Patents by Inventor Hoong Shing Wong
Hoong Shing Wong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240379365Abstract: A method includes forming a first gate dielectric and a second gate dielectric over a first semiconductor region and a second semiconductor region, respectively, depositing a lanthanum-containing layer including a first portion and a second portion overlapping the first gate dielectric and the second gate dielectric, respectively, and depositing a hard mask including a first portion and a second portion overlapping the first portion and the second portion of the lanthanum-containing layer, respectively. The hard mask is free from both of titanium and tantalum. The method further includes forming a patterned etching mask to cover the first portion of the hard mask, with the second portion of the hard mask being exposed, removing the second portion of the hard mask and the second portion of the lanthanum-containing layer, and performing an anneal to drive lanthanum in the first portion of the lanthanum-containing layer into the first gate dielectric.Type: ApplicationFiled: July 22, 2024Publication date: November 14, 2024Inventors: Kuo-Feng Yu, Chun Hsiung Tsai, Jian-Hao Chen, Hoong Shing Wong, Chih-Yu Hsu
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Publication number: 20240079317Abstract: Methods, systems, and devices for techniques to manufacture inter-layer vias are described. In some examples, a manufacturing process for a via to one or more metal lines within an integrated circuit may not include forming a metal pad for the via. For example, the manufacturing process may include forming a layer of dielectric material over a set of metal lines. The manufacturing process may further include forming a cavity through the dielectric layer (e.g., using an etching procedure), exposing the upper surfaces and sidewalls of one or more metal lines of the set. Subsequently, the via may be formed by depositing a conductive material within the cavity. In some cases, the conductive material may be deposited to contact the sidewalls of the one or more metal lines. Such an assembly may establish electrical connection to other electrical components of the integrated circuit.Type: ApplicationFiled: September 6, 2022Publication date: March 7, 2024Inventors: Jun Rong Tan, Keen Wah Chow, Hao Ting Teo, Hoong Shing Wong
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Publication number: 20220285161Abstract: A method includes forming a first gate dielectric and a second gate dielectric over a first semiconductor region and a second semiconductor region, respectively, depositing a lanthanum-containing layer including a first portion and a second portion overlapping the first gate dielectric and the second gate dielectric, respectively, and depositing a hard mask including a first portion and a second portion overlapping the first portion and the second portion of the lanthanum-containing layer, respectively. The hard mask is free from both of titanium and tantalum. The method further includes forming a patterned etching mask to cover the first portion of the hard mask, with the second portion of the hard mask being exposed, removing the second portion of the hard mask and the second portion of the lanthanum-containing layer, and performing an anneal to drive lanthanum in the first portion of the lanthanum-containing layer into the first gate dielectric.Type: ApplicationFiled: May 20, 2022Publication date: September 8, 2022Inventors: Kuo-Feng Yu, Chun Hsiung Tsai, Jian-Hao Chen, Hoong Shing Wong, Chih-Yu Hsu
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Patent number: 11342188Abstract: A method includes forming a first gate dielectric and a second gate dielectric over a first semiconductor region and a second semiconductor region, respectively, depositing a lanthanum-containing layer including a first portion and a second portion overlapping the first gate dielectric and the second gate dielectric, respectively, and depositing a hard mask including a first portion and a second portion overlapping the first portion and the second portion of the lanthanum-containing layer, respectively. The hard mask is free from both of titanium and tantalum. The method further includes forming a patterned etching mask to cover the first portion of the hard mask, with the second portion of the hard mask being exposed, removing the second portion of the hard mask and the second portion of the lanthanum-containing layer, and performing an anneal to drive lanthanum in the first portion of the lanthanum-containing layer into the first gate dielectric.Type: GrantFiled: September 17, 2019Date of Patent: May 24, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Feng Yu, Chun Hsiung Tsai, Jian-Hao Chen, Hoong Shing Wong, Chih-Yu Hsu
