Patents by Inventor Horng-Chih Lin

Horng-Chih Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11257845
    Abstract: A radio frequency integrated circuit includes a silicon CMOS substrate with at least one CMOS device buried therein, and at least one thin film transistor formed on the silicon CMOS substrate and functioning as a radio frequency device. The thin film transistor includes a T-shaped gate electrode. A method for the fabricating a radio frequency integrated circuit is also disclosed.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: February 22, 2022
    Assignee: National Chiao Tung University
    Inventors: Horng-Chih Lin, Yu-An Huang
  • Publication number: 20210375946
    Abstract: A radio frequency integrated circuit includes a silicon CMOS substrate with at least one CMOS device buried therein, and at least one thin film transistor formed on the silicon CMOS substrate and functioning as a radio frequency device. The thin film transistor includes a T-shaped gate electrode. A method for the fabricating a radio frequency integrated circuit is also disclosed.
    Type: Application
    Filed: July 27, 2020
    Publication date: December 2, 2021
    Inventors: Horng-Chih Lin, Yu-An Huang
  • Patent number: 9653552
    Abstract: A fin-FET or other multi-gate transistor is disclosed. The transistor comprises a semiconductor substrate having a first lattice constant, and a semiconductor fin extending from the semiconductor substrate. The fin has a second lattice constant, different from the first lattice constant, and a top surface and two opposed side surfaces. The transistor also includes a gate dielectric covering at least a portion of the top surface and the two opposed side surfaces, and a gate electrode covering at least a portion of the gate dielectric. The resulting channel has a strain induced therein by the lattice mismatch between the fin and the substrate. This strain can be tuned by selection of the respective materials.
    Type: Grant
    Filed: July 8, 2016
    Date of Patent: May 16, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hong-Nien Lin, Horng-Chih Lin, Tiao-Yuan Huang
  • Publication number: 20160322463
    Abstract: A fin-FET or other multi-gate transistor is disclosed. The transistor comprises a semiconductor substrate having a first lattice constant, and a semiconductor fin extending from the semiconductor substrate. The fin has a second lattice constant, different from the first lattice constant, and a top surface and two opposed side surfaces. The transistor also includes a gate dielectric covering at least a portion of the top surface and the two opposed side surfaces, and a gate electrode covering at least a portion of the gate dielectric. The resulting channel has a strain induced therein by the lattice mismatch between the fin and the substrate. This strain can be tuned by selection of the respective materials.
    Type: Application
    Filed: July 8, 2016
    Publication date: November 3, 2016
    Inventors: Hong-Nien Lin, Horng-Chih Lin, Tiao-Yuan Huang
  • Patent number: 9406800
    Abstract: A fin-FET or other multi-gate transistor is disclosed. The transistor comprises a semiconductor substrate having a first lattice constant, and a semiconductor fin extending from the semiconductor substrate. The fin has a second lattice constant, different from the first lattice constant, and a top surface and two opposed side surfaces. The transistor also includes a gate dielectric covering at least a portion of the top surface and the two opposed side surfaces, and a gate electrode covering at least a portion of the gate dielectric. The resulting channel has a strain induced therein by the lattice mismatch between the fin and the substrate. This strain can be tuned by selection of the respective materials.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: August 2, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hong-Nien Lin, Horng-Chih Lin, Tiao-Yuan Huang
  • Publication number: 20160104800
    Abstract: A fin-FET or other multi-gate transistor is disclosed. The transistor comprises a semiconductor substrate having a first lattice constant, and a semiconductor fin extending from the semiconductor substrate. The fin has a second lattice constant, different from the first lattice constant, and a top surface and two opposed side surfaces. The transistor also includes a gate dielectric covering at least a portion of the top surface and the two opposed side surfaces, and a gate electrode covering at least a portion of the gate dielectric. The resulting channel has a strain induced therein by the lattice mismatch between the fin and the substrate. This strain can be tuned by selection of the respective materials.
