Patents by Inventor Honglian Shen

Honglian Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fin removal method
    Patent number: 8617996
    Abstract: Methods for removal of fins from a semiconductor structure are provided. A fin liner is applied to the fins. The fin liner is then removed from the fins that are to be removed. The fin liner is of a material that is selective compared to the semiconductor fins. Hence, the fins can be removed without significant damage to the fin liner. The subsets of fins that are to be removed are then removed, while the fin liner protects the adjacent fins that are to be kept.
    Type: Grant
    Filed: January 10, 2013
    Date of Patent: December 31, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Min-hwa Chi, Honglian Shen, Changyong Xiao