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Publication number: 20210082706Abstract: A method includes forming a first gate dielectric and a second gate dielectric over a first semiconductor region and a second semiconductor region, respectively, depositing a lanthanum-containing layer including a first portion and a second portion overlapping the first gate dielectric and the second gate dielectric, respectively, and depositing a hard mask including a first portion and a second portion overlapping the first portion and the second portion of the lanthanum-containing layer, respectively. The hard mask is free from both of titanium and tantalum. The method further includes forming a patterned etching mask to cover the first portion of the hard mask, with the second portion of the hard mask being exposed, removing the second portion of the hard mask and the second portion of the lanthanum-containing layer, and performing an anneal to drive lanthanum in the first portion of the lanthanum-containing layer into the first gate dielectric.Type: ApplicationFiled: September 17, 2019Publication date: March 18, 2021Inventors: Kuo-Feng Yu, Chun Hsiung Tsai, Jian-Hao Chen, Hoong Shing Wong, Chih-Yu Hsu
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Patent number: 10128333Abstract: A FinFET has shaped epitaxial structures for the source and drain that are electrically isolated from the substrate. Shaped epitaxial structures in the active region are separated from the substrate in the source and drain regions while those in the channel region remain. The gaps created by the separation in the source and drain are filled with electrically insulating material. Prior to filling the gaps, defects created by the separation may be reduced.Type: GrantFiled: June 20, 2017Date of Patent: November 13, 2018Assignee: GLOBALFOUNDRIES INC.Inventors: Hoong Shing Wong, Min-hwa Chi, Tae-Hoon Kim
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Publication number: 20170288016Abstract: A FinFET has shaped epitaxial structures for the source and drain that are electrically isolated from the substrate. Shaped epitaxial structures in the active region are separated from the substrate in the source and drain regions while those in the channel region remain. The gaps created by the separation in the source and drain are filled with electrically insulating material. Prior to filling the gaps, defects created by the separation may be reduced.Type: ApplicationFiled: June 20, 2017Publication date: October 5, 2017Applicant: GLOBALFOUNDRIES INC.Inventors: Hoong Shing WONG, Min-hwa CHI, Tae-Hoon KIM
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Patent number: 9337340Abstract: A semiconductor structure in fabrication includes a n-FinFET and p-FinFET. Stress inducing materials such as silicon and silicon germanium are epitaxially grown into naturally diamond-shaped structures atop the silicon fins of the n-FinFET and p-FinFET areas. The diamond structures act as the source, drain and channel between the source and drain. The diamond structures of the channel are selectively separated from the fin while retaining the fin connections of the diamond-shaped growth of the source and the drain. Further fabrication to complete the structure may then proceed.Type: GrantFiled: March 12, 2015Date of Patent: May 10, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Min-Hwa Chi, Hoong Shing Wong
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Publication number: 20160049495Abstract: Semiconductor structures and fabrication methods are provided which includes, for instance, providing a gate structure over a semiconductor substrate, the gate structure including multiple conformal gate layers and a gate material disposed within the multiple conformal gate layers; recessing a portion of the multiple conformal gate layers below an upper surface of the gate structure, where upper surfaces of recessed, multiple conformal gate layers are coplanar; and removing a portion of the gate material to facilitate an upper surface of a remaining portion of the gate material to be coplanar with an upper surface of the recessed, multiple conformal gate layers.Type: ApplicationFiled: August 18, 2014Publication date: February 18, 2016Applicants: LAM RESEARCH CORPORATION, GLOBALFOUNDRIES INC.Inventors: Kristina TREVINO, Yuan-Hung LIU, Gabriel Padron WELLS, Xing ZHANG, Hoong Shing WONG, Chang Ho MAENG, Taejoon HAN, Gowri KAMARTHY, Isabelle ORAIN, Ganesh UPADHYAYA
