Patents by Inventor Hongxing Yuan

Hongxing Yuan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11366307
    Abstract: A defect detection system includes a programmable and reconfigurable digital micro-mirror device (DMD) and at least one optical element. The DMD includes a micro-mirror array with a plurality of micro-mirrors adjustable to achieve a first deflection state or a second deflection state. The DMD is configured to receive incoming light and reflect a first portion of the incoming light into a first light channel corresponding to the first deflection state and a second portion of the incoming light into a second light channel corresponding to the second deflection state. The at least one optical element is optically coupled to the first light channel and the second light channel. The at least one optical element is configured to deflect the first portion of the incoming light to a first imaging lens and a second portion of the incoming light to a second imaging lens.
    Type: Grant
    Filed: August 27, 2020
    Date of Patent: June 21, 2022
    Assignee: KLA Corporation
    Inventors: Hongxing Yuan, Tim Mahatdejkul, Bret Whiteside
  • Publication number: 20220066195
    Abstract: A defect detection system includes a programmable and reconfigurable digital micro-mirror device (DMD) and at least one optical element. The DMD includes a micro-mirror array with a plurality of micro-mirrors adjustable to achieve a first deflection state or a second deflection state. The DMD is configured to receive incoming light and reflect a first portion of the incoming light into a first light channel corresponding to the first deflection state and a second portion of the incoming light into a second light channel corresponding to the second deflection state. The at least one optical element is optically coupled to the first light channel and the second light channel. The at least one optical element is configured to deflect the first portion of the incoming light to a first imaging lens and a second portion of the incoming light to a second imaging lens.
    Type: Application
    Filed: August 27, 2020
    Publication date: March 3, 2022
    Inventors: Hongxing Yuan, Tim Mahatdejkul, Bret Whiteside
  • Patent number: 10522426
    Abstract: This system and method minimize an effect of haze to signal-to-noise ratio and compensate for haze on the haze map. A first mask with a first aperture is disposed along the path of the light beam between a light source and a collector. A first actuator moves the first mask along a tangential direction. A second mask with a second aperture is disposed along the path of the light beam between the first mask and the collector. A second actuator moves the second mask along a radial direction perpendicular to the tangential direction. The first mask and the second mask are independently movable along the tangential direction and the radial direction using the first actuator and the second actuator.
    Type: Grant
    Filed: February 8, 2019
    Date of Patent: December 31, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Hongxing Yuan, Dimitry Pokras, William VanHoomissen, Douglas Chan
  • Patent number: 9495984
    Abstract: An apparatus includes a waveguide with first and second sections, and a junction coupling the first and second waveguide sections together. The first waveguide section has a first reflective device and the second section comprising a second reflective device arranged to generate a standing wave in the waveguide with maximum energy wave intensity at a target region of the waveguide in response to an incident energy wave being provided into at least one of the waveguide sections.
    Type: Grant
    Filed: October 19, 2015
    Date of Patent: November 15, 2016
    Assignee: Western Digital (Fremont), LLC
    Inventors: Hongxing Yuan, Jinshan Li, Zhong Shi
  • Patent number: 9384765
    Abstract: A heat-assisted magnetic recording (HAMR) write apparatus includes a laser and has an air-bearing surface (ABS) that resides in proximity to a media during use. The HAMR write apparatus includes a write pole that writes to the media, coil(s) for energizing the write pole and a waveguide optically coupled with the laser. The waveguide includes an entrance distal from the ABS and a bottom proximate to the ABS. The waveguide also includes a mode converter, a mode stripper optically coupled with the mode converter and an inverse tapered section optically coupled with the mode stripper. The mode converter has sides converging from a first width proximate to the entrance to a second width distal from the entrance and less than the first width. The mode stripper is between the inverse tapered section and the mode converter. The inverse tapered section has an entrance and an exit wider than the entrance.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: July 5, 2016
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jianwei Mu, Hongxing Yuan, Michael V. Morelli, Sergei Sochava
  • Publication number: 20160042753
    Abstract: An apparatus includes a waveguide with first and second sections, and a junction coupling the first and second waveguide sections together. The first waveguide section has a first reflective device and the second section comprising a second reflective device arranged to generate a standing wave in the waveguide with maximum energy wave intensity at a target region of the waveguide in response to an incident energy wave being provided into at least one of the waveguide sections.
    Type: Application
    Filed: October 19, 2015
    Publication date: February 11, 2016
    Inventors: HONGXING YUAN, JINSHAN LI, ZHONG SHI
  • Patent number: 9190085
    Abstract: An apparatus includes a waveguide with first and second sections, and a junction coupling the first and second waveguide sections together. The first waveguide section has a first reflective device and the second section comprising a second reflective device arranged to generate a standing wave in the waveguide with maximum energy wave intensity at a target region of the waveguide in response to an incident energy wave being provided into at least one of the waveguide sections.
