Patents by Inventor Hooman RAHMANI

Hooman RAHMANI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EXTREME ULTRAVIOLET PELLICLE STORAGE AND METHOD OF PRESERVING EXTREME ULTRAVIOLET PELLICLE PROPERTIES THEREOF
    Publication number: 20240337922
    Abstract: A method of storing extreme ultraviolet (EUV) pellicles or pellicle film is disclosed. The method includes selecting a material, such as stainless steel or glass material, for the construction of the storage or transportation containers. Vacuum-sealed or inert-gas-filled containers are further preferred. The material maintains one or more properties of extreme ultraviolet (EUV) lithography pellicle, the one or more properties being selected from EUV transmission rate, EUV transmission variation, EUV scattering, EUV pellicle film deflection, EUV pellicle film tensile strength, or a combination thereof.
    Type: Application
    Filed: March 27, 2024
    Publication date: October 10, 2024
    Applicant: LINTEC OF AMERICA, INC.
    Inventors: Marcio D. LIMA, Sergey LI, Hooman RAHMANI