Patents by Inventor Hongru Ren
Hongru Ren has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12356675Abstract: A planar transistor device is disclosed including a gate structure positioned above a semiconductor substrate, the semiconductor substrate comprising a substantially planar upper surface, a channel region, a source region, a drain region, and at least one layer of a two-dimensional (2D) material that is positioned in at least one of the source region, the drain region or the channel region, wherein the layer of 2D material has a substantially planar upper surface, a substantially planar bottom surface and a substantially uniform vertical thickness across an entire length of the layer of 2D material in the gate length direction and across an entire width of the layer of 2D material in the gate width direction, wherein the substantially planar upper surface and the substantially planar bottom surface of the layer of 2D material are positioned approximately parallel to a substantially planar surface of the semiconductor substrate.Type: GrantFiled: January 3, 2023Date of Patent: July 8, 2025Assignee: GlobalFoundries U.S. Inc.Inventors: David Pritchard, Heng Yang, Hongru Ren, Neha Nayyar, Manjunatha Prabhu, Elizabeth Strehlow, Salvatore Cimino
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Publication number: 20240194535Abstract: Structures that include field-effect transistors and methods of forming such structures. The structure comprises a substrate, a dielectric layer on the substrate, a first field-effect transistor including a first semiconductor layer over the dielectric layer and a first gate electrode, and a second field-effect transistor including a second semiconductor layer over the dielectric layer and a second gate electrode adjacent to the first gate electrode. The second semiconductor layer is connected to the first semiconductor layer, and the first and second semiconductor layers are positioned between the first gate electrode and the second gate electrode.Type: ApplicationFiled: December 13, 2022Publication date: June 13, 2024Inventors: Venkatesh P. Gopinath, Navneet Jain, Hongru Ren, Alexander Derrickson, Jianwei Peng, Bipul C. Paul
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Publication number: 20240162090Abstract: Structures with features formed by self-aligned double patterning and methods of self-aligned multiple patterning. The structure comprises a first field-effect transistor including a first gate and a first protrusion projecting laterally from the first gate, and a second field-effect transistor including a second gate and a second protrusion projecting laterally from the second gate. The second gate and the second protrusion are spaced in a lateral direction from the first gate and the first protrusion. The structure further comprises a gate contact connecting the first protrusion of the first gate to the second protrusion the second gate.Type: ApplicationFiled: November 11, 2022Publication date: May 16, 2024Inventors: James Mazza, David Pritchard, Romain Feuillette, Elizabeth Strehlow, Hongru Ren
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Publication number: 20240147736Abstract: Structures that include resistive memory elements and methods of forming a structure that includes resistive memory elements. The structure comprises a bipolar junction transistor including a base, a first terminal having a first raised semiconductor layer over the base, and a second terminal having a second raised semiconductor layer over the base. The first raised semiconductor layer is spaced in a lateral direction from the second raised semiconductor layer. The structure further comprises a resistive memory element including a first electrode, a second electrode, and a switching layer between the first electrode and the second electrode. The first electrode of the resistive memory element is coupled to the first terminal of the bipolar junction transistor.Type: ApplicationFiled: October 26, 2022Publication date: May 2, 2024Inventors: Venkatesh P. Gopinath, Alexander Derrickson, Hongru Ren
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Publication number: 20240063225Abstract: A substrate is provided. The substrate includes a base, a semiconductor layer over the base, and an insulator layer between the base and the semiconductor layer. The semiconductor layer has a first semiconductor layer portion having a first thickness, a second semiconductor layer portion having a second thickness, and a third semiconductor layer portion having a third thickness, and the first thickness, the second thickness, and the third thickness are different from each other.Type: ApplicationFiled: August 17, 2022Publication date: February 22, 2024Inventors: DAVID PRITCHARD, HONGRU REN, SHAFIULLAH SYED, HONG YU, MAN GU, JIANWEI PENG
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Publication number: 20230147981Abstract: A planar transistor device is disclosed including a gate structure positioned above a semiconductor substrate, the semiconductor substrate comprising a substantially planar upper surface, a channel region, a source region, a drain region, and at least one layer of a two-dimensional (2D) material that is positioned in at least one of the source region, the drain region or the channel region, wherein the layer of 2D material has a substantially planar upper surface, a substantially planar bottom surface and a substantially uniform vertical thickness across an entire length of the layer of 2D material in the gate length direction and across an entire width of the layer of 2D material in the gate width direction, wherein the substantially planar upper surface and the substantially planar bottom surface of the layer of 2D material are positioned approximately parallel to a substantially planar surface of the semiconductor substrate.Type: ApplicationFiled: January 3, 2023Publication date: May 11, 2023Inventors: David Pritchard, Heng Yang, Hongru Ren, Neha Nayyar, Manjunatha Prabhu, Elizabeth Strehlow, Salvatore Cimino