    Type: Grant
    Filed: July 1, 2014
    Date of Patent: November 17, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Hongxing Yuan, Jinshan Li, Zhong Shi
  • Patent number: 9159346
    Abstract: An apparatus for energy assisted magnetic recording of a storage disk includes a plurality of dielectric waveguide cores disposed near an air bearing surface of a magnetic recording device. Each waveguide core has a fine ridge feature on a first surface of the waveguide core and configured to receive incident light energy from an energy source. A near field transducer (NFT) is formed at the air bearing surface for focusing light energy received from the waveguide core and transmitting the focused light energy onto the storage disk surface to generate a heating spot. The NFT includes at least one plasmonic metal element disposed above the fine ridge features of the waveguide cores to form an interface for delivering propagating surface plasmon polaritons (PSPPs) to the air bearing surface. Each fine ridge feature is configured with a width approximately equivalent to a width of the heating spot.
    Type: Grant
    Filed: January 16, 2015
    Date of Patent: October 13, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jiangrong Cao, Michael V. Morelli, Hongxing Yuan, Peng Zhang, Brad V. Johnson, Matthew R. Gibbons
  • Patent number: 9142233
    Abstract: A heat assisted magnetic recording (HAMR) write transducer has an air-bearing surface (ABS) configured to reside in proximity to a media during use and is coupled with a laser that provides energy. The HAMR transducer includes a main pole, at least one additional pole adjacent to the main pole in a down track direction, a waveguide and at least one coil for energizing the main pole. The main pole is configured to write to a region of the media and is recessed from the ABS by a first distance. The additional pole(s) are recessed from the ABS by a second distance greater than the first distance. The waveguide is optically coupled with the laser and directs a portion of the energy toward the ABS at an acute angle from the ABS. A portion of the waveguide resides between the additional pole(s) and the ABS.
    Type: Grant
    Filed: June 6, 2014
    Date of Patent: September 22, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Matthew R. Gibbons, Hongxing Yuan, Brad V. Johnson, Michael V. Morelli, Lisha Wang, Zhigang Bai, Ge Yi, Yunfei Li, Samuel W. Yuan
  • Patent number: 9064527
    Abstract: A heat-assisted magnetic recording (HAMR) transducer is coupled with a laser for providing energy and has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The HAMR transducer includes a write pole, at least one coil, and a tapered waveguide optically coupled with the laser. The write pole is configured to write to a region of the media. The coil(s) energize the write pole. The tapered waveguide includes an entrance distal from the ABS, a bottom proximate to the ABS, a first side and a second side opposite to the first side. At least a portion of the first side and the second side converge in accordance with a function having at least one term having an order greater than one.
    Type: Grant
    Filed: June 17, 2013
    Date of Patent: June 23, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Zhong Shi, Michael V. Morelli, Hongxing Yuan
  • Patent number: 9007879
    Abstract: An apparatus for energy assisted magnetic recording of a storage disk include a plurality of dielectric waveguide cores configured to direct received incident light energy to a target, and a near field transducer (NFT) configured to focus light energy received from the plurality of waveguide cores and to transmit the focused light energy onto the storage disk surface to generate a heating spot on the storage disk. The NFT includes a plurality of propagating surface plasmon polariton (PSPP) elements that are energized by the light energy from the waveguide cores. Each of the PSPP elements has a plasmonic metal bar disposed above a single waveguide core in a longitudinal alignment. Each metal bar has a width at least twice the width of the heating spot generated on the storage disk.
    Type: Grant
    Filed: July 7, 2014
    Date of Patent: April 14, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jiangrong Cao, Michael V. Morelli, Matthew R. Gibbons, Peng Zhang, Brad V. Johnson, Hongxing Yuan
  • Patent number: 9001629
    Abstract: Systems and methods for suppressing the background energy of a waveguide in an EAMR system are provided. One such system includes a near field transducer having a disk section and a pin section extending from the disk section to an air bearing surface of a slider, a waveguide having a core and a cladding, where the waveguide is configured to couple light energy to the near field transducer, where the cladding is configured to substantially surround the core, and a recess portion positioned between the core and the air bearing surface.
    Type: Grant
    Filed: October 31, 2012
    Date of Patent: April 7, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Hongxing Yuan, Ronald L. Allen, Michael V. Morelli, Matthew R. Gibbons, Zhong Shi
  • Patent number: 8971160
    Abstract: An HAMR NFT pin and main body structure comprising a pin material with high index of refraction and low absorption coefficient is disclosed. The disclosed NFT pin provides a comparable media absorption efficiency to the conventional Au pin while improving on overall NFT reliability. The protrusion of the NFT pin is reduced and overall life of the writer is prolonged. The main body may comprise any noble metal or metal alloy suitable for achieving optical resonance in an HAMR NFT. The cladding material may be selected such that its coefficient of thermal expansion closely matches the coefficient of thermal expansion of the pin material.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: March 3, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Hongxing Yuan, Michael V. Morelli, Jiangrong Cao, Brad V. Johnson, Rabee M. Ikkawi
  • Patent number: 8958168
    Abstract: A method and system provides an EAMR transducer. The transducer is coupled with a laser for providing energy and has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The EAMR transducer includes a composite near field transducer (NFT), a write pole and at least one coil for energizing the write pole. The write pole is configured to write to a region of the media. The composite NFT is for focusing the energy onto the region of the media. The composite NFT includes at least one metal and at least one insulator therein.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: February 17, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Hongxing Yuan, Zhongyan Wang, Michael V. Morelli, Ronald L. Allen
  • Patent number: 8953422
    Abstract: An apparatus for energy assisted magnetic recording of a storage disk includes a plurality of dielectric waveguide cores disposed near an air bearing surface of a magnetic recording device. Each waveguide core has a fine ridge feature on a first surface of the waveguide core and configured to receive incident light energy from an energy source. A near field transducer (NFT) is formed at the air bearing surface for focusing light energy received from the waveguide core and transmitting the focused light energy onto the storage disk surface to generate a heating spot. The NFT includes at least one plasmonic metal element disposed above the fine ridge features of the waveguide cores to form an interface for delivering propagating surface plasmon polaritons (PSPPs) to the air bearing surface. Each fine ridge feature is configured with a width approximately equivalent to a width of the heating spot.