    Type: Application
    Filed: December 15, 2015
    Publication date: April 14, 2016
    Inventors: Hong-Nien Lin, Horng-Chih Lin, Tiao-Yuan Huang
  • Patent number: 9214554
    Abstract: A fin-FET or other multi-gate transistor is disclosed. The transistor comprises a semiconductor substrate having a first lattice constant, and a semiconductor fin extending from the semiconductor substrate. The fin has a second lattice constant, different from the first lattice constant, and a top surface and two opposed side surfaces. The transistor also includes a gate dielectric covering at least a portion of the top surface and the two opposed side surfaces, and a gate electrode covering at least a portion of the gate dielectric. The resulting channel has a strain induced therein by the lattice mismatch between the fin and the substrate. This strain can be tuned by selection of the respective materials.
    Type: Grant
    Filed: January 28, 2015
    Date of Patent: December 15, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hong-Nien Lin, Horng-Chih Lin, Tiao-Yuan Huang
  • Publication number: 20150206970
    Abstract: A fin-FET or other multi-gate transistor is disclosed. The transistor comprises a semiconductor substrate having a first lattice constant, and a semiconductor fin extending from the semiconductor substrate. The fin has a second lattice constant, different from the first lattice constant, and a top surface and two opposed side surfaces. The transistor also includes a gate dielectric covering at least a portion of the top surface and the two opposed side surfaces, and a gate electrode covering at least a portion of the gate dielectric. The resulting channel has a strain induced therein by the lattice mismatch between the fin and the substrate. This strain can be tuned by selection of the respective materials.
    Type: Application
    Filed: January 28, 2015
    Publication date: July 23, 2015
    Inventors: Hong-Nien Lin, Horng-Chih Lin, Tiao-Yuan Huang-Yu
  • Patent number: 8946811
    Abstract: A fin-FET or other multi-gate transistor is disclosed. The transistor comprises a semiconductor substrate having a first lattice constant, and a semiconductor fin extending from the semiconductor substrate. The fin has a second lattice constant, different from the first lattice constant, and a top surface and two opposed side surfaces. The transistor also includes a gate dielectric covering at least a portion of said top surface and said two opposed side surfaces, and a gate electrode covering at least a portion of said gate dielectric. The resulting channel has a strain induced therein by the lattice mismatch between the fin and the substrate. This strain can be tuned by selection of the respective materials.
    Type: Grant
    Filed: July 10, 2006
    Date of Patent: February 3, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hong-Nien Lin, Horng-Chih Lin, Tiao-Yuan Huang
  • Patent number: 8932916
    Abstract: A method for fabricating a thin-film transistor is disclosed. Firstly, a patterned dielectric mask structure with a bottom thereof having a gate dielectric layer is formed on a gate-stacked structure so that the gate dielectric layer covers a gate of the gate-stacked structure. Top surface of the patterned dielectric mask structure has at least two openings. A semiconductor layer is formed on the gate-stacked structure via the openings by a sputtering method. The semiconductor layer comprises a channel above the gate, a source and a drain below the openings. The channel has a thickness which sequentially decreases from edge to center.
    Type: Grant
    Filed: November 8, 2013
    Date of Patent: January 13, 2015
    Assignee: National Chiao Tung University
    Inventors: Horng-Chih Lin, Rong-Jhe Lyu
  • Publication number: 20140357017
    Abstract: A method for fabricating a thin-film transistor is disclosed. Firstly, a patterned dielectric mask structure with a bottom thereof having a gate dielectric layer is formed on a gate-stacked structure so that the gate dielectric layer covers a gate of the gate-stacked structure. Top surface of the patterned dielectric mask structure has at least two openings. A semiconductor layer is formed on the gate-stacked structure via the openings by a sputtering method. The semiconductor layer comprises a channel above the gate, a source and a drain below the openings. The channel has a thickness which sequentially decreases from edge to center.
