Patents by Inventor Hongmyoung KIM

Hongmyoung KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck assemblies capable of bidirectional flow of coolant and semiconductor fabricating apparatus having the same
    Patent number: 9912258
    Abstract: An electrostatic chuck assembly, including an electrostatic chuck on which a substrate is loaded; a channel that provides a flow passage for coolant in the electrostatic chuck, the channel having a first opening at a first end corresponding to a center of the substrate and a second opening at a second end corresponding to an edge of the substrate; and a valve box to control a flow direction of the coolant in the channel, the valve box including a first supply valve to control an introduction of the coolant into the first opening; a first return valve to control a drainage of the coolant from the second opening; a second supply valve to control an introduction of the coolant into the second opening; and a second return valve to control a drainage of the coolant from the first opening.
    Type: Grant
    Filed: September 2, 2015
    Date of Patent: March 6, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Haejoong Park, Hongmyoung Kim, Kye Hyun Baek, Sangkyu Park
  • ELECTROSTATIC CHUCK ASSEMBLIES CAPABLE OF BIDIRECTIONAL FLOW OF COOLANT AND SEMICONDUCTOR FABRICATING APPARATUS HAVING THE SAME
    Publication number: 20160071755
    Abstract: An electrostatic chuck assembly, including an electrostatic chuck on which a substrate is loaded; a channel that provides a flow passage for coolant in the electrostatic chuck, the channel having a first opening at a first end corresponding to a center of the substrate and a second opening at a second end corresponding to an edge of the substrate; and a valve box to control a flow direction of the coolant in the channel, the valve box including a first supply valve to control an introduction of the coolant into the first opening; a first return valve to control a drainage of the coolant from the second opening; a second supply valve to control an introduction of the coolant into the second opening; and a second return valve to control a drainage of the coolant from the first opening.
    Type: Application
    Filed: September 2, 2015
    Publication date: March 10, 2016
    Inventors: Haejoong PARK, Hongmyoung KIM, Kye Hyun BAEK, Sangkyu PARK