    Type: Grant
    Filed: July 7, 2014
    Date of Patent: February 10, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Jiangrong Cao, Michael V. Morelli, Hongxing Yuan, Peng Zhang, Brad V. Johnson, Matthew R. Gibbons
  • Patent number: 8947985
    Abstract: A heat assisted magnetic recording (HAMR) write transducer has an air-bearing surface (ABS) configured to reside in proximity to a media during use and is coupled with a laser that provides energy. The HAMR transducer includes a main pole, at least one additional pole adjacent to the main pole in a down track direction, a waveguide and at least one coil for energizing the main pole. The main pole is configured to write to a region of the media and is recessed from the ABS by a first distance. The additional pole(s) are recessed from the ABS by a second distance greater than the first distance. The waveguide is optically coupled with the laser and directs a portion of the energy toward the ABS at an acute angle from the ABS. A portion of the waveguide resides between the additional pole(s) and the ABS.
    Type: Grant
    Filed: September 23, 2013
    Date of Patent: February 3, 2015
    Assignee: Western Digital (Fremont), LLC
    Inventors: Michael V. Morelli, Lisha Wang, Zhigang Bai, Hongxing Yuan, Yunfei Li, Zhanjie Li, Matthew R. Gibbons, Samuel W. Yuan
  • Patent number: 8861124
    Abstract: A heat-assisted magnetic recording (HAMR) transducer is coupled with a laser for providing energy and has an air-bearing surface (ABS) configured to reside in proximity to a media during use. The HAMR transducer includes a waveguide optically coupled with the laser and an optical power monitor optically coupled with the waveguide. The waveguide directs energy from the laser toward the media. The optical power monitor is optically coupled with the waveguide. The optical power monitor for captures a portion of the energy, converts the portion of the energy to heat and measures a local temperature proximate to the optical power monitor.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: October 14, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Marc A. Finot, Matthew R. Gibbons, William J. Kozlovsky, Hongxing Yuan
  • Patent number: 8836949
    Abstract: Systems and methods and apparatuses for characterizing near field transducer performance at wafer level using asymmetric interference waveguides are provided. One such system includes a light source, an input grating configured to receive light from the light source, a first waveguide arm and a second waveguide arm, each configured to receive the light, a surface plasmon receptor optically coupled to the first waveguide arm and the second waveguide arm and configured to receive light from the first waveguide arm in a first direction and the second waveguide arm in a second direction opposite of the first direction, where the first and the second waveguide arms are configured to induce a preselected phase difference in light arriving at the surface plasmon receptor, and an output grating optically coupled to the surface plasmon receptor, and a light detector coupled to, and configured to detect light from, the first output grating.
    Type: Grant
    Filed: September 17, 2012
    Date of Patent: September 16, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Zhong Shi, Michael V. Morelli, Hongxing Yuan
  • Patent number: 8811129
    Abstract: A magnetic recording media is disclosed. The media comprises a substrate, a recording layer disposed over the substrate, and a metallic layer disposed between the recording layer and the substrate. The recording layer is configured to receive an electromagnetic radiation, absorb a first portion of the electromagnetic radiation, and transmit a second portion of the electromagnetic radiation. The metallic layer comprises a non-magnetic metal and configured to reflect at least some of the second portion of the electromagnetic radiation towards the recording layer.
    Type: Grant
    Filed: September 25, 2013
    Date of Patent: August 19, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Hongxing Yuan, Shing Lee, Zhong Shi, Jinshan Li
  • Patent number: 8773956
    Abstract: Embodiments of the present invention are directed toward a bi-layer spacer structure and related fabrication processes for improving an interface between a near-field transducer (NFT) and a spacer on an optical waveguide core for an energy assisted magnetic recording (EAMR) system. The embodiments provide a solution for improving the adhesion between the NFT and the spacer.
    Type: Grant
    Filed: December 6, 2011
    Date of Patent: July 8, 2014
    Assignee: Western Digital (Fremont), LLC
    Inventors: Zhongyan Wang, Hongxing Yuan, Shawn M. Tanner, Yufeng Hu