    Type: Application
    Filed: November 8, 2013
    Publication date: December 4, 2014
    Applicant: NATIONAL CHIAO TUNG UNIVERSITY
    Inventors: HORNG-CHIH LIN, RONG-JHE LYU
  • Patent number: 7977755
    Abstract: The present invention discloses a suspended nanochannel transistor structure and a method for fabricating the same. The transistor structure of the present invention comprises a substrate; a side gate formed on the substrate; a dielectric layer covering the substrate and the side gate; a suspended nanochannel formed beside the lateral of the side gate with an air gap existing between the suspended nanochannel and the dielectric layer; a source and a drain formed over the dielectric layer and respectively arranged at two ends of the suspended nanochannel. The electrostatic force of the side gate attracts or repels the suspended nanochannel and thus fast varies the equivalent thickness of the side-gate dielectric layer. Thereby, the on/off state of the element is rapidly switched, or the initial voltage of the channel is altered.
    Type: Grant
    Filed: December 17, 2008
    Date of Patent: July 12, 2011
    Assignee: National Chiao Tung University
    Inventors: Horng-Chih Lin, Chun-Jung Su, Hsing-Hui Hsu, Guan-Jang Li
  • Patent number: 7972912
    Abstract: A method of fabricating a semiconductor device includes first providing an insulation substrate. A patterned conductive layer is formed over the insulation substrate, and the patterned conductive layer includes a channel region and a number of protruding regions. A gate structure layer is formed over the insulation substrate. The gate structure layer covers a part of the patterned conductive layer, and each of the protruding regions has an exposed region. A doping process is performed to dope at least the exposed region of the patterned conductive layer to form a number of S/D regions.
    Type: Grant
    Filed: January 13, 2009
    Date of Patent: July 5, 2011
    Assignee: Industrial Technology Research Institute
    Inventors: Huai-Yuan Tseng, Chen-Pang Kung, Horng-Chih Lin, Ming-Hsien Lee
  • Patent number: 7723789
    Abstract: A nonvolatile memory device with nanowire channel and a method for fabricating the same are proposed, in which side etching is used to shrink side walls of a side-gate to form a nanowire pattern, thereby fabricating a nanowire channel on the dielectric of the side walls of the side-gate. A nonvolatile memory device with nanowire channel and dual-gate control can thus be achieved. This nonvolatile memory device can enhance data writing and erasing efficiency, and also has the capability of low voltage operation. Moreover, through a process of low cost and easy steps, highly reproducible and mass producible fabrication of nanowire devices can be accomplished.
    Type: Grant
    Filed: February 4, 2008
    Date of Patent: May 25, 2010
    Assignee: National Chiao Tung University
    Inventors: Horng-Chih Lin, Chun-Jung Su, Hsin-Hwei Hsu
  • Publication number: 20090130804
    Abstract: A method of fabricating a semiconductor device includes first providing an insulation substrate. A patterned conductive layer is formed over the insulation substrate, and the patterned conductive layer includes a channel region and a number of protruding regions. A gate structure layer is formed over the insulation substrate. The gate structure layer covers a part of the patterned conductive layer, and each of the protruding regions has an exposed region. A doping process is performed to dope at least the exposed region of the patterned conductive layer to form a number of S/D regions.
    Type: Application
    Filed: January 13, 2009
    Publication date: May 21, 2009
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Huai-Yuan Tseng, Chen-Pang Kung, Horng-Chih Lin, Ming-Hsien Lee
  • Patent number: 7504694
    Abstract: A structure of semiconductor device including an insulation substrate is provided. A channel layer is disposed on the insulation substrate. A plurality of doped layers is disposed on the insulation substrate, and protrudes from the channel layer. The doped layers form at least two source/drain electrode (S/D electrode) pairs, and each of the S/D electrode pairs has a different extension direction with respect to the channel layer. A gate dielectric layer is disposed on the channel layer. A gate layer is disposed on the gate dielectric layer. Preferably, for example, the extension direction of at least one of the S/D electrode pairs is a first direction, and the extension direction of at least another one of the S/D electrode pairs is a second direction.