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Patent number: 9252238Abstract: Semiconductor structures and fabrication methods are provided which includes, for instance, providing a gate structure over a semiconductor substrate, the gate structure including multiple conformal gate layers and a gate material disposed within the multiple conformal gate layers; recessing a portion of the multiple conformal gate layers below an upper surface of the gate structure, where upper surfaces of recessed, multiple conformal gate layers are coplanar; and removing a portion of the gate material to facilitate an upper surface of a remaining portion of the gate material to be coplanar with an upper surface of the recessed, multiple conformal gate layers.Type: GrantFiled: August 18, 2014Date of Patent: February 2, 2016Assignees: LAM RESEARCH CORPORATION, GLOBALFOUNDRIES INC.Inventors: Kristina Trevino, Yuan-Hung Liu, Gabriel Padron Wells, Xing Zhang, Hoong Shing Wong, Chang Ho Maeng, Taejoon Han, Gowri Kamarthy, Isabelle Orain, Ganesh Upadhyaya
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Publication number: 20150311083Abstract: A method includes providing a gate structure having a dummy gate, a first spacer along a side of the gate. The dummy gate and the spacer are removed to expose a gate dielectric. A second spacer is deposited on at least one side of a gate structure cavity and a top of the gate dielectric. A bottom portion of the second spacer is removed to expose the gate dielectric and the gate structure is wet cleaned.Type: ApplicationFiled: April 23, 2014Publication date: October 29, 2015Applicant: GLOBALFOUNDRIES INC.Inventors: Changyong XIAO, Hoong Shing WONG, Deepasree KONDUPARTHI, Rohit PAL
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Patent number: 9159567Abstract: A method includes providing a gate structure having a dummy gate, a first spacer along a side of the gate. The dummy gate and the spacer are removed to expose a gate dielectric. A second spacer is deposited on at least one side of a gate structure cavity and a top of the gate dielectric. A bottom portion of the second spacer is removed to expose the gate dielectric and the gate structure is wet cleaned.Type: GrantFiled: April 23, 2014Date of Patent: October 13, 2015Assignee: GLOBALFOUNDRIES INC.Inventors: Changyong Xiao, Hoong Shing Wong, Deepasree Konduparthi, Rohit Pal
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Patent number: 9153496Abstract: Methods of manufacturing semiconductor integrated circuits having FinFET structures with epitaxially formed source and drain regions are disclosed. A method of fabricating an integrated circuit includes forming a plurality of silicon fin structures on a semiconductor substrate, epitaxially growing a silicon material on the fin structures, wherein a merged source/drain region is formed on the fin structures, and anisotropically etching at least one of the merged source drain regions to form an un-merged source/drain region.Type: GrantFiled: December 15, 2014Date of Patent: October 6, 2015Assignee: GLOBALFOUNDRIES, INC.Inventors: Hoong Shing Wong, Min-hwa Chi
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Patent number: 9147680Abstract: Integrated circuits having replacement metal gates with improved threshold voltage performance and methods for fabricating such integrated circuits are provided. A method includes providing a dielectric layer overlying a semiconductor substrate. The dielectric layer has a first and a second trench. A gate dielectric layer is formed in the first and second trench. A first barrier layer is formed overlying the gate dielectric layer. A work function material layer is formed within the trenches. The work function material layer and the first barrier layer are recessed in the first and second trench. The work function material layer and the first barrier layer form a beveled surface. The gate dielectric layer is recessed in the first and second trench. A conductive gate electrode material is deposited such that it fills the first and second trench. The conductive gate electrode material is recessed in the first and second trench.Type: GrantFiled: July 17, 2013Date of Patent: September 29, 2015Assignee: GLOBALFOUNDRIES, INC.Inventors: Kristina Trevino, Yuan-Hung Lin, Gabriel Padron Wells, Chang Ho Maeng, Taejoon Han, Hoong Shing Wong
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Publication number: 20150221726Abstract: A FinFET has shaped epitaxial structures for the source and drain that are electrically isolated from the substrate. Shaped epitaxial structures in the active region are separated from the substrate in the source and drain regions while those in the channel region remain. The gaps created by the separation in the source and drain are filled with electrically insulating material. Prior to filling the gaps, defects created by the separation may be reduced.Type: ApplicationFiled: February 4, 2014Publication date: August 6, 2015Inventors: Hoong Shing Wong, Min-hwa Chi, Tae-Hoon Kim
