Patents by Inventor Hoon-Ho Kim

Hoon-Ho Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dry stripping equipment comprising plasma distribution shower head
    Publication number: 20060151115
    Abstract: A plasma distribution device for supplying plasma onto an object in a chamber is provided. The device includes a tube for supplying the plasma into the chamber, and a baffle installed under the tube for controlling flow of the plasma supplied from the tube. The baffle includes an upper shower head and a lower shower head, the upper shower head having a center portion for reflecting the plasma supplied from the tube, and a plurality of holes spaced apart from each other around the center portion for uniformly distributing the plasma.
    Type: Application
    Filed: December 27, 2005
    Publication date: July 13, 2006
    Inventor: Hoon-Ho Kim