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Publication number: 20230131403Abstract: Embodiments of the disclosure provide an integrated circuit (IC) structure including a gate structure over a semiconductor layer. The gate structure includes a first portion having a first horizontal width, and a second portion laterally adjacent the first portion and having a second horizontal width less than the first horizontal width. A gate contact is on the first portion of the gate structure and is not on the second portion of the gate structure.Type: ApplicationFiled: October 25, 2021Publication date: April 27, 2023Inventors: David C. Pritchard, Hongru Ren, Zhixing Zhao
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Patent number: 11610843Abstract: An illustrative device disclosed herein includes a doped well region and a conductive well tap conductively coupled to the doped well region, the conductive well tap including first and second opposing sidewall surfaces. In this example the device also includes a first sidewall spacer that has a first vertical height positioned around the conductive well tap and a second sidewall spacer positioned adjacent the first sidewall spacer along the first and second opposing sidewall surfaces of the conductive well tap, wherein the second sidewall spacer has a second vertical height that is less than the first vertical height.Type: GrantFiled: March 8, 2021Date of Patent: March 21, 2023Assignee: GLOBALFOUNDRIES U.S. Inc.Inventors: Hongru Ren, David Pritchard, Ryan W. Sporer, Manjunatha Prabhu
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Patent number: 11581430Abstract: A planar transistor device is disclosed including a gate structure positioned above a semiconductor substrate, the semiconductor substrate comprising a substantially planar upper surface, a channel region, a source region, a drain region, and at least one layer of a two-dimensional (2D) material that is positioned in at least one of the source region, the drain region or the channel region, wherein the layer of 2D material has a substantially planar upper surface, a substantially planar bottom surface and a substantially uniform vertical thickness across an entire length of the layer of 2D material in the gate length direction and across an entire width of the layer of 2D material in the gate width direction, wherein the substantially planar upper surface and the substantially planar bottom surface of the layer of 2D material are positioned approximately parallel to a substantially planar surface of the semiconductor substrate.Type: GrantFiled: August 22, 2019Date of Patent: February 14, 2023Assignee: GLOBALFOUNDRIES U.S. Inc.Inventors: David Pritchard, Heng Yang, Hongru Ren, Neha Nayyar, Manjunatha Prabhu, Elizabeth Strehlow, Salvatore Cimino
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Publication number: 20220285274Abstract: An illustrative device disclosed herein includes a doped well region and a conductive well tap conductively coupled to the doped well region, the conductive well tap including first and second opposing sidewall surfaces. In this example the device also includes a first sidewall spacer that has a first vertical height positioned around the conductive well tap and a second sidewall spacer positioned adjacent the first sidewall spacer along the first and second opposing sidewall surfaces of the conductive well tap, wherein the second sidewall spacer has a second vertical height that is less than the first vertical height.Type: ApplicationFiled: March 8, 2021Publication date: September 8, 2022Inventors: Hongru Ren, David Pritchard, Ryan W. Sporer, Manjunatha Prabhu
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Patent number: 11239087Abstract: The present disclosure relates to semiconductor structures and, more particularly, to devices with slotted active regions and methods of manufacture. The method includes: forming a mandrel on top of a diffusion region comprising a diffusion material; forming a first material over the mandrel and the diffusion region; removing the mandrel to form multiple spacers each having a thickness; depositing a second material over the spacers and the diffusion material; and forming slots in the diffusion region by removing a portion of the second material over the diffusion region and the underlying diffusion material.Type: GrantFiled: October 24, 2019Date of Patent: February 1, 2022Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Heng Yang, David C. Pritchard, George J. Kluth, Anurag Mittal, Hongru Ren, Manjunatha G. Prabhu, Kai Sun, Neha Nayyar, Lixia Lei
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Patent number: 11177182Abstract: One illustrative vertical transistor device disclosed herein includes a channel region comprising at least one layer of a two-dimensional (2D) material, a bottom source/drain region, a top source/drain region and a gate structure positioned all around at least the at least one layer of a two-dimensional (2D) material.Type: GrantFiled: January 30, 2020Date of Patent: November 16, 2021Assignee: GlobalFoundries U.S. Inc.Inventors: Heng Yang, David Pritchard, Kai Sun, Hongru Ren, Neha Nayyar, Manjunatha Prabhu, Elizabeth Strehlow, Salvatore Cimino
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Patent number: 11094791Abstract: One illustrative device disclosed herein includes a bottom source/drain region and a top source/drain region positioned vertically above at least a portion of the bottom source/drain region, wherein each of the bottom source/drain region and the top source/drain region comprise at least one layer of a two-dimensional (2D) material. The device also includes a substantially vertically oriented semiconductor structure positioned vertically between the bottom source/drain region and the top source/drain region and a gate structure positioned all around an outer perimeter of the substantially vertically oriented semiconductor structure for at least a portion of the vertical height of the substantially vertically oriented semiconductor structure.Type: GrantFiled: January 30, 2020Date of Patent: August 17, 2021Assignee: GLOBALFOUNDRIES U.S. INC.Inventors: Heng Yang, David Pritchard, Kai Sun, Hongru Ren, Neha Nayyar, Manjunatha Prabhu, Elizabeth Strehlow, Salvatore Cimino