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Publication number: 20150187947Abstract: A semiconductor structure in fabrication includes a n-FinFET and p-FinFET. Stress inducing materials such as silicon and silicon germanium are epitaxially grown into naturally diamond-shaped structures atop the silicon fins of the n-FinFET and p-FinFET areas. The diamond structures act as the source, drain and channel between the source and drain. The diamond structures of the channel are selectively separated from the fin while retaining the fin connections of the diamond-shaped growth of the source and the drain. Further fabrication to complete the structure may then proceed.Type: ApplicationFiled: March 12, 2015Publication date: July 2, 2015Applicant: GLOBALFOUNDRIES INC.Inventors: Min-Hwa CHI, Hoong Shing WONG
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Patent number: 9006066Abstract: A semiconductor structure in fabrication includes a n-FinFET and p-FinFET. Stress inducing materials such as silicon and silicon germanium are epitaxially grown into naturally diamond-shaped structures atop the silicon fins of the n-FinFET and p-FinFET areas. The diamond structures act as the source, drain and channel between the source and drain. The diamond structures of the channel are selectively separated from the fin while retaining the fin connections of the diamond-shaped growth of the source and the drain. Further fabrication to complete the structure may then proceed.Type: GrantFiled: April 26, 2013Date of Patent: April 14, 2015Assignee: GLOBALFOUNDRIES Inc.Inventors: Min-Hwa Chi, Hoong Shing Wong
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Publication number: 20150099336Abstract: Methods of manufacturing semiconductor integrated circuits having FinFET structures with epitaxially formed source and drain regions are disclosed. A method of fabricating an integrated circuit includes forming a plurality of silicon fin structures on a semiconductor substrate, epitaxially growing a silicon material on the fin structures, wherein a merged source/drain region is formed on the fin structures, and anisotropically etching at least one of the merged source drain regions to form an un-merged source/drain region.Type: ApplicationFiled: December 15, 2014Publication date: April 9, 2015Inventors: Hoong Shing Wong, Min-hwa Chi
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Patent number: 8946029Abstract: Methods of manufacturing semiconductor integrated circuits having FinFET structures with epitaxially formed source and drain regions are disclosed. For example, a method of fabricating an integrated circuit includes forming a plurality of silicon fin structures on a semiconductor substrate, forming disposable spacers on vertical sidewalls of the fin structures, and depositing a silicon oxide material over the fins and over the disposable spacers. The method further includes anisotropically etching at least one of the fin structures and the disposable spacers on the sidewalls of the at least one fin structure, thereby leaving a void in the silicon oxide material, and etching the silicon oxide material and the disposable spacers from at least one other of the fin structures, while leaving the at least one other fin structure un-etched. Still further, the method includes epitaxially growing a silicon material in the void and on the un-etched fin structure.Type: GrantFiled: November 12, 2012Date of Patent: February 3, 2015Assignee: GLOBALFOUNDRIES, Inc.Inventors: Hoong Shing Wong, Min-hwa Chi
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Patent number: 8940650Abstract: A method of fabricating an integrated circuit includes the steps of providing a semiconductor substrate comprising a semiconductor device disposed thereon and depositing a first silicon nitride layer over the semiconductor substrate and over the semiconductor device using a first deposition process. The first deposition process is a plasma-enhanced chemical vapor deposition (PECVD) process that operates over a plurality of cycles, each cycle having a first time interval and a second time interval. The PECVD process includes the steps of generating a plasma with a power source during the first time interval, the plasma comprising reactive ionic and radical species of a silicon-providing gas and a nitrogen-providing gas, and discontinuing generating the plasma during the second time interval immediately subsequent to the first time interval. The method further includes depositing a second silicon nitride layer over the first silicon nitride layer after the plurality of cycles.Type: GrantFiled: March 6, 2013Date of Patent: January 27, 2015Assignee: GLOBALFOUNDRIES, Inc.Inventors: Huy Cao, Huang Liu, Hoong Shing Wong, Songkram Srivathanakul, Sandeep Gaan