There is provided a dishwasher and a method of controlling the dishwasher. The dishwasher includes a temperature detecting unit for detecting a temperature of washing water supplied, a rinse dispensing unit for dispensing rinse when washing water is heated up to a rinse dispensing temperature, and a control unit for varying the rinse dispensing temperature in accordance with the temperature of the washing water supplied.