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Publication number: 20210242094Abstract: One illustrative vertical transistor device disclosed herein includes a channel region comprising at least one layer of a two-dimensional (2D) material, a bottom source/drain region, a top source/drain region and a gate structure positioned all around at least the at least one layer of a two-dimensional (2D) material.Type: ApplicationFiled: January 30, 2020Publication date: August 5, 2021Inventors: Heng Yang, David Pritchard, Kai Sun, Hongru Ren, Neha Nayyar, Manjunatha Prabhu, Elizabeth Strehlow, Salvatore Cimino
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Publication number: 20210242316Abstract: One illustrative device disclosed herein includes a bottom source/drain region and a top source/drain region positioned vertically above at least a portion of the bottom source/drain region, wherein each of the bottom source/drain region and the top source/drain region comprise at least one layer of a two-dimensional (2D) material. The device also includes a substantially vertically oriented semiconductor structure positioned vertically between the bottom source/drain region and the top source/drain region and a gate structure positioned all around an outer perimeter of the substantially vertically oriented semiconductor structure for at least a portion of the vertical height of the substantially vertically oriented semiconductor structure.Type: ApplicationFiled: January 30, 2020Publication date: August 5, 2021Inventors: Heng Yang, David Pritchard, Kai Sun, Hongru Ren, Neha Nayyar, Manjunatha Prabhu, Elizabeth Strehlow, Salvatore Cimino
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Publication number: 20210057558Abstract: A planar transistor device is disclosed including a gate structure positioned above a semiconductor substrate, the semiconductor substrate comprising a substantially planar upper surface, a channel region, a source region, a drain region, and at least one layer of a two-dimensional (2D) material that is positioned in at least one of the source region, the drain region or the channel region, wherein the layer of 2D material has a substantially planar upper surface, a substantially planar bottom surface and a substantially uniform vertical thickness across an entire length of the layer of 2D material in the gate length direction and across an entire width of the layer of 2D material in the gate width direction, wherein the substantially planar upper surface and the substantially planar bottom surface of the layer of 2D material are positioned approximately parallel to a substantially planar surface of the semiconductor substrate.Type: ApplicationFiled: August 22, 2019Publication date: February 25, 2021Inventors: David Pritchard, Heng Yang, Hongru Ren, Neha Nayyar, Manjunatha Prabhu, Elizabeth Strehlow, Salvatore Cimino
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Patent number: 10727108Abstract: The present disclosure relates to an isolation region between semiconductor devices and methods of fabrication. Embodiments include device having a silicon-on-insulator (SOI) substrate; a dummy gate between two metal gates formed over the SOI substrate, the dummy gate providing a physical diffusion break between the two metal gates; raised source/drain (S/D) regions formed on sides of the metal gates; and interlayer dielectric formed over the dummy gate, raised S/D regions and metal gates and in openings on sides of the dummy gate.Type: GrantFiled: October 23, 2018Date of Patent: July 28, 2020Assignee: GLOBALFOUNDRIES INC.Inventors: David Pritchard, Heng Yang, Hongru Ren
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Publication number: 20200127013Abstract: The present disclosure relates to an isolation region between semiconductor devices and methods of fabrication. Embodiments include device having a silicon-on-insulator (SOI) substrate; a dummy gate between two metal gates formed over the SOI substrate, the dummy gate providing a physical diffusion break between the two metal gates; raised source/drain (S/D) regions formed on sides of the metal gates; and interlayer dielectric formed over the dummy gate, raised S/D regions and metal gates and in openings on sides of the dummy gate.Type: ApplicationFiled: October 23, 2018Publication date: April 23, 2020Inventors: David PRITCHARD, Heng YANG, Hongru REN
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Publication number: 20200058515Abstract: The present disclosure relates to semiconductor structures and, more particularly, to devices with slotted active regions and methods of manufacture. The method includes: forming a mandrel on top of a diffusion region comprising a diffusion material; forming a first material over the mandrel and the diffusion region; removing the mandrel to form multiple spacers each having a thickness; depositing a second material over the spacers and the diffusion material; and forming slots in the diffusion region by removing a portion of the second material over the diffusion region and the underlying diffusion material.Type: ApplicationFiled: October 24, 2019Publication date: February 20, 2020Inventors: Heng YANG, David C. PRITCHARD, George J. KLUTH, Anurag MITTAL, Hongru REN, Manjunatha G. PRABHU, Kai SUN, Neha NAYYAR, Lixia LEI
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Patent number: 10497576Abstract: The present disclosure relates to semiconductor structures and, more particularly, to devices with slotted active regions and methods of manufacture. The method includes: forming a mandrel on top of a diffusion region comprising a diffusion material; forming a first material over the mandrel and the diffusion region; removing the mandrel to form multiple spacers each having a thickness; depositing a second material over the spacers and the diffusion material; and forming slots in the diffusion region by removing a portion of the second material over the diffusion region and the underlying diffusion material.Type: GrantFiled: August 20, 2018Date of Patent: December 3, 2019Assignee: GLOBALFOUNDRIES INC.Inventors: Heng Yang, David C. Pritchard, George J. Kluth, Anurag Mittal, Hongru Ren, Manjunatha G. Prabhu, Kai Sun, Neha Nayyar, Lixia Lei