    Type: Grant
    Filed: September 7, 2006
    Date of Patent: March 17, 2009
    Assignee: Industrial Technology Research Institute
    Inventors: Huai-Yuan Tseng, Chen-Pang Kung, Horng-Chih Lin, Ming-Hsien Lee
  • Publication number: 20090065852
    Abstract: A nonvolatile memory device with nanowire channel and a method for fabricating the same are proposed, in which side etching is used to shrink side walls of a side-gate to form a nanowire pattern, thereby fabricating a nanowire channel on the dielectric of the side walls of the side-gate. A nonvolatile memory device with nanowire channel and dual-gate control can thus be achieved. This nonvolatile memory device can enhance data writing and erasing efficiency, and also has the capability of low voltage operation. Moreover, through a process of low cost and easy steps, highly reproducible and mass producible fabrication of nanowire devices can be accomplished.
    Type: Application
    Filed: February 4, 2008
    Publication date: March 12, 2009
    Inventors: Horng-Chih LIN, Chun-Jung Su, Hsin-Hwei Hsu
  • Publication number: 20080006908
    Abstract: A fin-FET or other multi-gate transistor is disclosed. The transistor comprises a semiconductor substrate having a first lattice constant, and a semiconductor fin extending from the semiconductor substrate. The fin has a second lattice constant, different from the first lattice constant, and a top surface and two opposed side surfaces. The transistor also includes a gate dielectric covering at least a portion of said top surface and said two opposed side surfaces, and a gate electrode covering at least a portion of said gate dielectric. The resulting channel has a strain induced therein by the lattice mismatch between the fin and the substrate. This strain can be tuned by selection of the respective materials.
    Type: Application
    Filed: July 10, 2006
    Publication date: January 10, 2008
    Inventors: Hong-Nien Lin, Horng-Chih Lin, Tiao-Yuan Huang
  • Publication number: 20070267697
    Abstract: A structure of semiconductor device including an insulation substrate is provided. A channel layer is disposed on the insulation substrate. A plurality of doped layers is disposed on the insulation substrate, and protrudes from the channel layer. The doped layers form at least two source/drain electrode (S/D electrode) pairs, and each of the S/D electrode pairs has a different extension direction with respect to the channel layer. A gate dielectric layer is disposed on the channel layer. A gate layer is disposed on the gate dielectric layer. Preferably, for example, the extension direction of at least one of the S/D electrode pairs is a first direction, and the extension direction of at least another one of the S/D electrode pairs is a second direction.
    Type: Application
    Filed: September 7, 2006
    Publication date: November 22, 2007
    Applicant: Industrial Technology Research Institute
    Inventors: Huai-Yuan Tseng, Chen-Pang Kung, Horng-Chih Lin, Ming-Hsien Lee
  • Patent number: 6667508
    Abstract: A novel structure of nonvolatile memory is formed on p type silicon and includes a stacked gate, a tunneling dielectric layer, a floating gate (FG), a dielectric layer and a control gate (CG). One side of the stacked gate has a source region and the other has a drain region, wherein the surface of the source region includes a thin metal silicide connected with a channel region to form a Schottky barrier. A tilted angle implant with As or P doping is performed on the p type silicon substrate to form a drain region and extend a portion of the drain region to a channel region under the stacked gate. For implanting, an n doped source region is also formed, creating an offset between the source region and the channel region as a result of the tilted angle implant. For programming, the source region is grounded, positive voltage is applied to the drain region and the gate, such that the hot carriers inject into the floating gate through the channel adjacent to the source region.
    Type: Grant
    Filed: December 19, 2001
    Date of Patent: December 23, 2003
    Inventors: Horng-Chih Lin, Tiao-Yuan Huang